• Transactions on Electrical and Electronic Materials
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• 제18권2호
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• pp.74-77
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• 2017

In this work, we investigated the etching characteristics of TaNO thin films and the selectivity of TaNO to $SiO_2$ in an $O_2$/CF4/Ar inductively coupled plasma (ICP) system. The maximum etch rate of TaNO thin film was 297.1 nm/min at a gas mixing ratio of O2/CF4/Ar (6:16:4 sccm). At the same time, the etch rate was measured as a function of the etching parameters, such as the RF power, DC-bias voltage, and process pressure. X-ray photoelectron spectroscopy analysis showed the efficient destruction of the oxide bonds by the ion bombardment, as well as the accumulation of low volatile reaction products on the etched surface. Based on these data, the ion-assisted chemical reaction was proposed as the main etch mechanism for the $CF_4$-containing plasmas.

• 한국유체기계학회 논문집
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• 제15권1호
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• pp.64-69
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• 2012

Currently axial flow compressor is used primarily in a large power generation gas turbine. In this paper,the main factors to be considered when designing a axial flow compressor were compared to those of a small power generation gas turbine(DGT-5). The main design parameters was examined in the aspect ratio, solidity, as well as reaction, diffusion factor, incidence angle, etc. The results in case of a small compressor are showed a regular pattern but there were not found any specific design patterns for a large class compressor.

• 설비공학논문집
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• 제23권6호
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• pp.383-391
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• 2011

Numerical simulations have been conducted for the cylindrical steam reformer having various boundary temperature distributions. $CH_4$, $H_2O$, CO, $H_2$ and $CO_2$ are often generated or destroyed by the reactions, namely the Steam Reofrming(SR) reaction, the Water-Gas Shift (WGS) reaction and the Direct Steam Reforming(DSR) reaction. The SR and the DSR reactions are endothermic reactions, and the WGS reaction is an exothermic reaction. The rate of reactions can be slightly controlled by artificially given boundary temperature distributions. Therefore, the component ratio of the gases at the outlet are different for various boundary temperature distributions, namely the constant, cubic and linear distributions. Among these distributions, the linear temperature distribution is outstanding for efficient hydrogen production of the steam reformer.

• 한국수소및신에너지학회논문집
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• 제26권5호
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• pp.445-452
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• 2015

A tubular packed bed reactor for the steam-$CO_2$ combined reforming of natural gas to produce the synthesis gas of a target $H_2/CO$ ratio 2.0 was simulated. The effects of the reactor dimension, the feed gas composition, and the gas feeding temperature upon the possibility of coke formation across the catalyst bed were investigated. For this purpose, 2-dimensional heterogeneous reactor model was used to determine the local gas concentrations and temperatures over the catalyst bed. The thermodynamic potential distribution of coke formation was determined by comparing the extent of reaction with the equilibrium constant given by the reaction, $CH_4+2CO{\Leftrightarrow}3C+2H_2O$. The simulation showed that catalysts packed in the central region nearer the entrance of the reactor were more prone to coking because of the regional characteristics of lower temperature, lower concentration of $H_2O$, and higher concentration of CO. With the higher feeding temperature, the feed gas composition of the increased $H_2O$ and correspondingly decreased $CO_2$, or the decrease in the reactor diameter, the volume fraction of the catalyst bed subsequent to coking could be diminished. Throughout the simulation, reactor dimension and reaction condition for coking-free operation were suggested.

• 청정기술
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• 제28권1호
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• pp.1-8
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• 2022

미활용 저급자원인 석유코크스를 대상으로 고순도의 수소 생산을 위한 수성가스전이반응에 적용가능성을 확인하기 위하여 Cu/ZnO/MgO/Al₂O₃ (CZMA) 촉매를 공침법을 사용하여 제조하였다. 제조된 촉매는 BET, H₂-TPR을 사용하여 분석되었다. 촉매의 반응성 테스트는 고농도의 CO를 포함하는 합성가스로부터 단일 Low Temperature Shift 반응을 거치는 경우와 High Temperature Shift 반응을 거친 후 스팀의 응축 없이 즉시 LTS 반응을 거치는 두 가지의 경우를 비교 및 분석하였다. 두 조건에서 steam/CO 비, 유량 및 유속, 온도에 따른 반응특성을 확인하였다. 전환된 저농도의 CO와 스팀이 응축 없이 LTS로 즉시 주입되는 경우 많은 양의 스팀이 존재함에도 불구하고 대부분의 조건에서 다소 낮은 CO 전환율을 나타냈다. 또한 steam/CO비, 온도 및 유속에 대한 영향이 크게 나타나 최적의 조업조건을 결정하기에 추가적인 분석이 요구되었다. 반면, 고농도의 CO 기체를 포함하는 조건에서는 탄소침적 또는 촉매의 활성 저하가 나타나지 않았으며 대부분의 조건에서 높은 CO 전환율을 나타내었다. 결론적으로 Cu/ZnO/MgO/Al₂O₃ 촉매를 적용하여 고농도의 CO를 포함하는 합성가스 조성에서 적절한 조업조건을 적용시키면 단일 LTS 반응을 적용해도 고농도의 CO를 CO₂로 충분히 전환 가능함을 확인하였다.

• 한국수소및신에너지학회논문집
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• 제26권4호
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• pp.369-376
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• 2015

Recently KEPCO, KOGAS and other institutions are jointly conducting an R&D for the development and demonstration of the power generation system based on a natural gas/diesel engine on an island. As a preliminary study, co-combustion in the dual fuel engine, which is expected to produce a few mega-watts of electricity, was modeled and calculated using computational fluid dynamics (CFD). The applied key assumptions are 2-dimensional axisymmetric, transient and static volume chemical reaction. Based on the selected blending ratio, which is the key operating condition, natural gas is substituted instead of diesel fuel (basis of high heating value). Results showed that as the blending ratio increases, the reaction rate of the combustion increases and thus maximum temperature is reached more rapidly. For the optimal performance, various geometric or operational studies will further be conducted.

• 대한기계학회논문집B
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• 제32권8호
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• pp.574-581
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• 2008

The characteristics of combustion and flow for a lean premixed flame in lab-scale gas turbine combustor was studied through experiment and numerical analysis. From the experiment, flame structure and heat release rate were obtained from OH emission spectroscopy. Qualitative comparisons were made line-integrated OH chemiluminescence image and abel-transformed one. NOx analyzer was implemented to get the characteristic of NOx exhaust from the combustor. From the numerical analysis, the thermal distribution and characteristic of recirculation zone with the change of fuel-air mixing degree, the characteristic of methane distribution with equivalence ratio in the combustor respectively. Total heat release rate is increased with increasing equivalence ratio. Thermal Nox is reduced with increasing fuel-air mixing degree. Increasing equivalence ratio results in the decrease of the size of reaction zone and alteration of the position of the reaction zone into the entrance of the combustor.

• 한국대기환경학회지
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• 제15권2호
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• pp.183-190
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• 1999

Magnetite was synthesized with $FeSO_4$, and NaOH for the decomposition of carbon dioxide and for the study of the methane formation. The chemical equivalent ratio was changed from 0.5 to 1.50 for the magnetite synthesis. The chemical equivalent ratio was fixed in 1.00, and Nickel chloride and Rhodium chloride equally added and synthesized with the ratio was of 0.10~10.00 mole%. The crystal strucure of the synthesized magnetite was measured XRD. Putting synthesized magnetite in the reactor and using hydrogen gas oxygen-deficient magnetite was made. Injecting carbon dioxide in the reactor, the decomposition reaction was experimented. The formation of methane was confirmed injecting hydrogen gas in the reactor after carbon dioxide was decomposed.

• Journal of Photoscience
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• 제12권2호
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• pp.101-107
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• 2005

Infrared multiphoton dissociation of $CHCl_2F$ was studied using $CO_2$ laser excitation. Three products, $C_2Cl_2F_2$, $C_2ClF_3$, and $C_2HClF_2$, were identified by the analysis of the gas mixture from the photoreaction of $CHCl_2F$. The dependence of the reaction probability on added Ar gas pressure and excitation laser pulse energy was investigated. At low pressure (< 10 torr), the reaction probability increased as Ar pressure increased due to the rotational hole-filling effect, while it diminished with the increase of Ar pressure at high pressure (> > 20 torr) due to the collisional deactivation. The ratio of two products $(C_2ClF_3/C_2Cl_2F_2)$ decreased at low pressure (< 10 torr) and increased at high pressure (> 20 torr) with the increase of Ar pressure. The log-log plot of the reaction probability vs. laser pulse energy (${\\phi}$) was found to have a linear relationship, and its slope decreased as the added Ar pressure was increased. The reaction mechanisms for product formation have been suggested and validated by experimental evidences and considering the energetics. Fluorine-chlorine exchange reaction in the intermediate complex has been suggested to explain the formation of $C_2ClF_3$.

• 한국생산제조학회지
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• 제22권1호
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• pp.119-124
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• 2013

In this paper, we analysed fatty acid methyl ester contents in the biodiesel which is produced from the newly developed biodiesel production equipment. The lard oil was used as the raw material through various experimental conditions. Thirty one experiments were conducted, which were based on the experimental conditions that designed by central composite design method. The effects of four independent variables, including reaction temperature, reaction time, oil to methanol molar ratio, and catalytic amount, were investigated at five levels using central composite design (CCD). Fatty acid methyl ester content was chosen dependent variable. Although the results of analysis of the surface with an irregular surface geometry showed that the biodiesel was partially impure after the reaction due to the natural characteristics of the lard oil as the raw material, we could confirm the relationship between them from the facts that the production amount of fatty acid methyl ester changes according to reaction temperature, reaction time, oil to methanol molar ratio, and catalytic amount.