• 한국표면공학회지
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• 제33권2호
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• pp.101-106
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• 2000

SOI (Silicon-On-Insulator) substrates were fabricated with varying annealing temperature of $25-660^{\circ}C$ by a linear annealing method, which was modified RTA process using a linear shape heat source. The annealing method was applied to Si ∥ $SiO_2$/Si pair pre-contacted at room temperature after wet cleaning process. The bonding strength of SOI substrates was measured by two methods of Razor-blade crack opening and direct tensile test. The fractured surfaces after direct tensile test were also investigated by the optical microscope as well as $\alpha$-STEP gauge. The interface bonding energy was 1140mJ/m$^2$ at the annealing temperature of $430^{\circ}C$. The fracture strength was about 21MPa at the temperature of $430^{\circ}C$. These mechanical properties were not reported with the conventional furnace annealing or rapid thermal annealing method at the temperature below $500^{\circ}C$. Our results imply that the bonded wafer pair could endure CMP (Chemo-Mechanical Polishing) or Lapping process without debonding, fracture or dopant redistribution.

• Transactions on Electrical and Electronic Materials
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• 제14권1호
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• pp.32-35
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• 2013

In this paper, a manufacturing process was developed for fabricating high-quality AlGaN/GaN high electron mobility transistors (HEMTs) on silicon carbide (SiC) substrates. Various conditions and processing methods regarding the ohmic contact and pre-metal-deposition $BCl_3$ etching processes were evaluated in terms of the device performance. In order to obtain a good ohmic contact performance, we tested a Ti/Al/Ta/Au ohmic contact metallization scheme under different rapid thermal annealing (RTA) temperature and time. A $BCl_3$-based reactive-ion etching (RIE) method was performed before the ohmic metallization, since this approach was shown to produce a better ohmic contact compared to the as-fabricated HEMTs. A HEMT with a 0.5 ${\mu}m$ gate length was fabricated using this novel manufacturing process, which exhibits a maximum drain current density of 720 mA/mm and a peak transconductance of 235 mS/mm. The X-band output power density was 6.4 W/mm with a 53% power added efficiency (PAE).

• Journal of Advanced Marine Engineering and Technology
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• 제15권3호
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• pp.57-65
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• 1991

The quenching of steels by water is one of the important problems in engineering for the applications of heat treatment or continuous casting process, but the fundamental researches by the theoretical approaches have not been satisfactorily improved yet. The very rapid cooling problems by the thermal conduction including the latent heat of phase transformation in steel and the transient boiling heat transfer of water on the surface of the steel covering from $850^{\circ}C$ to $20^{\circ}C$ are the key problems of heat treatment. The present quenching experiments are performed for the cylindrical specimens of carbon steel, S45C of diameters (12-30). Nonlinear transient heat conduction and transient boiling heat transfer problem of water on the surface of specimens is analyzed by the numerical method of inverse heat conduction problem. The conditions for the calculation are that the initial temperature of specimens is $820^{\circ}C$ and the cooling water in bath are $20^{\circ}C$,$40^{\circ}C$,$60^{\circ}C$,$80^{\circ}C$,$95^{\circ}C$ with no agitation.

• 소성∙가공
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• 제23권4호
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• pp.238-243
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• 2014

Recently, magnesium alloys have been widely used in the automotive, aerospace and electronics industries with the advantages of high specific strength, excellent machinability, high electrical conductivity, and high thermal conductivity. Deep drawn magnesium alloys not only meet the demands environmentally and the need for lighter products, but also can lead to remarkably improved productivity and more rapid qualification of the product The current study reports on a failure prediction procedure using finite element modeling (FEM) and a ductile fracture criterion and applies this procedure to the design of a deep drawing process. Critical damage values were determined from a series of uniaxial tensile tests and FEM simulations. They were then expressed as a function of strain rate and temperature. Based on the plastic deformation histories obtained from the FEM analyses of the warm drawing process and the critical damage value curves, the initiation time and location of fracture were predicted. The proposed method was applied to the process design for fabrication of a Mg automotive compressor case and verified with experimental results. The final results indicate that a Mg case part 39% lighter than an Al die casting part can be produced without any defects.

• Journal of Advanced Marine Engineering and Technology
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• 제20권2호
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• pp.75-75
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• 1996

The rapid expansion for the auto-industry and the worldwide trend toward non-asbestos friction materials for brake lining force our industry to transfer into non-asbestos ones from asbestos-based friction materials. Furthermore, it is imperative for the friction materials to have technological excellence and lower production cost to be competitive in the world market. There is no known theoretical procedures to formulate friction materials. It, rather, depends on the trial and error process. Thus, it is quite clear how important it is to accumulate the know-how on the formulation and manufacturing the friction material. This study concerns the practical ways of conceptualizing the formulation and optimizing the manufacturing process. This study focused on the development of formulation for non-asbestos friction material as well as deriving the physical properties of the trial product to prove its validity and applicability. Elaboration of the formula and optimizing scheme of the manufacturing process to get better quality are also sought. Physical properties were obtained by constant velocity test dynamotest, hardness test and strength test. Differential scanning calorimeter was also used to analyze the thermal reactions of organic constituents, microstructures, bond effects, and degree of mixture.

• Journal of Advanced Marine Engineering and Technology
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• 제20권2호
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• pp.7-14
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• 1996

The rapid expansion for the auto-industry and the worldwide trend toward non-asbestos friction materials for brake lining force our industry to transfer into non-asbestos ones from asbestos-based friction materials. Furthermore, it is imperative for the friction materials to have technological excellence and lower production cost to be competitive in the world market. There is no known theoretical procedures to formulate friction materials. It, rather, depends on the trial and error process. Thus, it is quite clear how important it is to accumulate the know-how on the formulation and manufacturing the friction material. This study concerns the practical ways of conceptualizing the formulation and optimizing the manufacturing process. This study focused on the development of formulation for non-asbestos friction material as well as deriving the physical properties of the trial product to prove its validity and applicability. Elaboration of the formula and optimizing scheme of the manufacturing process to get better quality are also sought. Physical properties were obtained by constant velocity test dynamotest, hardness test and strength test. Differential scanning calorimeter was also used to analyze the thermal reactions of organic constituents, microstructures, bond effects, and degree of mixture.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• Corrosion Science and Technology
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• 제7권2호
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• pp.69-76
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• 2008

Common methods for large scale hydrogen production, such as steam reforming and coal gasification, also involve production of carbonaceous gases. It is therefore necessary to handle process gas streams involving various mixtures of hydrocarbons, $H_2$, $H_2O$, CO and $CO_2$ at moderate to high temperatures. These gases pose a variety of corrosion threats to the alloys used in plant construction. Carbon is a particularly aggressive corrodent, leading to carburisation and, at high carbon activities, to metal dusting. The behaviour of commercial heat resisting alloys 602CA and 800, together with that of 304 stainless steel, was studied during thermal cycling in $CO/CO_2$ at $650-750^{\circ}C$, and also in $CO/H_2/H_2O$ at $680^{\circ}C$. Thermal cycling caused repeated scale separation, which accelerated chromium depletion from the alloy subsurface regions. The $CO/H_2/H_2O$ gas, with $a_C=2.9$ and $p(O_2)=5\times10^{-23}$ atm, caused relatively rapid metal dusting, accompanied by some internal carburisation. In contrast, the $CO/CO_2$ gas, with $a_C=7$ and $p(O_2)=10^{-23}-10^{-24}$ atm caused internal precipitation in all three alloys, but no dusting. Inward diffusion of oxygen led to in situ oxidation of internal carbides. The very different reaction morphologies produced by the two gas mixtures are discussed in terms of competing gas-alloy reaction steps.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.259-259
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• 2015

Single crystalline indium-tin-oxide (ITO) nanowires (NWs) were grown by sputtering method. A thin Ni film of 5 nm was deposited before ITO sputtering. Thermal treatment forms Ni nanoparticles, which act as templates to diffuse Ni into the sputtered ITO layer to grow single crystalline ITO NWs. This Ni diffusion through an ITO NW was investigated by transmission electron microscope to observe the Ni-tip sitting on a single crystalline ITO NW. Meanwhile, a single crystalline ITO structure was found at bottom and body part of a single ITO NW without remaining of Ni atoms. This indicates the Ni atoms diffuse through the oxygen vacancies of ITO structure. Rapid thermal process (RTP) applied to generate an initial stage of a formation of Ni nanoparticles with variation in time periods to demonstrate the existence of an optimum condition to initiate ITO NW growth. Modulation in ITO sputtering condition was applied to verify the ITO NW growth or the ITO film growth. The Ni-assisted grown ITO layer has an improved electrical conductivity while maintaining a similar transmittance value to that of a single ITO layer. Electrically conductive and optically transparent nanowire-coated surface morphology would provide a great opportunity for various photoelectric devices.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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• pp.694-699
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• 2002

In autobody assembly, thin-wall, tubular connections have been used for the frame structure. Recent interest in light materials, such as aluminum or magnesium alloys, has been rapidly growing for weight reduction and fuel efficiency. Due to higher thermal expansion coefficient, low stiffness/strength, and low softening temperature of aluminum and magnesium alloys, control of welding-induced distortion in these connections becomes a critical issue. In this study, the material sensitivity to welding distortion was investigated using a T-tubular connection of three types materials; low carbon steel (A500 Gr. A), aluminum alloy (5456-H116) and magnesium alloy (AZ91C-T6). An uncoupled thermal and mechanical finite element analysis scheme using the ABAQUS software program was developed to model and simulate the welding process, welding procedure and material behaviors. The predicted angular distortions were correlated to the cumulative plastic strains. A unique relationship between distortion and plastic strains exists for all three materials studied. The amount of distortion is proportional to the magnitude and distribution of the cumulative plastic strains in the weldment. The magnesium alloy has the highest distortion sensitivity, followed by the other two materials with the steel connection having the least distortion. Results from studies of thin-aluminum plates show that welding distortion can be minimized by reducing the cumulative plastic strains by preventing heat diffusion into the base metal using a strong heat sink placed directly beneath the weld. A rapid cooling method is recommended to reduce welding distortion of magnesium tubular connections.