• 제목/요약/키워드: Rapid thermal process

검색결과 452건 처리시간 0.027초

쉘 요소를 이용한 K및 X개선 용접구조물의 열변형 해석방법에 관한 연구 (A Study on the Thermal Distortion Analysis of Welded Structures having K/X Groove using shell elements)

  • 하윤석;최지원
    • Journal of Welding and Joining
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    • 제30권6호
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    • pp.120-125
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    • 2012
  • Because ships and offshore structures have very large dimensions and complicated shapes, it is difficult to determine the deformation or internal stress in the structure by simple lab tests. Thus, a rigorous analysis by using the computer simulation technology is essential for obtaining their distortions by considering the entire production process characteristics. The rapid development of computer technology made it possible to analyze the heat transfer phenomena, deformation and phase transformation in the welded joint. For large shell structures, shell elements modeling contributed primarily to this development. But if a welding is done by multi-pass, shell elements whose thickness are unchangeable can hard to describe the local situation. Recently, it was researched how to introduce the imaginary temperature for V grooved multi-layer butt welding in strain-boundary method (a kind of shrinkage methodologies). In the present study, we formulated the imaginary temperature for the double bevel and double V groove by considering the thickness change of each pass through the bead and the thickness directions simultaneously and also demonstrated the feasibility of the formula by applying it to the thermal distortion analysis of the erection process of crane pedestal.

STD61 공구강의 내충격 및 내열피로 특성에 미치는 가스 퀜칭 압력의 영향 (Effect on Anti-impact and Anti-thermal Fatigue Properties of STD61 Material Affected by Gas Quenching Pressure of Quenching Process)

  • 박현준;최광진;김종엽;신승용;문경일
    • 열처리공학회지
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    • 제29권6호
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    • pp.277-283
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    • 2016
  • The influences of cooling pressure of quenching process on the mechanical properties such as hardness, impact endurance and anti-thermal fatigue behaviour of STD61 steel were investigated. The specimens were heat-treated using a vacuum furnace in which they were austenitized at $1,030^{\circ}C$ for 1hour under the pressure of $10^{-3}$ torr and cooled with quenching gas of various pressure, i.e. 1, 2 and 6 bar. According to the observation on the specimens prepared with quenching from austenizing temperature, the mechanical properties of the samples with higher quenching pressure were better than those of prepared at lower quenching pressure. The samples prepared with high quenching pressure showed the more homogeneous microstructure with finer carbides. The size of carbides such as VC and (Fe, Cr)C in quenched specimens decreased with increasing gas quenching pressure. It is considered that the rapid cooling with pressure may restrict the formation and growth of carbide.

355nm UV 레이저를 이용한 마이크로 렌즈 어레이 쾌속 제작에 관한 연구 (A Study on Rapid Fabrication of Micro Lens Array using 355nm UV Laser Irradiation)

  • 제순규;박상후;최춘기;신보성
    • 소성∙가공
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    • 제18권4호
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    • pp.310-316
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    • 2009
  • Micro lens array(MLA) is widely used in information technology(IT) industry fields for various applications such as a projection display, an optical power regulator, a micro mass spectrometer and for medical appliances. Recently, MLA have been fabricated and developed by using a reflow method having the processes of micro etching, electroplating, micro machining and laser local heating. Laser thermal relaxation method is introduced in marking of microdots on the surface of densified glass. In this paper, we have proposed a new direct fabrication process using UV laser local thermal-expansion(UV-LLTE) and investigated the optimal processing conditions of MLA on the surface of negative photo-resist material. We have also studied the 3D shape of the micro lens obtained by UV laser irradiation and the optimal process conditions. And then, we made chrome mold by electroplating. After that, we made MLA using chrome mold by hot embossing processing. Finally, we have measured the opto-physical properties of micro lens and then have also tested the possibility of MLA applications.

고효율 태양전지의 저가화를 위한 Ni/Cu/Ag 전극의 Ni Silicide 형성에 관한 연구 (Investigation of Ni Silicide formation at Ni/Cu/Ag Contact for Low Cost of High Efficiency Solar Cell)

  • 김종민;조경연;이지훈;이수홍
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2009년도 춘계학술발표대회 논문집
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    • pp.230-234
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    • 2009
  • It is significant technique to increase competitiveness that solar cells have a high energy conversion efficiency and cost effectiveness. When making high efficiency crystalline Si solar cells, evaporated Ti/Pd/Ag contact system is widely used in order to reduce the electrical resistance of the contact fingers. However, the evaporation process is no applicable to mass production because high vacuum is needed. Furthermore, those metals are too expensive to be applied for terrestrial applications. Ni/Cu/Ag contact system of silicon solar cells offers a relatively inexpensive method of making electrical contact. Ni silicide formation is one of the indispensable techniques for Ni/Cu/Ag contact sytem. Ni was electroless plated on the front grid pattern, After Ni electroless plating, the cells were annealed by RTP(Rapid Thermal Process). Ni silicide(NiSi) has certain advantages over Ti silicide($TiSi_2$), lower temperature anneal, one step anneal, low resistivity, low silicon consumption, low film stress, absence of reaction between the annealing ambient. Ni/Cu/Ag metallization scheme is an important process in the direction of cost reduction for solar cells of high efficiency. In this article we shall report an investigation of rapid thermal silicidation of nickel on silngle crystalline silicon wafers in the annealing range of $350-390^{\circ}C$. The samples annealed at temperatures from 350 to $390^{\circ}C$ have been analyzed by SEM(Scanning Electron Microscopy).

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RTP 와 PECVD을 이용한 저가의 표면 passivation 막들의 특성연구 (Cost-effective surface passication layers by RTP and PECVD)

  • 이지연;이수홍
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 디스플레이 광소자분야
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    • pp.142-145
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    • 2004
  • In this work, we have investigated the application of rapid thermal processing (RTP) and plasma enhanced chemical vapour deposition (PECVD) for surface passivation. Rapid thermal oxidation (RTO) has sufficiently low surface recombination velocities (SRV) $S_{eff}$ in spite of a thin oxides and short process time. The effective lifetime is increasing with an increase of the oxide thickness. In the same oxide thickness, The effective lifetime is independent on the process temperature and time. $S_{eff,max}$ is exponentially decreased with increasing oxide thickness. $S_{eff,max}$ can be reduced to 200 cm/s with only 10 nm oxide thickness. On the other hand, three different types of SiN are reviewed. SiN1 layer has a thickness of about 72 nm and a refractive index of 2.8. Also, The SiN1 has a high passivation quality. The effective lifetime and SRV of 1 $\Omega$ cm Float zone (FZ) silicon deposited with SiN1 is about 800 s and under 10 cm/s, respectively. The SiN2 is optimized for the use as an antireflection layer since a refractive index of 2.3. The SiN3 is almost amorphous silicon caused by less contents of N2 from total process. The effective lifetime on the FZ 1 ${\Omega}cm$ is over 1000 ${\mu}s$.

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솔-젤법 및 급속열처리에 의한 $Sr_{0.9}4$Bi_{2.1}$$Ta_2$$O_9$ 박막의 저온형성에 관한 연구 (Study on Low Temperature Formation of Ferroelectric $Sr_{0.9}4$Bi_{2.1}$$Ta_2$$O_9$ Thin Films by Sol-Gel Process and Rapid Thermal Annealing)

  • 장현호;송석표;김병호
    • 한국전기전자재료학회논문지
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    • 제13권4호
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    • pp.312-317
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    • 2000
  • Ferroelectric S $r_{0.9}$/B $i_{2.1}$/T $a_{2}$/ $O_{9}$ solutions were synthesized using sol-gel process in which strontinum ethoxide bismuth ethoxide trantalum ethoxide were used a s startring materials. SBT thin films were coated on Pt/Ti/ $SiO_2$/Si substrates by spin-coating. rapid thermal annealing (RTA) was used to promote crystallization. Thin films were annealed at $700^{\circ}C$ for 1 hr in an oxygen atmosphere. This temperature is about 10$0^{\circ}C$ lower than the usual annealing temperature for SBT thin films. Pt top-electrode was deposited by sputtering and thin films were post-annealed at $700^{\circ}C$ for 30 min. to enhance electrical properties. As the RTA temperature increased the higher 2 $P_{r}$ values were obtained. At RTA temperature being 78$0^{\circ}C$ remanent polarization of S $r_{0.9}$/B $i_{2.1}$/T $a_{2}$/ $O_{9}$ thin film was 7.73 $\mu$C/cm $_2$ and the leakage current density was 1.14$\times$10$^{-7}$ A/c $m^2$ at 3 V. As RTA temperature increased the breakdown voltage was decreased. It is considered that the low-field breadown is caused by the rough surface of SBT films and forming bismuth metal in SBT thin films.films.lms.

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RTP를 사용한 타이타늄 실리사이드 형성의 공정 조절 (Process Control of Titanium Silicide Formation Using RTP)

  • 이용재
    • 한국통신학회논문지
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    • 제15권5호
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    • pp.399-405
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    • 1990
  • 急速 熱處理 공정을 高融點 타이타늄 실리사이드 형성을 위한 反應率의 연구와 정확한 形成 調節에 이용하였다. 試料는 n형 실리콘과 다결정 웨이퍼이며, 타이타늄을 스퍼터로 증착시켰다. 工程은 질소와 아르곤 가스 분위기 下에 실리사이드 형성을 정확하게 조절하기 위해 急速 時間 溫度 분포의 行列로 수행하였다. 반응된 박막은 面抵抗 측정과 전자현미경 사진, 自動分 抛抵抗 측정, X-선 回折 등으로 分析하였다. 結果는 실리사이드의 抵抗度는 20$\mu$$\Omega$-cm이하 이고, 박막 두께는 타이타늄 燕着 의 두께보다 약 2배로 나타났다. 실리사이드 形成 분위기는 아르곤과 窒素가 同一한 溫度 時間 조건에서 形成되었다.

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편리한 입력방식의 단조공정해석을 위한 CAMPform 2D의 Preprocessor 개발 (Development of CAMPform2D Preprocessor for Forming Process U sing Convenient Input Method)

  • 박성균;이상헌;이강수
    • 한국CDE학회논문집
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    • 제9권2호
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    • pp.133-142
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    • 2004
  • CAMPfonn2D is a Finite Element Method (FEM) based process simulation system designed to analyze two dimensional (2D) flow of various metal forming processes. It enables designers to analyze metal forming processes on the computer rather than the shop floor using trial and error and provides vital information about material and thermal flow during the forming process to facilitate the design of products. CAMPfonn2D can be used by companies, research institutes and industrial applications to analyze forging, extrusion, drawing, heading, upsetting and many other metal forming processes. Also, process simulation using CAMPfonn2D can be instrumental in cost, quality and delivery improvements at leading companies. Today's competitive pressures require companies to take advantage of every tool for rapid manufacturing of well-designed product. So, the preprocessor of simulation program must be easy to use to speed-up design. In this paper, we introduce new version of Preprocessor and show how easy to use it. And, Preprocessor will prove itself to be easy and extremely effective.

A New Firing Process Method by Using RTS System for Transparent Dielectric Layer of PDP

  • Kim, Song-Kwan;Yun, Hae-Sang;Kim, Young-Cho;Yoon, Cha-Keun;Whang, Ki-Woong;Park, Sun-Woo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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    • pp.187-188
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    • 2000
  • The conventional firing process method for the transparent dielectric layer in PDP Technology has disadvantages of low through put, high power consumption and large process area. We propose the rapid thermal scinterring (RTS) method as new process method to overcome these disadvantage characteristics. As the experimental result of this method, the optic transmittance(wavelength : 600nm) rate of transparent dielectric layer was more improved than conventional furnaces under the optimized gas supplying. Further, it was certified this method had the best conditions on the firing process of the PDP transparent dielectric layer.

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$N_2$O 분위기에서 RTP로 제조한 실리콘 산화막의 산화 반응 (Oxidation Reaction of silicon Oxids fabricated by Rapid Thermal Process in $N_2$O ambient)

  • 박진성;이우성;심태언
    • 한국재료학회지
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    • 제3권1호
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    • pp.7-11
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    • 1993
  • 실리콘 산화막을 $N_2$O 분위기에서 RTP로 제조하여 그 성장 기구를 고찰 했다. 산화막과 기판 실리콘 계면 사이에 질소성분이 포함된 oxynitride층이 존재한다. $N_2$O 기체를 이용한 산화막 성장은 삼화제 확산에 의해 성장이 지배되는 포물선 성장론을 따르고 산화제 확산 억제작용은 실리콘 산화막과 실리콘 기판사이에 존재하는 oxynitride막에서 일어난다. 확산이 산화막 성장을 결정하는 구간에서 포물선 성장율 상수 B의 활성화 에너지는 약 1.5 eV이고 산화막 두께 증가에 따라 증가한다.

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