Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.05a
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- Pages.142-145
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- 2004
Cost-effective surface passication layers by RTP and PECVD
RTP 와 PECVD을 이용한 저가의 표면 passivation 막들의 특성연구
- Lee, Ji-Youn (Photovoltaics R&D Center, Sungjin Semitech Co.) ;
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Lee, Soo-Hong
(Strategic Research Energy Center, Dept. of Electronics Engineering, Sejong University)
- Published : 2004.05.06
Abstract
In this work, we have investigated the application of rapid thermal processing (RTP) and plasma enhanced chemical vapour deposition (PECVD) for surface passivation. Rapid thermal oxidation (RTO) has sufficiently low surface recombination velocities (SRV)