• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문집
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• pp.140-145
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• 2002

In high-capacity disk drives with ever-growing track density, the allowable level of position error signal (PES) is becoming smaller and smaller. A substantial portion of the PES is caused by disk vibration. This can be reduced by using a head gimbal assemblies (HGAs) that do not confine the slider movement to the vertical direction to disks, but allow movement to the radial direction of disks with respect to disk vibration. Several types of HGAs are proposed for such radial motion of the slider. Experimental results show that the PES levels are reduced by the proposed HGA-design concepts.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문초록집
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• pp.320.2-320
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• 2002

In high-capacity disk drives with ever-growing track density, the allowable level of position error signal (PES) is becoming smaller and smaller. A substantial portion of the PES is caused by disk vibration. This can be reduced by using a head gimbal assemblies (HGAs) that do not confine the slider movement to the vertical direction to disks, but allow movement to the radial direction of disks with respect to disk vibration. Several types of HGAs are proposed for such radial motion of the slider. (omitted)

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.11-15
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• 2008

Metrology tools with the ability to measure spindle motion error on the order of a nanometer are required due to recent advances in nanotechnology. We propose a direct measurement method for the radial motion error of a precision spindle using a regular crystalline lattice and a scanning tunneling microscope (STM). A highly oriented pyrolytic graphite (HOPG) crystal combined with an STM is used as a two-dimensional reference scale. The measurement principle and the preliminary experimental results are discussed in this article. The preliminary experimental results demonstrated that the proposed method has the capability to incorporate a two-dimensional encoder to measure the spindle motion error.

• 한국공작기계학회논문집
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• 제17권1호
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• pp.132-136
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• 2008

Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.

• 한국공작기계학회논문집
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• 제13권5호
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• pp.1-6
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• 2004

Measurements of circular motion accuracy of NC lathe have achieved with ball bar systems proposed by Bryan, but the ball bar systems have ifluenced on the measuring data by way of the accuracy of the balls and the contacts of balls and bar seats. Therefore in this study, error data during of circular motion of ATC(Automatic Tool Changer) of NC lathe will be acquired by reading zx plane coordinates using two optical linear scales. Two optical linear scales of measuring unit are fixed on z-x plane of NC lathe, and the moving part is fixed to ATC and then is made to receive data of coordinates of the ATC at constant time intervals using tick pulses comming out from computer. And then, error data files of radial direction of circular motion are calculated with the data read, and the aspect of circular motion are modeled to plots, and are analysed by means of statistical treatments of circularity, means, standard deviations etc.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1993년도 추계학술대회 논문집
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• pp.279-285
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• 1993

This paper presents a precision automatic measuring system for ball screw Pitch. Ball screw is mounted on a precision indexing table, and the ball screw pitch is measured via magnetic scale, where the indexing and measurement are performed by a PC. For precision indexing of ball screw, direct driven motor is coupled to the designed dead and live centers; the performance of the centers are assessed with a precision master sylinder,such as radial motion,tilt motion, and axial motions. An error compensation model is constructed for the measurement system of ball screw pitch, where the error motions of indexing system as well as the scale measurement system are combined to give the measurement error for the ball screw. The developed system proposes an automated precision measurement system for manufacturers and users of ball screw.

• 소음진동
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• 제10권4호
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• pp.584-595
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• 2000

We design a new actuator for high density optical device in order to control the radial tilting motion. The newly designed actuator makes it possible to control the tilting motion actively, while the coventional actuator compress tilting motion with passive spring. First of all, We present 3-dimensional modeling of actuator and accomplish the modal analysis and magnetic analysis of actuator. Due to these results, a new designed actuator has performance of high sensitivity and high second resonance frequency. Secondly, We present the 3-DOF dynamic modeling of the 4-wire spring type actuator. sensitivity analysis is performed to consider the assembling error, such as the difference of mass center and force center. From these results, the sensitivities of rotation due to the assembly error are revealed and design criteria of rotation is presented. And experimental results of a newly designed actuator are presented and compared with theoretical results. Finally, We propose a dynamic tilt compensation and high acceleration actuator for high density optical storage devices.

• 한국공작기계학회논문집
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• 제17권1호
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• pp.106-112
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• 2008

In this paper, It does the profile measurement of the cam of diesel engine SOHC of the actual object. It uses the measurement of run-out method. This method is that the surface of the object is measured by the sensor when the object rotate, and calculated and displayed by the computer the signal which acquired by sensor. When we acquire the signals, we have two error because of motion and contacting between cam and probe. In this paper, we compensate the motion error while simply liner equation. And we have a solution that we change the figure of probe when we have a contacting error. We compared the data measuring on developed automatic cam profile measuring system with the data measured on CMM.

• 반도체디스플레이기술학회지
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• 제6권4호
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• pp.23-27
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• 2007

Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.

• 한국공작기계학회논문집
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• 제16권2호
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• pp.84-91
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• 2007

The radial error motion of a machine tool cutter/spindle system is critical to the dimensional accuracy of the parts to be machined. This paper presents an investigation into spindle run-out effects on cutting mark and surface roughness. We experimented the effects of spindle run-out on surface roughness in flat-end milling by cutting AL 7075 workpiece in various cutting conditions. In order to analyze the effects of run-out on the surface roughness, the spindle's radial error motions was measured by mounting a sphere target onto the spindle as a reference. From the experimental results, it was found that spindle un-out makes a directive effects on surface roughness in flat-end milling.