International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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Direct Measurement of Spindle Motion Error Using a Regular Crystalline Lattice and a Scanning Tunneling Microscope

  • Chaikool, Patamaporn (Department of Mechanical Engineering, Nagaoka University of Technology) ;
  • Aketagawa, Masato (Department of Mechanical Engineering, Nagaoka University of Technology) ;
  • Okuyama, Eiki (Department of Mechanical Engineering, Akita University)
  • Published : 2008.10.01
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Abstract

Metrology tools with the ability to measure spindle motion error on the order of a nanometer are required due to recent advances in nanotechnology. We propose a direct measurement method for the radial motion error of a precision spindle using a regular crystalline lattice and a scanning tunneling microscope (STM). A highly oriented pyrolytic graphite (HOPG) crystal combined with an STM is used as a two-dimensional reference scale. The measurement principle and the preliminary experimental results are discussed in this article. The preliminary experimental results demonstrated that the proposed method has the capability to incorporate a two-dimensional encoder to measure the spindle motion error.

Keywords

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