• Journal of the Korean Vacuum Society
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• v.8 no.1
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• pp.75-82
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• 1999

Ion energy is one of the crucial property in thin film deposition by internal ICP assisted I-PVD. As ion energy is determined by the difference between the plasma potential and the substrate bias potential, ICP excitation frequency was tested with medium frequency of 4 MHz and two types of tuning circuits, alternate and floating LC network with a biasing resistor, were tested. The results showed that plasma potential was less than 5 V in a range of Ar pressures, 5mTorr to 30 mTorr, at 4 MHz RF 600 W and 60 V of maximum RF antenna voltage was maintained either at RF input or output terminal. By proper control of RLC circuit installed after after RF antenna, 50V of RF induced voltage on RF antenna was obtained at 500W input power. The total impedance of RF antenna and plasma was around 10$\Omega$, and minimum RF voltage was obtained with a condition of lowest reactance at most 0.05$\Omega$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.652-655
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• 2004

RF MEMS is a miniature device or an array of integration devices and mechanical components and fabricated with If batch-processing techniques. RF MEMS application area are in phased arrays and reconfigurable apertures for defence and telecommunication systems, switching network for satellite communication, and single-pole double throw switches for wireless application. Recently, RF MEMS switches have been developed for the application to the milimeter wave system. RF MEMS switches offer a substantilly higher performance than PM diode or FET switches. In this paper, SPDT(single-pole-double-throw) switch are designed to use 10 GHz. Actuation voltage and displacement are simulated by tool. And stress and distribution are simulated.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.3
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• pp.201-206
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• 2019

This report constitutes the first demonstration in Korea of single-crystal lateral gallium oxide ($Ga_2O_3$) as a metal-oxide-semiconductor field-effect-transistor (MOSFET), with a breakdown voltage in excess of 480 V. A Si-doped channel layer was grown on a Fe-doped semi-insulating ${\beta}-Ga_2O_3$ (010) substrate by molecular beam epitaxy. The single-crystal substrate was grown by the edge-defined film-fed growth method and wafered to a size of $10{\times}15mm^2$. Although we fabricated several types of power devices using the same process, we only report the characterization of a finger-type MOSFET with a gate length ($L_g$) of $2{\mu}m$ and a gate-drain spacing ($L_{gd}$) of $5{\mu}m$. The MOSFET showed a favorable drain current modulation according to the gate voltage swing. A complete drain current pinch-off feature was also obtained for $V_{gs}<-6V$, and the three-terminal off-state breakdown voltage was over 482 V in a $L_{gd}=5{\mu}m$ device measured in Fluorinert ambient at $V_{gs}=-10V$. A low drain leakage current of 4.7 nA at the off-state led to a high on/off drain current ratio of approximately $5.3{\times}10^5$. These device characteristics indicate the promising potential of $Ga_2O_3$-based electrical devices for next-generation high-power device applications, such as electrical autonomous vehicles, railroads, photovoltaics, renewable energy, and industry.

• Korean Journal of Optics and Photonics
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• v.16 no.2
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• pp.133-137
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• 2005

A photonic RF true-time delay using a tapered chirped fiber Bragg grating coated with a heating electrode has been proposed and fabricated. For an RF signal carried over an optical signal, the time delay has been achieved by controlling the voltage applied to the electrode and thus adjusting its reflection positions from the fiber grating through the thermooptic effect. It features continuous voltage-controlled operation, requiring no mechanical perturbation and no moving parts. The measured time delay was about 120 ps with the electrical power consumption of $250{\cal}mW$.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.953-956
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• 2005

Low voltage actuation and high isolation characteristics are key features to be solved in electrostatic RF switch design. Since these parameters in the conventional parallel plate MEMS switch design are in trade-off relation, both requirements cannot be met simultaneously. In vertical comb design, however, the actuation voltage is independent to the vertical separation distance between the contact electrodes. Then, we can design the large separation distance between contact electrodes to get high isolation. We have designed an RF MEMS switch which has -40dB isolation at 5 GHz and 6 V operation voltages. The characteristics of the fabricated switch are being evaluate.

• Journal of the Semiconductor & Display Technology
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• v.15 no.4
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• pp.16-21
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• 2016

In this paper, we have designed and fabricated a receiver module for 5.8GHz Microwave Wireless Power Transmission. The receiver module was composed of an antenna, BPF (Band Pass Filter) and RF-DC converter. The antenna was designed to RHCP (Right Hand Circular Polarization). And we used ${\lambda}g/2$ open-circuited stubs for the BPF. In addition, the RF-DC converter used the tripler voltage circuit for voltage multipliers. The integrated receiver RF module for 5.8GHz Microwave Wireless Power Transmission has been designed and fabricated. The voltage was measured to the distance of 50cm.

• International journal of advanced smart convergence
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• v.10 no.3
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• pp.81-88
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• 2021

This paper proposes two types of subharmonic RF receiver front-end (called LMV) where, in a single stage, quadrature voltage-controlled oscillator (QVCO) is stacked on top of a low noise amplifier. Since the QVCO itself plays the role of the single-balanced subharmonic mixer with the dc current reuse technique by stacking, the proposed topology can remove the RF mixer component in the RF front-end and thus reduce the chip size and the power consumption. Another advantage of the proposed topologies is that many challenges of the direct conversion receiver can be easily evaded with the subharmonic mixing in the QVCO itself. The intermediate frequency signal can be directly extracted at the center taps of the two inductors of the QVCO. Using a 65 nm complementary metal oxide semiconductor (CMOS) technology, the proposed subharmonic RF front-ends are designed. Oscillating at around 2.4 GHz band, the proposed subharmonic LMVs are compared in terms of phase noise, voltage conversion gain and double sideband noise figure. The subharmonic LMVs consume about 330 ㎼ dc power from a 1-V supply.

• Journal of Advanced Marine Engineering and Technology
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• v.41 no.1
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• pp.70-75
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• 2017

In this paper, we studied the RF characteristics of a voltage-controlled artificial transmission line employing periodically arrayed diodes for application to highly miniaturized wireless communication systems on an MMIC (monolithic microwave integrated circuit). According to the results, the novel voltage-controlled artificial transmission line employing periodically arrayed diodes exhibited a short wave length, which was only 35.2% that of the conventional transmission line, owing to increasing capacitance. In addition, it's effective permittivity and effective propagation constant exhibited considerably higher values than those of the conventional transmission line. Furthermore, attenuation constant of the voltage-controlled artificial transmission line was far higher than that of the conventional transmission line. Using the closed-form equation, we theoretically analyzed the equivalent circuit of the voltage-controlled artificial transmission line.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.509-509
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• 2012

RF는 사이클로트론에서 빔을 원하는 에너지로 가속하기 위해 쓰인다. MC50 사이클로트론에는 두 개의 DEE가 있고 각각 독립된 LLRF모듈과 증폭기를 통해 제어된다. 주요 제어변수는 DEE1,2의 Voltage와 양단간의 Phase인데 이는 RF Generator에서 특정 주파수로 발생된 RF 시그널의 Amplitude와 Phase를 RF Modulator에서 변조하므로 제어되어진다. 지금 현재의 Modulator는 오래되어 DEE Voltage의 컨트롤이 잘 이루어지지 않고 있고 가끔 연결부위에서 문제를 보여 새 Modulator를 제작하게 되었다. 새로 제작된 Modulator를 구형과 비교해 볼 때 Driving Amplifier에서 소모되는 전력이 7~14% 줄어드는 효과를 볼 수 있었다.

• Journal of the Semiconductor & Display Technology
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• v.19 no.3
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• pp.43-48
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• 2020

The demand for stable plasma has been on the rise because of the increased delivery power amount in the chamber for improving productivity, and fast and accurate plasma impedance matching become a crucial performance measure for radio frequency (RF) power system in semiconductor manufacturing equipment. In this paper, the overall impedance matching was understood, and voltage and current values were extracted with voltage - current (VI) probe to measure plasma impedance in real-time. Actual matching data were analyzed to derive calibration coefficient for V and I measurements to understand the characteristics of VI probe, and we demonstrated the tendency of RF impedance matching according to changes in load impedance. This preliminary empirical research can contribute to fast RF matching as well as advanced equipment control for the next level of detailed investigation on embedded system based-RF matching controller.