• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.437-437
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• 2010

DC Hollow cathode 방전은 약 100여 년 전, Paschen에 의해 실험된 이후로 광원, 스퍼터링 공정, 이온빔 소스 등 다양한 분야에 이용되어 왔다. 최근 태양전지용 마이크로 결정질 실리콘 증착 시, RF CCP의 전극에 복수의 홀 혹은 트렌치 구조를 두어 Hollow cathode 방전 효과를 이용하여 향상된 공정 속도로 공정을 진행한다. 그러나 RF-MHCD (Multi hole cathode discharge) 공정을 위한 최적 규격의 홀 기에 관한 연구는 그 중요성과 응용성에도 불구하고 깊게 이루어지지 못한 바 있다. 그러므로 저자는 Capacitively Coupled Plasma (전극 간격 : 4cm, 전극 직경 : 14cm) 장비에서 평면 전극과 10mm 깊이와 각각 3.5mm, 5mm, 7mm, 10mm 직경의 홀이 있는 4개의 전극을 이용하여 Argon RF-MHCD 방전을 관찰하여 조건 별 최적의 홀 전극 디자인을 도출하였다. 실험 조건은 64.5mTorr ~ 645mTorr압력 범위/ 1A~9A이며, 플라즈마는 전극 사이 중앙에 설치한 RF-compensated Langmuir Probe와, 전극과 전기적으로 접촉하는 1000:1 Probe 와 Voltage-Current Probe를 이용하여 측정되었다. 실험 결과 압력 조건 별로, 최적의 전자 밀도를 유도하는 전극 상 홀의 직경이 달라짐을 확인하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.228-228
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• 2009

In stator windings of a 6.6kV rotating machine, internal discharge, corona discharge, and surface discharge are mainly caused by internal voids and insulation degradation. In the case of the discharge spark and electromagnetic pulse generated from a discharge source, we can detect it using various RF resonators like an EM sensor. In order to detect these types of electromagnetic sources, we designed and fabricated a planar patch sensor using a CST-MWS simulation, and PD signals from artificial defected stator windings were also measured by the sensor proposed in this study. Furthermore, In the results of the experiment, it showed similar performance to the HFCT sensor.

• Journal of Electrical Engineering and Technology
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• 제2권4호
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• pp.532-536
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• 2007

Carbon nanotube (CNT) properties, produced using a magnetic null discharge (MND) plasma production technology, were investigated. We firstly deposited the Fe layer 200 nm in thickness on Si substrate by the magnetic null discharge sputter method at the substrate temperature of $300도C$, and then prepared CNTs on the catalyst layer by using the magnetic null discharge (MND) based CVD method. CNTs were deposited in a gas mixture of CH4 and N2 at a total pressure of 1 Torr by the MND-CVD method. The substrate temperature and the RF power were $650^{\circ}C$ and 600W, respectively. The characterization data indicated that the proposed source could synthesize CNTs even under relatively severe conditions for the magnetic null discharge formation.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1649-1651
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• 2002

Ultra-wide bandwidth (UWB) detection method has been widely used as a front end detection scheme for the ultra-high frequency (UHF) partial discharge (PD) monitoring systems. A broad-band video detector module was developed and characterized for the UHF UWB PD detection systems. The useable bandwidth of the module is more than 2 GHz and it is optimized for 50-ohm systems. The detection sensitivity and dynamic range of the module were characterized by using a known ns-width RF pulses of GHz range. The dynamic range is more than 6-decades and the module can detect pulsed RF signals down to 1 nW. The detector module can eliminate expensive equipment such as high speed oscilloscopes and radio frequency (RF) spectrum analyzers. Therefore, it enables one to use slow speed data acquisition systems for the PD monitoring at the UHF range. The detector module was used to detect real PDs of about <3 pC. The module converts the UWB PD signals into a low-bandwidth video signal with a high signal-to-noise ratio.

• Carbon letters
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• 제1권3_4호
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• pp.129-132
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• 2001

Carbonaceous thin films were prepared from acetylene and argon gases by plasma assisted chemical vapor deposition (Plasma CVD) at 873 K. The carbonaceous thin films were characterized by mainly Raman spectroscopy, and their electrochemical properties were studied by cyclic voltammetry and charge-discharge measurements in propylene carbonate (PC) solution. Raman spectra showed that crystallinity of carbonaceous thin films is correlated by the applied RF power. The difference of the applied RF power also affected on the results of cyclic voltammetry and charge-discharge measurements. In PC solution, intercalation and de-intercalation of lithium ion can occur as well as in the mixed solution of EC and DEC.

• 대한전기학회논문지:전력기술부문A
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• 제52권11호
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• pp.661-667
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• 2003

It has little possibility that a cable causes any problem in electric power facilities. But when a trouble occurs in cable or cable joint, the damage is very severe. The main causes of the cable defections are bad cable making procedure, poor cable operation and deterioration according to the years. There are some cases to have potential problems due to many cable connection points, because of short length of cable, especially in 154㎸ system. In this study, novel method to measure partial discharge in cable joints is proposed and the effectiveness and the reliability of the proposed method is shown through experiment results of field.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1994년도 춘계학술대회 논문집
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• pp.138-140
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• 1994

Plasma polymerized thin film was prepared using an interelectrod inductively coupled gas-flow-type reactor. Styrene was chosen as the monomer to be used. This thin films were also delineated by the electron-beam apparatus with an acceleration voltage 30kV, and the pattern in the resist was developed with RIE 80 with argon gas mixture ratio, pressure and RF power. The effect of charge of discharge power on growth rate and etching rate of the thin films were studied. The molecular structure of thin films were investigated by FIR and then was discussed in relation to its quality as a resist. In the case of Plasma polymerization, thickness of resist could be controlled by discharge duration and power. Also etch rate is increased as to growing argon gas and RF power with RIE 80.

• Bulletin of the Korean Chemical Society
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• 제22권9호
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• pp.1015-1018
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• 2001

Vanadium oxide thin films with thickness of about 2000 $\AA$ have been prepared by radio frequency sputter deposition using a V2O5 target in a mixed argon and oxygen atmosphere with different Ar/O2 ratio ranging from 99/1 to 90/10. X-ray diffraction and X-ray absorption near edge structure spectroscopic studies show that the oxygen content higher than 5% crystallizes a stoichiometric V2O5 phase, while oxygen deficient phase is formed in the lower oxygen content. The oxygen content in the mixed Ar + O2 has a significant influence on electrochemical lithium insertion/deinsertion property. The discharge-charge capacity of vanadium oxide film increases with increasing the reactive oxygen content. The V2O5 film deposited at the Ar/O2 ratio of 90/10 exhibits high discharge capacity of 100 ${\mu}Ah/cm2-{\mu}m$ along with good cycle performance.

• 항공우주기술
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• 제6권1호
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• pp.83-91
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• 2007

위성용 RF 수동 소자에 대한 MP(multipactor) 현상과 그 검출 방법에 대한 연구를 수행하였으며, 본 연구에 사용된 RF 수동 소자는 S 대역 diplexer로, 이는 인터디지털 타입의 5단 chebyshev 응답특성을 갖는 두개의 대역통과필터로 구성되며 2.232 및 2.055 GHz 대역에서 2.7 %의 대역폭을 갖는 구조로 각각 설계되었다. MP 민감도 해석을 위해 diplexer에 대하여 3D 전자기 모델링을 수행하였으며, 이를 통하여 diplexer 구조적으로 multipactor에 대하여 가장 민감한 부분을 정의 하였고 이때의 MP 방전 현상이 나타나지 않는 최대 RF 입력전력을 규명하였다. 또한 KARI 자체 개발한 MP 민감도 시험 시설을 이용하여 QM용 diplexer에 대한 시험을 수행하였으며, 그 결과 CW 모드에서 43 dBm, 펄스 모드 시험에서 44 dBm의 RF 입력 전력에서 MP가 발생됨을 확인 하였다.

• 청정기술
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• 제12권3호
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• pp.138-144
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• 2006

저압에서 용량성 라디오 주파수 방전을 이용하여 메탄을 합성가스로 전환시키는 반응을 고찰하였다. 플라즈마에서 발생된 높은 에너지를 갖는 전자들이 메탄분자와 산소를 함유하고 있는 기체 분자들과 충돌에 의해 합성가스로 전환되었다. 입력전력, 함산소화합물의 종류, 함산소화합물과 메탄의 조성이 메탄 전환율 및 수소와 일산화탄소의 수율에 미치는 영향을 살펴보았다. 메탄 전환율은 최대 100%이었으며, 합성가스이외의 다른 화합물들은 거의 생성되지 않았다. 입력전력이 증가함에 따라 메탄전환율과 합성가스의 수율이 증가하였으며, 함산소화합물의 종류에 따라 각각 다른 조성의 합성가스를 생성할 수 있었다. 메탄과 함산소화합물을 함께 반응시킴으로써 순수한 합성가스를 제조할 수 있었는데 함산소화합물의 종류에 따라 합성가스의 조성을 조절할 수 있었으며 불순물이 거의 없는 순수한 생성물을 얻을 수 있었다.