• Korean Journal of Optics and Photonics
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• v.10 no.6
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• pp.453-461
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• 1999

In this paper, we have studied on the effects of annular and quadrupole illuminations by changing their conditions for enhancing the pattern resolution and depth of focus (OaF) in the optical lithography system using KrF Eximer laser 0.248$\mu$m and 0.65 NA. As a result, it is revealed that each illumination condition to optimize the resolution and the OaF for the mask containing the assistance pattern is different under the annular illumination. And in case of quadrupole illumination, we could ascertain that the resolution and the OaF would be enhanced through changing the arrangement of each pole from the conventional X type (45 degrees) to some proper type according to the main pattern direction. ction.

• Mass Spectrometry Letters
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• v.6 no.3
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• pp.59-64
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• 2015

Quadrupole ion trap mass analyzer with a simplified geometry, namely, the cylindrical ion trap (CIT), has been shown to be well-suited using in miniature mass spectrometry and even in mass spectrometer arrays. Computation of stability regions is of particular importance in designing and assembling an ion trap. However, solving CIT equations are rather more difficult and complex than QIT equations, so, analytical and matrix methods have been widely used to calculate the stability regions. In this article we present the results of numerical simulations of the physical properties and the fractional mass resolutions m/Δm of the confined ions in the first stability region was analyzed by the fifth order Runge-Kutta method (RKM5) at the optimum radius size for both ion traps. Because of similarity the both results, having determining the optimum radius, we can make much easier to design CIT. Also, the simulated results has been performed a high precision in the resolution of trapped ions at the optimum radius size.

• Journal of the Korean Chemical Society
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• v.10 no.3
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• pp.143-144
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• 1966

• Proceedings of the Korean Magnetic Resonance Society Conference
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• 1999.02a
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• pp.2-3
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• 1999

• Applied Science and Convergence Technology
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• v.24 no.5
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• pp.142-150
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• 2015

A failure analysis of tungsten filaments used in quadrupole mass spectrometer for plasma process monitoring was carried by using SEM and EDS. Failed at high temperature, filaments showed two kinds of failure modes. The one is that diameter of filament became thinner gradually and finally snapped. The other is that filament abruptly snapped almost at a right angle. The EDS analysis showed Fe and C, including W and Fe, on the surface of failed filament. when failed filaments were treated with plasma in mixture of Ar and $CF_4$, the amount of Fe and C decreased. The failure analysis of filament showed that the cause of filament failure is thermal evaporation and grain growth of tungsten at high temperature.

• Journal of KSNVE
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• v.11 no.3
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• pp.471-476
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• 2001

This paper focuses on the numerical prediction of airflow-induced sound in DVD drives. As a first step, computational fluid dynamics (CFD) is conducted to evaluate flow field characteristics due to the high-speed disk rotation, and to support the acoustic analysis. Acoustic analogy based on Ffowcs Wi1liams-Hawkings (FW-H) equation is adopted to predict aeroacoustic noise patterns. The integral solution for quadrupole volume source is included to identify the turbulence noise generated inside the DVD tray. The strength of sound pressure revel with respect to rotating speed is discussed to meet upfront demand on the high fidelity product development. The present study also focuses on the noise directivity and examines how much the sound noise is sensitive to change in rotating speed. Near-field noise is strongly affected by the flow field characteristic, which is caused by the complex shape of the tray. For a mid-field, the quadrupole noise play as a counterpart of thickness noise or loading noise, so it generates different sound noise Patterns compared with those in the near field.

• Journal of the Korean Vacuum Society
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• v.16 no.2
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• pp.91-98
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• 2007

The Korea Research Institute of Standards and Science (KRISS) has developed a residual gas analyzer (RGA) calibration system and measured gas sensitivities for two different types QMSs using nitrogen, argon, and helium. Different gas sensitivities were identified according to mass and pressure, so it was revealed that the gas sensitivity correction is necessary for proper use of mass spectrometers.

• Journal of the Optical Society of Korea
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• v.15 no.4
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• pp.368-372
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• 2011

An advanced microcolumn is proposed which adopts a modified einzel lens structure. The newly designed einzel lens is composed of four electrodes. The two center electrodes are specially designed electrostatic quadrupole (EQ) einzel lenses having keyhole instead of circular apertures. We constructed the advanced microcolumn with the EQ-einzel lenses, and operated the newly designed microcolumn in single lens mode and double-lens mode. The preliminary results show that the EQ-einzel lens can improve the performance of the micro-column for large sample applications.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.502-507
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• 2000

This paper presents the numerical prediction of airflow-induced sound in DVD drives. Computational fluid dynamics (CFD) is first conducted to evaluate flow field characteristics due to the high-speed disk rotation, and to support the acoustic analysis. The acoustic analogy based on Ffowcs Williams-Hawkings (FW-H) equation is adopted to predict aeroacoustic noise patterns. The integral solution for quadrupole volume source is included to identify the turbulence noise generated inside the DVD tray. Near-field noise is strongly affected by the flow field characteristic, which is caused by the complex shape of the tray. For a mid-field, the quadrupole noise play as a counterpart of thickness noise or loading noise, resulting in a different pattern compared with those in the near field.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.4
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• pp.204-208
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• 2006

In this study, we investigated the ion energy distributions in a chlorine based inductively coupled plasma by quadrupole mass spectrometer with an electrostatic ion energy analyzer. Ion energy distributions are presented for various plasma parameters such as $BCl_3/Ar$ gas mixing ratio, RF power, and process pressure. As the $BCl_3/Ar$ gas mixing ratio and process pressure decreases, and RF power increases, the saddle-shaped structures is enhanced. The reason is that there are ionized energy difference between $BCl_3$ and Ar, change of plasma potential, alteration of mean free path. and variety of ion collision in the sheath.