Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Failure Analysis of Filaments of Quadrupole Mass Spectrometer for Plasma Process Monitoring

  • Received : 2015.09.24
  • Accepted : 2015.09.30
  • Published : 2015.09.30
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Abstract

A failure analysis of tungsten filaments used in quadrupole mass spectrometer for plasma process monitoring was carried by using SEM and EDS. Failed at high temperature, filaments showed two kinds of failure modes. The one is that diameter of filament became thinner gradually and finally snapped. The other is that filament abruptly snapped almost at a right angle. The EDS analysis showed Fe and C, including W and Fe, on the surface of failed filament. when failed filaments were treated with plasma in mixture of Ar and $CF_4$, the amount of Fe and C decreased. The failure analysis of filament showed that the cause of filament failure is thermal evaporation and grain growth of tungsten at high temperature.

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