• 제목/요약/키워드: Pure gas

검색결과 763건 처리시간 0.024초

Influence of Hydrogen on Al-doped ZnO Thin Films in the Process of Deposition and Annealing

  • Chen, Hao;Jin, Hu-Jie;Park, Choon-Bae;Hoang, Geun-C.
    • Transactions on Electrical and Electronic Materials
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    • 제10권3호
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    • pp.93-96
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    • 2009
  • The Al-doped ZnO (AZO) films were deposited on a glass substrate by RF magnetron sputtering in pure Ar and $Ar+H_2$ gas ambient at temperature of $100^{\circ}C$ and annealed in hydrogen ambient at the temperature range from 100 to 300 $^{\circ}C$, respectively. It was found that either the addition of hydrogen to the sputtering gas or the annealing treatment effectively reduced the resistivity of the AZO films. When the AZO films were annealed at the temperature of 300 $^{\circ}C$ for lhr in a hydrogen atmosphere, the resistivity decreased from $2.60{\times}10^{-3}\;{\Omega}cm$ to $8.42{\times}l0^{-4}\;{\Omega}cm$ for the film deposited in pure Ar gas ambient. Under the same annealing conditions of temperature and hydrogen ambient, the resistivity of AZO films deposited in the $Ar+H_2$ gas mixture decreased from $8.22{\times}l0^{-4}\;{\Omega}cm$ to $4.25{\times}l0^{-4}\;{\Omega}cm$. The lowest resistivity of $4.25{\times}l0^{-4}\;{\Omega}cm$ was obtained by adding hydrogen gas to the deposition and annealing process. X-ray diffraction (XRD) pattern of all films showed preferable growth orientation of (002) plane. The average transmittance is above 85 % and in the range of 400-1000 nm for all films.

Synthesis of Au Nanoparticles Functionalized 1D α-MoO3 Nanobelts and Their Gas Sensing Properties

  • Wang, Liwei;Wang, Shaopeng;Fu, Hao;Wang, Yinghui;Yu, Kefu
    • Nano
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    • 제13권10호
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    • pp.1850115.1-1850115.10
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    • 2018
  • A novel sensor material of Au nanoparticles (NPs) functionalized 1D ${\alpha}-MoO_3$ nanobelts (NBs) was fabricated by a facile lysine-assisted approach. The obtained $Au/{\alpha}-MoO_3$ product was characterized by means of X-ray diffraction (XRD), scanning electron microscope (SEM), transmission electron microscope (TEM) and energy dispersive X-ray (EDX), and X-ray photoelectron spectra (XPS). Then, in order to investigate the gas sensing performances of our samples, a comparative gas sensing study was carried out on both the ${\alpha}-MoO_3$ NBs before and after Au NPs decoration by using ethanol vapor as the molecular probe. The results turned out that, after the functionalization of Au NPs, the sensor exhibited improved gas-sensing characteristics than the pure ${\alpha}-MoO_3$, such as response and recovery time, optimal operating temperature (OT) and excellent selectivity. Take for example 200 ppm of ethanol, the response/recovery times were 34 s/43 s and 5.7 s/10.5 s, respectively, while the optimal operating temperature (OT) was lower to $200^{\circ}C$ rather than $250^{\circ}C$. Besides, the functionalized sensor showed a higher response to ethanol at $200^{\circ}C$, and response was 1.6 times higher than the pure $MoO_3$. The mechanism of such improved sensing properties was interpreted, which might be attributed to the spillover effect of Au NPs and the electronic metal-support interaction.

질소 보호 가스 첨가가 하이퍼 듀플렉스 스테인리스 밀봉용접재의 마모부식 저항성에 미치는 영향 (Influence of the nitrogen gas addition in the Ar shielding gas on the erosion-corrosion of tube-to-tube sheet welds of hyper duplex stainless steel)

  • 김혜진;전순혁;김순태;이인성;박용수
    • Corrosion Science and Technology
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    • 제13권2호
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    • pp.70-80
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    • 2014
  • Duplex stainless steels with nearly equal fraction of the ferrite(${\alpha}$) phase and austenite(${\gamma}$) phase have been increasingly used for various applications such as power plants, desalination facilities due to their high resistance to corrosion, good weldability, and excellent mechanical properties. Hyper duplex stainless steel (HDSS) is defined as the future duplex stainless steel with a pitting resistance equivalent (PRE=wt.%Cr+3.3(wt.%Mo+0.5wt.%W)+30wt.%N) of above 50. However, when HDSS is welded with gas tungsten arc (GTA), incorporation of nitrogen in the Ar shielding gas are very important because the volume fraction of ${\alpha}$-phase and ${\gamma}$-phase is changed and harmful secondary phases can be formed in the welded zone. In other words, the balance of corrosion resistance between two phases and reduction of $Cr_2N$ are the key points of this study. The primary results of this study are as follows. The addition of $N_2$ to the Ar shielding gas provides phase balance under weld-cooling conditions and increases the transformation temperature of the ${\alpha}$-phase to ${\gamma}$-phase, increasing the fraction of ${\gamma}$-phase as well as decreasing the precipitation of $Cr_2N$. In the anodic polarization test, the addition of nitrogen gas in the Ar shielding gas improved values of the electrochemical parameters, compared to the Pure Ar. Also, in the erosion-corrosion test, the HDSS welded with shielding gas containing $N_2$ decreased the weight loss, compared to HDSS welded with the Ar pure gas. This result showed the resistance of erosion-corrosion was increased due to increasing the fraction of ${\gamma}$-phase and the stability of passive film according to the addition $N_2$ gas to the Ar shielding gas. As a result, the addition of nitrogen gas to the shielding gas improved the resistance of erosion-corrosion.

스핀코팅법으로 제작한 산화구리 박막의 일산화질소 가스 감지 특성 (Nitrogen Monoxide Gas Sensing Properties of Copper Oxide Thin Films Fabricated by a Spin Coating Method)

  • 황현정;김효진;김도진
    • 한국재료학회지
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    • 제25권4호
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    • pp.171-176
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    • 2015
  • We present the detection characteristics of nitrogen monoxide(NO) gas using p-type copper oxide(CuO) thin film gas sensors. The CuO thin films were fabricated on glass substrates by a sol-gel spin coating method using copper acetate hydrate and diethanolamine as precursors. Structural characterizations revealed that we prepared the pure CuO thin films having a monoclinic crystalline structure without any obvious formation of secondary phase. It was found from the NO gas sensing measurements that the p-type CuO thin film gas sensors exhibited a maximum sensitivity to NO gas in dry air at an operating temperature as low as $100^{\circ}C$. Additionally, these CuO thin film gas sensors were found to show reversible and reliable electrical response to NO gas in a range of operating temperatures from $60^{\circ}C$ to $200^{\circ}C$. It is supposed from these results that the p-type oxide semiconductor CuO thin film could have significant potential for use in future gas sensors and other oxide electronics applications using oxide p-n heterojunction structures.

스퍼터링법을 이용한 OLED용 Al 음전극 제작 (Preparation of Al Cathode for OLED by Sputtering Method)

  • 금민종;김경환
    • 한국전기전자재료학회논문지
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    • 제18권8호
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    • pp.729-733
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    • 2005
  • Al electrode for OLED was deposited by FTS (Facing Targets Sputtering) system which can deposit thin films with low substrate damage. The Al thin films were deposited on the cell (LiF/EML/HTL/Bottom electrode) as a function of working gas such as Ar or Ar+kr mixed gas. Also Al thin films were prepared with working gas pressure (1, 6 mTorr). The film thickness and I-V curve of Al/cell were measured and evaluated. In the results, when Al thin films were deposited using pure Ar gas, the turn-on voltage of Al/cell was about 11 V. And using the Ar:Kr($75\%:25\%$) mixed gas, the turn-on voltage of Al/cell decreased to about 7 V.

Analysis of Electron Transport Coefficients in Binary Mixtures of TEOS Gas with Kr, Xe, He and Ne Gases for Using in Plasma Assisted Thin-film Deposition

  • Tuan, Do Anh
    • Journal of Electrical Engineering and Technology
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    • 제11권2호
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    • pp.455-462
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    • 2016
  • The electron transport coefficients in not only pure atoms and molecules but also in the binary gas mixtures are necessary, especially on understanding quantitatively plasma phenomena and ionized gases. Electron transport coefficients (electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient) in binary mixtures of TEOS gas with buffer gases such as Kr, Xe, He, and Ne gases, therefore, was analyzed and calculated by a two-term approximation of the Boltzmann equation in the E/N range (ratio of the electric field E to the neutral number density N) of 0.1 - 1000 Td (1 Td = 10−17 V.cm2). These binary gas mixtures can be considered to use as the silicon sources in many industrial applications depending on mixture ratio and particular application of gas, especially on plasma assisted thin-film deposition.

$SnO_2-TiO_2$ 세라믹 복합체의 일산화탄소 감응특성 및 전기적 성질 (CO Gas Sensing Characterstics and Electrical Properties of $SnO_2-TiO_2$ Composite Ceramics)

  • 갬태원;최우성;정승우
    • 한국전기전자재료학회논문지
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    • 제11권6호
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    • pp.453-457
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    • 1998
  • In order to improve CO gas sensitivity, $TiO_2$added $SnO_2$ composite ceramics were prepared. Using XRD and SEM, the phases and micro structures of these ceramics were investigated. The resistances as a function of gas atmosphere were measured by High Voltage Measure/Source Unit. The maximum 100 ppm CO gas sensitivities of $SnO_2-TiO_2$composites were 2.5 times larger than that of pure $SnO_2$ composite and showed the obvious temperature dependence of sensitivities in 500, 100 ppm CO gas atmospheres.

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액적을 동반한 기체에서 이차원 충격파 회절 (TWO-DIMENSIONAL SHOCK WAVE DIFFREACTION IN DROPPET-LADEN GAS MEDIA)

  • 염금수;장근식
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2010년 춘계학술대회논문집
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    • pp.362-364
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    • 2010
  • Shock wave interaction with droplet-gas medium is investigated in this paper. In the present computation, the shock wave is initially started in a pure gas and reflected from the wedge to interact with the droplet-ridden gas flows. We used the compressible two-fluid two-phase model that is solved by the two-fluid version of the HLL scheme. The interfacial drag force and heat transfer were included to model the interaction between continuous and dispersed phases. The parametric effect of void fraction on the shock wave reflection in the two-phase media was investigated.

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CMOS공정 기반의 저전력 NO 마이크로가스센서의 제작 (Fabrication of low power NO micro gas senor by using CMOS compatible process)

  • 신한재;송갑득;이홍진;홍영호;이덕동
    • 센서학회지
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    • 제17권1호
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    • pp.35-40
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    • 2008
  • Low power bridge type micro gas sensors were fabricated by micro machining technology with TMAH (Tetra Methyl Ammonium Hydroxide) solution. The sensing devices with different heater materials such as metal and poly-silicon were obtained using CMOS (Complementary Metal Oxide Semiconductor) compatible process. The tellurium films as a sensing layer were deposited on the micro machined substrate using shadow silicon mask. The low power micro gas sensors showed high sensitivity to NO with high speed. The pure tellurium film used micro gas sensor showed good sensitivity than transition metal (Pt, Ti) used tellurium film.

파이버 레이저를 이용한 순 티타늄 박판의 용접특성 향상을 위한 연구 - 실드가스 노즐변수의 영향 - (The Study for Improving the Weldability of Pure Titanium Sheet by Using Fiber Laser - The Effect of Shielding Gas Nozzle Variable -)

  • 김종도;김지성
    • Journal of Welding and Joining
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    • 제34권5호
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    • pp.6-12
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    • 2016
  • This study was performed bead welding of pure titanium by using fiber laser. Since titanium is very sensitive to oxidation and nitriding during welding, it is important to compose the shielding equipment compared with different material. Thus side and coaxial shield nozzle, rail and chamber type shielding equipment are widely used to protect effectively the weld during welding. Experiments were performed by changing nozzle angle and distance using side and coaxial shield nozzle. The bead colors of gold, brown, blue, purple and yellowish white were obtained by changing variables of shield nozzle, and then its weldability was investigated. As experiment result, sound and not brominated beads were formed when side nozzle angle and distance were respectively $45^{\circ}$ and 10 mm.