Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication of low power NO micro gas senor by using CMOS compatible process

CMOS공정 기반의 저전력 NO 마이크로가스센서의 제작

  • Shin, Han-Jae (School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Song, Kap-Duk (MEMS/NANO Fabrication Center, Busan Techno Park) ;
  • Lee, Hong-Jin (School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Hong, Young-Ho (Department of Digital Electronic Engineering, Kyungwoon University) ;
  • Lee, Duk-Dong (School of Electrical Engineering and Computer Science, Kyungpook National University)
  • Published : 2008.01.31
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Abstract

Low power bridge type micro gas sensors were fabricated by micro machining technology with TMAH (Tetra Methyl Ammonium Hydroxide) solution. The sensing devices with different heater materials such as metal and poly-silicon were obtained using CMOS (Complementary Metal Oxide Semiconductor) compatible process. The tellurium films as a sensing layer were deposited on the micro machined substrate using shadow silicon mask. The low power micro gas sensors showed high sensitivity to NO with high speed. The pure tellurium film used micro gas sensor showed good sensitivity than transition metal (Pt, Ti) used tellurium film.

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References

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