• 제목/요약/키워드: Pt$TiO_{2}$

검색결과 984건 처리시간 0.027초

Pt/ST/Pt 소자 구조의 박막증착 및 특성 (Deposition and Properties of Pt/ST/Pt Thin Film Structure)

  • 김진사;조춘남;오용철;신철기;송민종;소병문;최운식;김충혁
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.472-473
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    • 2007
  • The $(Sr_{1-x}Ca_x)TiO_3$(ST) thin films are deposited on Pt-coated electrode(Pt/TiN/$SiO_2$/Si) using RF sputtering method with substitutional contents of Ca. The maximum grain of thin films is obtained by substitution of Ca at 15[mol%]. Also, the composition of ST thin films were closed to stoichiometry(1.081~1.117 in A/B ratio). The dielectric constant changes almost linearly in temperature ranges of -80~+90[$^{\circ}C$]. The current-voltage characteristics of ST15 thin films showed the increasing leakage current as the measuring temperature increases.

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GZO/ZTO 투명전극을 이용한 DSSC의 광전 변환 효율 특성 (Sputtered ZTO as a blocking layer at conducting glass and $TiO_2$ Interfaces in Dye-Sensitized Solar Cells)

  • 박재호;이경주;송상우;조슬기;문병무
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2011년도 추계학술대회 초록집
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    • pp.53.2-53.2
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    • 2011
  • Dye-sensitized solar cells(DSSCs) have been recognized as an alternative to the conventional p-n junction solar cells because of their simple fabrication process, low production cost, and transparency. A typical DSSC consists of a transparent conductive oxide (TCO) electrode, a dye-sensitized oxide semiconductor nanoparticle layer, liquid redox electrolyte, and a Pt-counter electrode. In dye-sensitized solar cells, charge recombination processes at interfaces between coducting glass, $TiO_2$, dye, and electrolyte play an important role in limiting the photon-to-electron conversion efficiency. A layer of ZTO thin film less than ~200nm in thickness, as a blocking layer, was deposited by DC magnetron sputtering method directly onto the anode electrode to be isolated from the electrolyte in dye-sensitized solar cells(DSCs). This is to prevent the electrons from back-transferring from the electrode to the electrolyte ($I^-/I_3^-$). The presented DSCs were fabricated with working electrode of Ga-doped ZnO glass coated with blocking ZTO layer, dye-attached nanoporous $TiO_2$ layer, gel electrolyte and counter electrode of Pt-deposited GZO glass. The effects of blocking layer were studied with respect to impedance and conversion efficiency of the cells.

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Mn-Modified PMN-PZT [Pb(Mg1/3Nb2/3)O3-Pb(Zr,Ti)O3] Single Crystals for High Power Piezoelectric Transducers

  • Oh, Hyun-Taek;Lee, Jong-Yeb;Lee, Ho-Yong
    • 한국세라믹학회지
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    • 제54권2호
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    • pp.150-157
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    • 2017
  • Three types of piezoelectric single crystals [PMN-PT (Generation I $[Pb(Mg_{1/3}Nb_{2/3})O_3-PbTiO_3]$), PMN-PZT (Generation II $[Pb(Mg_{1/3}Nb_{2/3})O_3-Pb(Zr,Ti)O_3]$), PMN-PZT-Mn (Generation III)] were grown by the solid-state single crystal growth (SSCG) method, and their dielectric and piezoelectric properties were measured and compared. Compared to (001) PMN-PT and PMN-PZT single crystals, the (001) PMN-PZT-Mn single crystals exhibited a higher transition temperature between the rhombohedral and tetragonal phases ($T_{RT}=144^{\circ}C$), as well as a higher coercive electric field ($E_C=6.3kV/cm$) and internal bias field ($E_I=1.6kV/cm$). The (011) PMN-PZT-Mn single crystals showed the highest coercive electric field ($E_C=7.0kV/cm$), and the highest stability of $E_C$ and $E_I$ during 60 cycles of polarization measurement. These results demonstrate that both Mn doping (for higher electromechanical quality factor ($Q_m$)) and a (011) crystallographic orientation (for higher coercive electric field and stability) are necessary for high power transducer applications of these piezoelectric single crystals. Specifically, the (011) PMN-PZT-Mn single crystal (Gen. III) had the highest potential for application in the fields of SONAR transducers, high intensity focused ultrasound (HIFU), ultrasonic motors, and others.

ZnTiO 박막의 성장과 전기적 특성 연구

  • 유한태;이영민;유승용;김형준;이진용;이세준;김득영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.190-190
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    • 2010
  • 본 연구에서는 Ti이 도핑된 ZnO의 성장 및 후처리 과정에 따른 구조적, 전기적, 자기적 특성에 관하여 보고한다. ZnTiO 박막은 Pt/SiO2/Si기판에 $500^{\circ}C$, 20 mTorr에서 RF 마그네트론 스퍼터법과 DC 마그네트론 스퍼터법으로 코스퍼터링을 통하여 증착 하였다. 그리고 박막 성장 후 질소분위기에서 $600{\sim}900^{\circ}C$($50^{\circ}$ step)에서 급속 열처리 공정(RTA)을 이용하여 후열처리에 따른 특성변화를 관찰하였다. 구조적 특성변화를 확인하기 위하여 XRD 측정을 하였으며, Ti이 Zn와 치환되어 성장 한 것을 관측하였다. 한편 자기적 특성 확인을 위한 SQUID 측정 결과, ZnTiO 박막에서 강자성 특성인 자기-이력곡선을 확인하였다. 또한 강유전 특성 분석을 위한 I-V 측정에서 ZnTiO 박막에서 강유전 특성인 전류-이력 현상을 관측하였다.

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고밀도 플라즈마에 의한 (Ba,Sr)$TiO_3$막의 식각특성 연구 (A study on the etching properties of (Ba,Sr)$TiO_3$ film by high density plasma)

  • 김승범;김창일;장의구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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    • pp.798-800
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    • 1998
  • (Ba,Sr)$TiO_3$ thin films were etched with $Cl_2$/Ar gas mixing ratio in an inductively coupled plasma (ICP) by varying the etching parameter such as f power, do bias voltage, and chamber pressure. The etch rate was $560{\AA}/min$ under Cl_2/(Cl_2+Ar)$ gas mixing ratio of 0.2, rf power of 600 W, do bias voltage of 250 V, and chamber pressure of 5 mTorr, At this time, the selectivity of BST to Pt, $SiO_2$ was respectively 0.52, 0.43. The surface reaction of the etched (Ba,Sr)$TiO_3$ thin films was investigated with X-ray photoelectron spectroscopy (XPS).

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산화물박막 증착에 의한 금속 메쉬전극 구조 광전기화학셀의 효율 개선에 관한 연구 (Efficiency Improvement of Metal-Mesh Electrode Type Photoelectrochemical Cells by Oxides Layer Coatings)

  • 한치환;박선희;성열문
    • 전기학회논문지
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    • 제60권3호
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    • pp.584-587
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    • 2011
  • In this work, the $TiO_2$ and $SnO_2$ thin films as blocking layers were coated directly onto the metal-mesh electrode surface to prevent unnecessary inflow of back-transfer electrons from the electrolyte ($I^-/I_3^-$) to the metal-mesh electrode. The DSCs were fabricated with working electrode of SUS mesh coated with blocking $TiO_2$ and $SnO_2$ layers, dye-attached mesoporous $TiO_2$ film, gel electrolyte and counter electrode of Pt-deposited F:$SnO_2$. From the experimental result, it was ascertained that the efficiency of metal electrode coated with $TiO_2$ by Dip-coating was superior to that of metal electrode coated with $SnO_2$ by Dip-coating and screen printing with the results of experiments. The photo-current conversion efficiency of the cell obtained from optimum fabrication condition was 3% ($V_{oc}$=0.61V, $J_{sc}$=11.64 mA/$cm^2$, ff=0.64) under AM1.5, 100 mW/$cm^2$ illumination.

$La_{2}O_{3}$ 치환된 PMN계 세라믹스의 유전 및 전기적특성에 관한 연구 (A study on Dielectric and Electrical Properties using PMN Ceramics with $La_{2}O_{3}$ substitution)

  • 지승한;김병수;이능헌;이희규;김용혁;이덕출
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 하계학술대회 논문집 C
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    • pp.1621-1623
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    • 1996
  • The dielectric and polarizable properties of 0.85Pb$Mg_{1/3}Nb_{2/3}$)$O_3$-$0.125PbTiO_3$-$0.25BaTiO_3$ Ceramics have been investigated as a addition of the amount of $La_{2}O_{3}$($0{\leq}x{\geq}0.05$). The Temperature-dependant electrostictive characteristics of 0.85PMN-0.125PT-0.25BT relaxor ferroelectic system were improved by enhencing the extent of the diffuse phase transition(DPT). This was achieved using PMN-PT-BTceramics by the partial substitution of La at the Pb site. The curie temperature and the maximum dielectic permittivity decreased by substituting $La_{2}O_{3}$ and the electic field-related hysteresis phenomena decreased with increasing $La_{2}O_{3}$ substitution amount. It is showed decreasing in induced strain for electric field with increasing $La_{2}O_{3}$ substitution.

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유기금속 화학기상증착법을 이용한 TiO2 나노선 제조 (Synthesis of TiO2 Nanowires by Metallorganic Chemical Vapor Deposition)

  • 허훈회;웬티깅화;임재균;김길무;김의태
    • 한국재료학회지
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    • 제20권12호
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    • pp.686-690
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    • 2010
  • $TiO_2$ nanowires were self-catalytically synthesized on bare Si(100) substrates using metallorganic chemical vapor deposition. The nanowire formation was critically affected by growth temperature. The $TiO_2$ nanowires were grown at a high density on Si(100) at $510^{\circ}C$, which is near the complete decomposition temperature ($527^{\circ}C$) of the Ti precursor $(Ti(O-iPr)_2(dpm)_2)$. At $470^{\circ}C$, only very thin (< $0.1{\mu}m$) $TiO_2$ film was formed because the Ti precursor was not completely decomposed. When growth temperature was increased to $550^{\circ}C$ and $670^{\circ}C$, the nanowire formation was also significantly suppressed. A vaporsolid (V-S) growth mechanism excluding a liquid phase appeared to control the nanowire formation. The $TiO_2$ nanowire growth seemed to be activated by carbon, which was supplied by decomposition of the Ti precursor. The $TiO_2$ nanowire density was increased with increased growth pressure in the range of 1.2 to 10 torr. In addition, the nanowire formation was enhanced by using Au and Pt catalysts, which seem to act as catalysts for oxidation. The nanowires consisted of well-aligned ~20-30 nm size rutile and anatase nanocrystallines. This MOCVD synthesis technique is unique and efficient to self-catalytically grow $TiO_2$ nanowires, which hold significant promise for various photocatalysis and solar cell applications.

Bridgeman 성장 [011] 분극 Mn:PIN-PMN-PT 압전단결정의 물성 분포 연구 (A Study on Property Distribution of [011] Poled Mn:PIN-PMN-PT Single Crystals Grown by Bridgeman Method)

  • 임수현;제엽;조요한;이상구;서희선
    • 한국전기전자재료학회논문지
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    • 제37권4호
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    • pp.412-419
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    • 2024
  • Mn-doped Pb(In1/2Nb1/2)O3-Pb(Mg2/3Nb1/3)O3-PbTiO3 (Mn:PIN-PMN-PT) single crystals, which exhibit improved phase transition temperatures and coercive field properties compared to Pb(In1/2Nb1/2)O3-Pb(Mg2/3Nb1/3)O3-PbTiO3 (PIN-PMN-PT) single crystals, are expected to be utilized in high-power acoustic transducers. Bridgeman method, growing single crystals along the axial direction from melt, is most widely used method for single crystal growth with large size and high quality. However, single crystal boules grown by the Bridgeman method demonstrate a PT compositional variation, giving rise a distribution of crystal structure and material properties along the growing axis. To employ piezoelectric single crystals grown by the Bridgeman method for acoustic transducers, it is essential to investigate their overall property distribution. In this study, the compositional distribution and property variation of Mn:PIN-PMN-PT single crystals grown by the Bridgeman method was investigated. Measured compositional distribution of PT was from 29% to 32.5% in the Rhombohedral crystal region of the boule. Two types of specimen, [011]-poled Mn:PIN-PMN-29PT and Mn:PIN-PMN-32PT single crystals, were fabricated and tested to obtain full property variation at both ends of the Rhombohedral crystal region. The properties related to the 32 directional vibration mode and the properties related to high-power driving were measured to confirm the overall distribution of properties by composition.

포름알데히드 상온산화 촉매의 상용화를 위한 촉매 제조 및 공정 운전조건 최적화 연구 (A Study on the Optimization of Process Operation & Catalyst Preparing for Commercialization of Formaldehyde Room Temperature Oxidation Catalyst)

  • 이상현;박인출;김성수
    • 한국지반환경공학회 논문집
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    • 제17권10호
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    • pp.5-11
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    • 2016
  • 본 연구에서는 포름알데히드를 상온산화시켜 제거하는 $Pt/TiO_2$ 촉매의 상용화 인자들이 조사되었다. 활성 귀금속 함량 최적화를 위해 촉매의 백금(Pt) 담지량을 변화시켜 제조 후 성능을 평가하였으며, 그 결과 1wt% 함량이 가장 이상적인 함량임을 확인하였다. 또한 활성금속인 Pt를 환원하여 제조한 환원 촉매가 상온에서 우수한 포름알데히드 산화 능력을 나타내었다. 이를 통해 활성금속의 산화가에 따라 성능이 변화될 수 있으며, 백금의 경우 metallic Pt($Pt^0$)로 존재할수록 포름알데히드 상온산화 성능이 증진될 수 있음을 확인하였다. 촉매의 운전인자를 도출하기 위한 공간속도 영향 평가 결과 공간속도가 낮을수록 촉매량 증가에 의해 포름알데히드 전환율이 증진되는 결과를 나타내었다. 또한 공기 내 반드시 존재하는 물질인 수분의 공기 내 공존 시 영향 평가를 실시하였으며, 그 결과 수분이 공존할 때 포름알데히드 산화반응이 수분이 존재하지 않은 조건에서의 활성보다 증진되었다. 상기 결과들을 통해 어떤 추가 에너지원 없이도 포름알데히드를 제거 할 수 있는 상온산화 촉매 상용화를 위한 핵심인자들을 확인하였다.