Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.11c
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- Pages.798-800
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- 1998
A study on the etching properties of (Ba,Sr)$TiO_3$ film by high density plasma
고밀도 플라즈마에 의한 (Ba,Sr)$TiO_3$ 막의 식각특성 연구
- Kim, Seung-Bum (Dept. of Electrical Engineering, Chung-Ang Univ.) ;
- Kim, Chang-Il (Dept. of Electrical Engineering, Chung-Ang Univ.) ;
- Chang, Eui-Goo (Dept. of Electrical Engineering, Chung-Ang Univ.)
- Published : 1998.11.28
Abstract
(Ba,Sr)
Keywords