• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.169-169
• /
• 2008

To keep pace with scaling trends of CMOS technologies, high-k metal oxides are to be introduced. Due to their high permittivity, high-k materials can achieve the required capacitance with stacks of higher physical thickness to reduce the leakage current through the scaled gate oxide, which make it become much more promising materials to instead of $SiO_2$. As further studying on high-k, an understanding of the relation between the etch characteristics of high-k dielectric materials and plasma properties is required for the low damaged removal process to match standard processing procedure. There are some reports on the dry etching of different high-k materials in ICP and ECR plasma with various plasma parameters, such as different gas combinations ($Cl_2$, $Cl_2/BCl_3$, $Cl_2$/Ar, $SF_6$/Ar, and $CH_4/H_2$/Ar etc). Understanding of the complex behavior of particles at surfaces requires detailed knowledge of both macroscopic and microscopic processes that take place; also certain processes depend critically on temperature and gas pressure. The choice of $BCl_3$ as the chemically active gas results from the fact that it is widely used for the etching o the materials covered by the native oxides due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. In this study, the surface reactions and the etch rate of $Al_2O_3$ films in $BCl_3/Cl_2$/Ar plasma were investigated in an inductively coupled plasma(ICP) reactor in terms of the gas mixing ratio, RF power, DC bias and chamber pressure. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by AFM and SEM. The chemical states of film was investigated using X-ray photoelectron spectroscopy (XPS), which confirmed the existence of nonvolatile etch byproducts.

• The KIPS Transactions:PartD
• /
• v.11D no.3
• /
• pp.709-716
• /
• 2004

This paper describes an intelligent real-time monitoring system of a semiconductor processing equipment, which determines normal or not for a wafer in processing, using multiple time-series pattern recognition. The proposed system consists of three phases, initialization, learning and real-time prediction. The initialization phase sets the weights and tile effective steps for all parameters of a monitoring equipment. The learning phase clusters time series patterns, which are producted and fathered for processing wafers by the equipment, using LBG algorithm. Each pattern has an ACI which is measured by a tester at the end of a process The real-time prediction phase corresponds a time series entered by real-time with the clustered patterns using Dynamic Time Warping, and finds the best matched pattern. Then it calculates a predicted ACI from a combination of the ACI, the difference and the weights. Finally it determines Spec in or out for the wafer. The proposed system is tested on the data acquired from etching device. The results show that the error between the estimated ACI and the actual measurement ACI is remarkably reduced according to the number of learning increases.

• Korean Chemical Engineering Research
• /
• v.49 no.4
• /
• pp.423-431
• /
• 2011

Recentincreasing awareness of the environmental damage caused by the $CO_2$ emission of fossil fuelsstimulated the interest in alternative and renewable sources of energy. Fuel cell is a representative example of hydrogen energy utilization. In this study, Molten Carbonate Fuel Cell system is simulated by using $Aspen^{TM}$. Stack model is consisted of equilibrium reaction equations using $ACM^{TM}$(Aspen Custom Modeler). Balance of process of fuel cell system is developed in Aspen $Plus^{TM}$ and simulated at steady-state. Analysis of performance of the system is carried out by using sensitivity analysis tool with main operating parameters such as current density, S/C ratio, and fuel utilization and recycle ratio.In Aspen $Dynamics^{TM}$, dynamics of MCFC system is simulated with PID control loops. From the simulation, we proposed operation range which generated maximum power and efficiency in MCFC power plant.

• Resources Recycling
• /
• v.11 no.6
• /
• pp.38-46
• /
• 2002

Fundamental investigations were conducted far the recovery process of waste organic solvent by fractional distillation in the aspects of equilibrium and kinetics. Mixture of toluene and xylene, which were both being used in the largest amount as industrial organic solvent, was taken as the artificial waste organic solvent and their distillation behaviors were studied. The purity of recovered solvent was investigated by Cir Chromatography and shown to be in the range of 94～98%. Based upon equilibrium calculations, the changes in the Gibbs free energy, standard enthalpy, and standard entropy for distillation reaction have been estimated. The standard enthalpy changes for toluene and xylene were shown to be 44.833 and 47.044 kJ $mol^{-1}$ respectively, which were similar to their molar heats of evaporation. The activation energies of distillation fur toluene and xylene obtained from kinetic studies were 3.281 and 2.699 kJ $mol^{-1}$ and they were about one tenths of the standard enthalpy changes of distillation reaction. The highness of the purity of recovered organic solvents suggested the possibility that the recovered waste organic sol-vent could partly replace the original solvent.

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.37 no.1
• /
• pp.43-59
• /
• 2017

This study presents the prediction methodology of debris flow occurrence areas using the SINMAP model. Former studies used a single calibration region applying some of the soil test results to predict debris flow occurrence in SINMAP model, which couldn't subdivide the soil properties for the target areas. On the other hands, a multi-calibration region using a detailed soil map and soil strength parameters (c, ${\phi}$) for each soil series to make up for limitation of former studies is proposed. In this process, soils with soil erodibility factor (K) are classified into three types: 1) gravel and gravelly soil. 2) sand and sandy soil, and 3) silt and clay. In addition, T/R estimation method using mean elevation of target area instead of T/R method using actual occurrence time is suggested in this study. The suggested method is applied to Seobyeok-1 ri area, Bonghwa-gun where debris flow occurred. As a result of comparison between two T/R estimation method, both T/R estimations are almost equal. Therefore, the suggested methodologies in this study will contribute to set up the national-wide mitigation plan against debris flow occurrence.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.21 no.6
• /
• pp.64-72
• /
• 2017

The longitudinal dynamic instability which can occur in the fueling process of a space launch vehicle is called pogo. It is caused by coupling between the fuselage and propulsion system and they would be formed as a closed-loop system. so that the amplitude of the response may increase or decrease. In this paper, a mathematical model which is applicable to the systematic pogo analysis of a general launch vehicle is developed for an example of space shuttle. The formulations are composed of the linearized second-order differential equation for the propulsion system, and of the pressure, weight displacement, and generalized displacement. Those are important parameters for pogo analysis, are derived through eigenvalue analysis. By the formulation suggested in this paper, it is expected that mathematical modeling method of the pogo system can be obtained and systematic pogo stability analysis for any launch vehicle will be enabled.

• Journal of Advanced Marine Engineering and Technology
• /
• v.40 no.9
• /
• pp.768-773
• /
• 2016

Engine valve seat and face, which are the important factors affecting engine performance, are required to have wear, heat and corrosion resistance. In order to produce surface layer with these characteristics, PTA(plasma transferred arc) surfacing procedure is generally employed, but problems, such as large HAZ and high dilution etc., frequently occurr. Laser cladding, which overcomes the drawbacks of conventional technologies, can be employed to create a superior clad layer with low dilution, small heat affected zone, and minimal distortion. However, in case cladding is to be applied to a large area, it is necessary to overlap 1 pass clad layer because of limited clad layer width. Two criteria for the overlapping ratio-beam size and clad layer width-have been considered thus far. Upon inspection of multi pass clads, produced by different overlapping criteria, it was observed that the greater the increase in overlapping ratio, the greater was the decrease in clad layer width and increase in clad layer height regardless of the criterion used. However, a multi pass clad overlapped by the beam size criterion demonstrated a higher hardness value than a clad overlapped by the clad layer width owing to decreasing dilution of the substrate. In conclusion, the beam size was defined as the criterion for the overlapping, because the clad layer width increased or decreased depending upon process parameters.

• Journal of the Korean Society for Railway
• /
• v.14 no.6
• /
• pp.526-534
• /
• 2011

In this study, proposed is the methodology to determine the upper limit for stiffness of rail pad for the ballasted and concrete track in high-speed railway in the viewpoint of running safety, considering the dynamic characteristics of train and track and the operation environment. For the track irregularity, one of the most important input parameters for traintrack interaction analysis, the reference vertical track irregularity PSDs(power spectral densities) for the ballasted and concrete track in a wide range of frequencies were proposed based on those presented in France and Germany and that obtained from the measured data at Kyeong-Bu 1st phase high-speed railway line. Using these reference PSD models, the input data for the vertical track irregularity data were regenerated by random generation process, and then, the wheel load reduction rates according to the stiffness of the rail pads have been calculated by the train-track interaction analysis technique. Finally, by comparing the wheel load reduction rates calculated with the derailment criteria prescribed in the Korean standards for railway vehicle safety criteria, the upper limits for the stiffness of rail pad have been proposed.

• The Korean Journal of Zoology
• /
• v.39 no.4
• /
• pp.437-446
• /
• 1996

The courtship and fighting behaviors and the sexual dimorphism of the salamander Hynohius leechil were studied. The parameters, snout vent length, body length (from snout to tail tip), and proportion of snout vent length to body size were larger in the female than the male. Five physical parameter in males were significantly correlated with one another, body length, snout vent length, head width, tail vent length, and tall depth, while all, except tail depth, were significantly correlated in females. Sexual behavior of H. leechIl involved external fertilization and consisted of three stages, identifying the female, aifrading the female, and insemination. The identification stage consisted of a positive advance by the male toward the female and display of snout contact. The male attracted the female with chin rubbing, tail undulation, smelling, and digging displays. The insemination process consisted of four phases, amplex, separating egg sacs from the female's cloacal, fertilizing eggs, and post fertilization. liighting behaviors were quite simple. The attacking male would generally bite the opposite male's upper chin or hind limbs and then shakes his head two or three times. The bitten male, which in most cases was of a dissimilar body size, quicidy escaped from the attacking male. After fighting, winning male usually displayed rapid tail undulation.

• Korean journal of applied entomology
• /
• v.21 no.4 s.53
• /
• pp.200-206
• /
• 1982

A computer simulation model was constructed to explore the phonology of the Striped Rice Borer, Chilo suppressalis (Walker), in Korea. The phenological system model based on the concept of distributed time delay was written in the computer program 'INSECT' and simulated with the estimated parameters of the effective day-degrees (DEL) and the order of time delay (K) for determining the validity of the system model. The accumulated emergence curves obtained from the phenological model were slightly different from the observed light trap data at the early and late stage of the moth emergence in 1978. The differences between observed and simulated $50\%$ emergence date were five to six days in the locations of Suweon and Chuncheon, while it was only two to three days in Iri, Daegu, Boseong, and Milyang. The phenological model should be further improved for simulation of field population changes by adding the information of the time delay process in each developmental stage, the age distribution of overwintered population, and the limiting factors of the borer mortality.