• 한국전기전자재료학회논문지
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• 제29권1호
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• pp.23-29
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• 2016

In this paper, in order to quantify the peristalsis occurrence in a guinea pig's large intestine, a miniaturized air-gap capacitive pressure sensor was fabricated through micro-electro-mechanical system (MEMS). The proposed pressure sensor is a two-layered biocompatible polyimide substrate consisting of an air-gap capacitive plates between the substrates. The proposed pressure sensor was designed with a careful consideration of the structure and motility mechanism of the guinea pig's large intestine. Artificial pellets were mounted on a prototype pressure sensor to provide some redundancies in the form of size and shape of the guinea pig feces. Capacitance of a prototype sensor was recorded to be 2.5 ~ 3 pF. This capacitance value was later converted to count value using a lab fabricated data conversion system. Sensitivity of the pressure sensor was recorded to be below 1 mmHg per atmospheric pressure. During in vivo testing, artificial peristalsis caused by drug injection was measured by inserting the prototype pressure sensor into the guinea pig's large intestine and pressure data obtained due to artificial peristalsis was graphed using a labview program. The proposed pressure sensor could measure the pressure changes in the proximal, medial, and distal parts of the large intestine. The results of the experiment confirmed that pressure changes of guinea pig's large intestine was proportional to the degree of drug injection.

• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.171-176
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• 2013

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

• 대한의용생체공학회:의공학회지
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• 제37권5호
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• pp.168-177
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• 2016

In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of $3mm{\times}15mm{\times}0.5mm$. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure.

• 한국전기전자재료학회논문지
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• 제26권9호
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• pp.669-676
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• 2013

In this study, we introduce a polymer(polyimide) based pressure sensor to measure real-time heart beat and blood pressure. The sensor have been designed with consideration of skin compatibility of material, cost effectiveness, manufacturability and wireless detection. The designed sensor was composed of inductor coils and an air-gap capacitor which generate self-resonant frequency when electrical source is applied on the system. The sensor was obtained with metalization, etching, photolithography, polymer adhesive bonding and laser cutting. The fabricated sensor was shaped in circular type with 10mm diameter and 0.45 mm thickness to fit radial artery. Resonant frequencies of the fabricated sensors were in the range of 91~96 MHz on 760 mmHg pressurized environment. Also the sensor has good linearity without any pressure-frequency hysteresis. Sensitivity of the sensor was 145.5 kHz/mmHg and accuracy was less than 2 mmHg. Real-time heart beat measurement was executed with a developed hand-held measurement system. Possibility of real-time blood pressure measurement was showed with simulated artery system. After installation of the sensor on skin above radial artery, simple real blood pressure measurement was performed with 64 mmHg blood pressure variation.

• 한국방재학회 논문집
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• 제5권3호
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• pp.23-28
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• 2005

본 연구에서는 온도가 보상된 대기압을 제연구역의 기준압력으로 설정하기 위한 공학적인 메커니즘과 보상방법을 정렵하였고, 차압센서의 개발을 위한 프로세스, 알고리즘 확립과 엔지니어링 데이터 구축으로 신뢰성이 확보된 차압센서를 개발하였다. 차압센서를 개발함으로서, 첫째, 비제연구역의 압력측정을 위해서 별도로 설치되는 압력측정관을 생략할 수 있어 제작단가와 설치비용 및 작업공수를 줄이고, 둘째, 층별 제연구역의 차압측정을 위한 비제연구역의 압력측정포트를 시스템에 일체화함으로서 차압의 정밀도를 향상시킬 수 있으며, 셋째, 기존의 개별제어 방식에서 제연시스템으로부터 중앙집중식 통합관리를 함으로서 보다 정확하고 신뢰성 있는 차압을 얻을 수 있고, 시스템에 유연성을 부과시킬 수 있을 것으로 본다. 또한 통합 제연시스템의 기틀을 마련하고 제연의 유연성을 주며 방재성능을 향상시킬 것으로 본다.

• 한국인터넷방송통신학회논문지
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• 제21권2호
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• pp.89-95
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• 2021

욕창은 아직 해결되지 않은 인류의 난제이다. 본 연구에서는 건반형 의료용 침대를 개발하고 체압센서를 장착하여 욕창이 임계압력에 이르지 않도록 건반을 제어하는 방법을 제시한다. 이를 위해 4bar 링크를 이용한 건반형 매트리스를 개발하고 건반의 높낮이를 체압센서를 통해 임계압력 이내로 제어하는 방법을 사용한다. 압력x시간이 중요 요인인 욕창에서 건반을 승하강하며 시간제어만을 할 때는 신체의 불편감이 있으나, 제시한 방법을 사용하면 압력을 임계압력이내로 제어함으로서 편안한 상태에서 욕창을 예방하는 효과를 거둔다. 개발한 의료용 침대 시스템의 유효성과 타당성을 이론과 실험을 통해 검증하였다.

• 한국전기전자재료학회논문지
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• 제25권6호
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• pp.445-450
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• 2012

We have developed an implantable wireless sensor for real time pressure monitoring of blood circulation system. MEMS (micro-electro-mechanical system) technology was adopted as a sensor development method. The sensor is composed of photolithographically patterned inductors and a distributed capacitor in gap between the inductors. A resulting LC resonant system produces its resonant frequency in range of 269 to 284 MHz at 740 mmHg. To read the resonant frequency changed by blood pressure variation, we developed a custom readout system based on a network analyzer functionality. The bench-top testing of the pressure sensors showed good mechanical and electrical functionality. A sensor was implanted into tibial artery of farm pig, and interrogated wirelessly with accurate readings of blood pressure. After 45 days, the sensor's electrical response and histopathology were studied with good frequency reading and biocompatibility.

• 대한기계학회논문집A
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• 제24권9호
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• pp.2361-2370
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• 2000

The introduction of inexpensive cylinder pressure sensors provides new opportunities for precise engine control. This paper presents a control strategy of spark advance based upon cylinder pressure of spark ignition engines. A location of peak pressure(LPP) is the major parameter for controlling the spark timing, and also the UP is estimated, using a multi-layer feedforward neural network, which needs only five pressure sensor output voltage samples at -40˚, -20˚, 0˚, 20˚, 40˚ after top dead center. The neural network plays an important role in mitigating the A/D conversion load of an electronic engine controller by increasing the sampling interval from 10 crank angle(CA) to 20˚ CA. A proposed control algorithm does not need a sensor calibration and pegging(bias calculation) procedure because the neural network estimates the UP from the raw sensor output voltage. The estimated LPP can be regarded as a good index for combustion phasing, and can also be used as an MBT control parameter. The feasibility of this methodology is closely examined through steady and transient engine operations to control individual cylinder spark advance. The experimental results have revealed a favorable agreement of individual cylinder optimal combustion phasing.

• 한국전기전자재료학회논문지
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• 제29권5호
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• pp.284-288
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• 2016

Among the various physiological information that could be obtained from human body, heartbeat rate is a commonly used vital sign in the clinical milieu. Photoplethysography (PPG) sensor is incorporated into many wearable healthcare devices because of its advantages such as simplicity of hardware structure and low-cost. However, healthcare device employing PPG sensor has been issued in susceptibility of light and motion artifact. In this paper, to develop the real-time heart rate measurement device that is less sensitive to the external noises, we have fabricated an ultra-small wireless LC resonant pressure sensor by MEMS process. After performance evaluation in linearity and repeatability of the MEMS pressure sensor, heartbeat waveform and rate on radial artery were obtained by using resonant frequency-pressure conversion method. The measured data using the proposed heartbeat rate measurement system was validated by comparing it with the data of an commercialized heart rate measurement device. Result of the proposed device was agreed well to that of the commercialized device. The obtained real time heartbeat wave and rate were displayed on personal mobile system by bluetooth communication.

• 한국전기전자재료학회논문지
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• 제33권5호
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• pp.350-354
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• 2020

In this study, a pressure sensor for each displacement was fabricated based on the silicon-based pressure sensor obtained through simulation results. Wires were bonded to the pressure sensor, and a piezoresistive pressure sensor was inserted into the printed circuit board (PCB) base by directly connecting a micro-electro-mechanical system (MEMS) sensor and a readout integrated circuit (ROIC) for signal processing. In addition, to prevent exposure, a non-conductive liquid silicone was injected into the sensor and the entire ROIC using a pipette. The packaging proceeded to block from the outside. Performing such packaging, comparing simple contact with strong contact, and confirming that the measured pulse wavelength appears accurately.