• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.27-32
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• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.674-677
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• 2003

This work presents a method of point-to-surface assignment for 3D inspection of solder pastes on PCB. A bounding box enclosing the solder paste tightly on all sides is introduced to avoid incorrect point-to-surface assignment. The shape of bounding box for solder paste brick is variable according to geometry of measured points. The surface geometry of the bounding box is obtained by using five peaks selected from the histogram of normalized gradient vectors for measured points. By using the bounding box enclosing the solder paste. the task of point-to-surface assignment is successfully executed. Subsequently, the geometrical features are obtained via surface fitting.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.1075-1076
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• 2013

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.32-38
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• 2008

This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of $48{\mu}m$ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of $50{\mu}m$. The FTC unit was integrated with a force sensor so that the initial position of the micro-cutting tool with respect to the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were $190{\mu}m$ and $20{\mu}m$, respectively. A micro-lens array was fabricated on a cylinder surface over an area of ${\phi}55 mm{\times}40 mm$.

• 한국정밀공학회지
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• 제20권3호
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• pp.210-220
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• 2003

This work presents a method of point to surface assignment fur 3D metrology of solder pastes on PCB. A bounding box enclosing the solder paste tightly on all sides is introduced to avoid incorrect assignment. The shape of bounding box fur solder paste brick is variable according to geometry of measured points. The surface geometry of bounding box is obtained by using five peaks selected in the histogram of normalized gradient vectors. By using the bounding box enclosing the solder pastes, the task of point-to-surface assignment has been successfully conducted, then geometrical features are obtained through the task of surface fitting.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.685-686
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• 2012

• 한국정밀공학회지
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• 제28권3호
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• pp.323-329
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• 2011

Certified reference materials (CRMs) have been used to calibrate surface profilers for reliable measurements. In this paper, we present a newly designed step height CRM which has a step height pattern with two different widths and various special patterns for checking radial magnification, distortion of optical viewing systems, etc. Especially, it could be useful for multi-probe inspection instruments in the manufacturing lines. The fabrication was done by conventional optical lithography and dry etching process with optimized conditions. To verify the step height values, a white-light scanning interferometer was used with objective lenses having magnification of $10{\times}$ and $100{\times}$. CRMs with nominal step heights of $0.5\;{\mu}m$, $1\;{\mu}m$, $3\;{\mu}m$, $5\;{\mu}m$, $7\;{\mu}m$, and $10\;{\mu}m$ were fabricated and the uniformity of these CRMs was evaluated to be less than 3 nm ($1{\sigma}$).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.847-848
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• 2012

• 한국정밀공학회지
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• 제23권9호
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• pp.102-110
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• 2006

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.69-70
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• 2009