• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.239-240
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• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.148-148
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• 2011

Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H, ${\mu}c$-Si:H, Si3N4, and SiO2 take a significant portion of processes. In order to achieve higher deposition rate (DR), good uniformity in large-area reactor, and good film quality (low defect density, high film strength, etc.), the application of VHF (>40 MHz) CCP is indispensible. However, the electromagnetic wave effect in the VHF CCP becomes an issue to resolve for the achievement of good uniformity of plasma and film. Here, we propose a new electrode as part of a method to resolve the standing wave effect in the large-area VHF CCP. The electrode is split up a series of strip-type electrodes and the strip-type electrodes and the ground ones are arranged by turns. The standing wave effect in the longitudinal direction of the strip-type electrode is reduced by using the multi-feeding method of VHF power and the uniformity in the transverse direction of the electrodes is achieved by controlling the gas flow and the gap length between the powered electrodes and the substrate. Also, we provide the process results for the growths of the a-Si:H and the ${\mu}c$-Si:H films. The high DR (2.4 nm/s for a-Si:H film and 1.5 nm/s for the ${\mu}c$-Si:H film), the controllable crystallinity (~70%) for the ${\mu}c$-Si:H film, and the relatively good uniformity (1% for a-Si:H film and 7% for the ${\mu}c$-Si:H film) can be obtained at the high frequency of 40 MHz in the large-area discharge (280 mm${\times}$540 mm). Finally, we will discuss the issues in expanding the multi-electrode to the 8G class large-area plasma processing (2.2 m${\times}$2.4 m) and in improving the process efficiency.

• Analytical Science and Technology
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• v.15 no.3
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• pp.236-242
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• 2002

A method was investigated to determine the thickness of coating on steel sheet using rf glow discharge atomic emission spectrometer. The RF gas-jet boosted glow discharge has such salient feature as good pleasure stability and high sputtering efficiency that it was possible to determine the thickness of silicon resin film on zinc electroplated steel. The erosion speed variation is dependent on discharge power, gas flow rate and discharge pressure. therefore determine discharge condition to measure the thickness of coating on steels. The fundamental studies have been carried out to investigate an optimum condition for in-depth analysis and composition of zinc coating on steel. In this study, the calibration curve for thickness determination of silicon resin film was found to be linear in the range of $1000{\sim}3500mg/m^2$ film thickness. The developed rf gas-jet boosted glow discharge was applied to the analysis of zinc coating and silicon resin film on steel made by RIST.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.40 no.4
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• pp.316-329
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• 2012

In this paper, optimum design process of ICP (Inductively Coupled Plasma) torch, which has been used widely in aerospace application, such as supersonic plasma wind tunnel, is presented. For this purpose, the behaviors of equivalent circuit parameters (equivalent resistance and inductance, coupling efficiency) were investigated according to the variations of torch design parameters (frequency, $f$, confinement tube radius, $R$ and coil turn numbers, $N$) in the basis of analytical and numerical MHD (Magneto Hydro-Dynamics) models combined with electrical circuit theory. From the results, it is found that equivalent resistance is increased with the increase of $f$ values but vice versa for equivalent inductance. For elevated values of $R$ and $N$, however, both parameters tend to increase. Based on these observations, ICP torch with a power level of 10 kW can be optimized at the design ranges of $f$=4~6 MHz, $R$=17~25 mm and $N$=3~4 to maximize the electrical coupling efficiency, which is the ratio of equivalent resistance to equivalent inductance.

• Journal of Energy Engineering
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• v.28 no.4
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• pp.35-41
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• 2019

In order to overcome these disadvantages, the halogen light source, which was previously used as a vehicle fog light, has increased power consumption and a short lifetime, and thus, an automobile light source is gradually being replaced with an LED. However, when the vehicle LED fog light is turned on, there is a disadvantage in reducing the life of the fog lamp due to the high heat generated from the LED. The heat generated by the LED inside the fog lamp is mainly emitted by the heatsink, but most of the remaining heat is released to the outside through convection. When cooling efficiency decreases due to convection, thermal energy generates heat to lenses, reflectors, and bezels, which are the main parts of lamps, or generates high temperatures in LED, thereby shortening the life of LED fog lights. In this study, we tried to improve the heat dissipation performance by convection in addition to the heat dissipation method by heat sink, and to determine the installation location of vents that can discharge the internal air or intake the external air of LED fog lamp for vehicle. Thermal fluid analysis was performed to ensure that the optimal data were reflected in the design. The average velocity of air increased in the order of Case3 and Case2 compared to Case1, which is the existing prototype, and the increase rate of Case3 was relatively higher than that of other cases. This is because the vents installed above and below the fog lamps induce the convective phenomena generated according to the temperature difference, and the heat is efficiently discharged with the increase of the air speed.

• Journal of Energy Engineering
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• v.26 no.3
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• pp.105-112
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• 2017

A lot of piping systems have been used from nuclear power systems to water supply systems. The maintenance of the piping systems is needed to ensure proper operation of the piping systems. Failure of the large pipe systems especially such as KDHC(Korea District Heating Corporation) can be a matter directly related to the enterprise productivity and profitability. It can also lead to very important issues in promoting public safety and convenience. Therefore a method of quick and safety repairs have been emerged as the most important problem. In this study, freezing seal isolation method using liquid nitrogen cryogenic refrigerant was developed for the maintenance of a pre insulated heat transport pipe of KDHC with a diameter of 300 mm. In this study, by employing computational analysis techniques we performed the flow and heat transfer analysis for the targeted pre insulated heat transfer pipe and freezing seal jacket(ice-Plug) and have selected for optimal system. The detailed design model based on the results of the computational analysis finally was produced. A laboratory-scale test apparatus were designed and the freezing seal isolation self-test carried out. Also the performance assessment tests in the test bed of KDHC were carried out for on-site application.

• Journal of Energy Engineering
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• v.26 no.3
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• pp.64-70
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• 2017

The concept of Hybrid Safety Injection Tank (Hybrid SIT) proposed by the Korea Atomic Energy Research Institute (KAERI) has been introduced for the purpose of application to the Advanced Power Reactor Plus (APR+). In this study, the SBO situation of the APR+ was analyzed by using the MARS-KS code in order to evaluate whether the operation of the Hybrid SIT has an effect on the cooling performance of the Reactor Coolant System (RCS). According to the analysis, when the actuation valve on the pressure balancing line (PBL) is opened, the Hybrid SIT's pressure rises rapidly, forming equilibrium with the RCS pressure; subsequently, a flow is injected from the Hybrid SIT into the reactor vessel through the direct vessel injection (DVI) line. The analysis showed that it is possible to keep the core temperature below melting temperature during the operation of a Hybrid SIT.

• The Korean Journal of Food And Nutrition
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• v.24 no.2
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• pp.159-165
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• 2011

This study was carried out to investigate the quality characteristics of pear jam containing fresh ginger(G1) and ginger powders; dried ginger powder(G2), freeze-dried ginger powder(G3), and hot-air dried ginger powder(G4). The moisture, crude protein, and crude ash content of the control group were significantly higher than those of the experimental groups (p<0.001, p<0.05, p<0.01). The pH of the dried ginger powder added jam(G2) was the lowest(p<0.05). Texture profile analysis found that the dried ginger powder added jam(G2) had the highest firmness, consistency, cohesiveness, and resistance to flow/viscosity among all samples(p<0.001). Regarding the spread-meter value of the pear jam, the control group (G1) and hot air-dried ginger powder added jam(G4) had the highest values. The dried ginger power added jam(G2) had the lowest value among the samples(p<0.01). Regarding the color values of the pear jam, the control group(G1) had the highest L and b values. Hot-air dried ginger powder added jam(G4), on the other hand, had the lowest(p<0.001). The opposite was true for a value: hot-air dried ginger powder added jam(G4) had the highest. From the sensory evaluation, a positive trend was observed for the appearance of the dried ginger powder added jam(G2)(p<0.001). For sweetness, the dried ginger powder added jam(G2) had the highest value. A positive trend was observed for the overall acceptability of the dried ginger powder-added jam(G2)(p<0.001). Therefore, the dried ginger powder-added sample(G2) seemed to be the most appropriate to make pear jam with high acceptability.

• The Journal of Korean Medicine
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• v.18 no.1
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• pp.126-142
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• 1997

For last four or five years, the number of Korean students have gone on increasing awfully. After the year 1997 when they will flow in, our field and government will be undergone a big shock and social problems. Therefore, thorough grasping and the method of provision is expeced to need. 1. The situation, According to the data published from the year 1993 to 1997, their results are great different. But recent Korean embassy in China examined the situation of the Korean students, whose result was investigated as follows: about 1500 persons, their average age is 24 to 44, the ratio of male and female students is 3 to 1, that of their academic background which is a graduate of university : that of college : that of highschool is 1.6 : 1 : 4.7, and that of their class attitude which is direct : common : indirect appears the percents 30.4 : 52.8 : 16.8. 2. The controversial points (1) A lowering of standards on Chinese medical treatment is expected by the imprudent studying abroad without qualification. And because of excessive production of herb doctors, the amount of treatment may be above people's demand. Besides owing to the impossibility of prediction on the number the counterplans of our government may fall into utler confusion. (2) The curriculum, the teaching schedule and contents are so different that the graduates seem not to be given real education of chinese medicine from the point of Korean view. (3) In the wrong national examination, the important thought of china, and the system of WTO in Korea, when China will become mighty rival above problems contain the negative sides. 3. The counterplans - what should be performed soon. (1) Illegal contents about studying abroadl in China ought to inform sidely that students might not go on increasing. Before they form nam-power, the government and the field of chinese medicine should cope with such a situation together. (2) The law of regulation about agents should be legislated and they should be surpervised. (3) The exact numbers of students, their situation, and the present condition of each university should be examined. (4) After investigating the problems of the present system of national test, its enforcement and many counterplans is requisite. (5) The cooperating confrontation with the conference of dentistry is in need. (6) Since the problems are possibility to be developed to diplomatic questions, the effort of both nations is needful. - what need middle of long time. (1) The effort that suppress the more establishment of the college of oriental medicine is necessary. (2) After comparing with the system of foreign test, the government should make the system of test in accord with the mutualism and the principle of indiscrimination among nations and cope with such a many issues thoroughly.

• Korean Journal of Social Welfare
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• v.66 no.4
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• pp.53-75
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• 2014

The current status of Korean social work can be summarized as multiple complexities and ambiguities not only in ideological but in practical aspects. Although they have long been considered as an unique feature of social work as one of representative human service professions, the extent of such complexities are now reaching the culmination enough to raise the questions about the very nature of social work practice. This study aims to analyse such ambiguities and complexities around the field of social work in a systematic ways with the theory of liquid modernization, an creative framework for modern society, coined by Zygmunt Bauman who is now considered as one of the leading sociologist and thinker. The study shows clearly that social work in Korea is nowadays entering the phase of liquid modern society and specific features of liquidity of modern society such as consumerism, privatization, corruption of publicity etc are founded in the areas of social work. To make it worse, social work are thinking about the anachronical response to this flow of liquidity by selecting the strategies useful in solid modern era, not in the liquid one. In this context, the study suggests that social work practice have to prepare to adequate measures to secure its own autonomy and sustain genuine identification from the ruthless melting power of liquid modern society.