Relative Transmittance and Emission Intensity of Optical Emission Spectroscopy for Fault Detection Application of Reactive Ion Etching (Reactive Ion Etching에서 Optical Emission Spectroscopy의 투과율과 강도를 이용한 에러 감지 기술 제안)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.06a
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- pp.473-474
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- 2008