• 제목/요약/키워드: Post plasma

검색결과 446건 처리시간 0.034초

연속 공정으로 형성된 탄탈륨 산화막 및 실리콘 질화막의 이중유전막에 관한 연구 (A Study on the double-layered dielectric films of tantalum oxide and silicon nitride formed by in situ process)

  • 송용진;박주욱;주승기
    • 전자공학회논문지A
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    • 제30A권1호
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    • pp.44-50
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    • 1993
  • In an attempt to improve the electrical characteristics of tantalum pentoxide dielectric film, silicon substrate was reacted with a nitrogen plasma to form a silicon nitride of 50.angs. and then tantalum pentoxide thin films were formed by reactive sputtering in the same chamber. Breakdown field and leakage current density were measured to be 2.9 MV/cm and 9${\times}10^{8}\;A/cm^{2}$ respectively in these films whose thickness was about 180.angs.. With annealing at rectangular waveguides with a slant grid are investigated here. In particular, 900.deg. C in oxygen ambient for 100 minutes, breakdown field and leakage current density were improved to be 4.8 MV/cm and 1.61.6${\times}10^{8}\;A/cm^{2}$ respectively. It turned out that the electrical characteristics could also be improved by oxygen plasma post-treatment and the conduction mechanism at high electric field proved to be Schottky emission in these double-layered films.

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아르곤 이온빔을 이용한 CNT 페이스트 에미터의 표면처리에 관한 연구 (A Study on the Surface Treatment of CNT Paste Emitter by Ar Ion Irradiation)

  • 권상직
    • 한국전기전자재료학회논문지
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    • 제20권5호
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    • pp.456-461
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    • 2007
  • In this study, a surface treatment method using accelerated Ar ions was experimented for exposing the carbon nanotubes (CNT) from the screen-printed CNT paste. After making a cathode electrode on the glass substrate, photo sensitive CNT paste was screen-printed, and then back-side was exposed by UV light. Then, the exposed CNT paste was selectively remained by development. After post-baking, the remained CNT paste was bombarded by accelerated Ar ions for removing some binders and exposing only CNTs. As results, the field emission characteristics were strongly depended on the accelerating energy, bombardment time, and the power of RF plasma ion source. When Ar ions accelerated with 100 eV energy from the 100 W RF plasma source are bombarded on the CNT paste surface for 10 min, the emission level and the uniformity were best.

플라스틱 기판 사용을 위해 기판을 가열하지 않고 증착한 $SiO_2$ 절연막의 플라즈마 처리 효과 (The effect of plasma treatment on the $SiO_2$ film fabricated without substrate heating for flexible electronics)

  • 국승희;김선재;한상면;한민구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 제39회 하계학술대회
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    • pp.1203-1204
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    • 2008
  • 본 논문에서는 ICP-CVD(Inductively Coupled Plasma Chemical Vapor Deposition)를 이용해 기판을 가열하지 않고 증착한 $SiO_2$ 절연막의 플라즈마 처리 효과를 분석하였다. 플라즈마 처리를 하지 않은 $SiO_2$ 절연막의 경우 평탄화 전압이 -7.8V, 유효 전하 밀도가 $4.77{\times}10^{13}cm^2$로 열악한 특성을 보였다. 이를 개선하기 위해 헬륨 플라즈마 전처리(Pre-treatment)와 수소 플라즈마 후처리(Post-treatment)를 통해서 $SiO_2$ 절연막의 전기적인 특성을 개선하였다.

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Improvement of Adhesion Strength of DLC Films on Nitrided Layer Prepared by Linear Ion Source

  • Shin, Chang-Seouk;Kim, Wang-Ryeol;Park, Min-Seok;Jung, Uoo-Chang;Chung, Won-Sub
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.177-179
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    • 2011
  • The purpose of this study is to enhance an adhesion between substrate and Diamond-like Carbon (DLC) film. DLC has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion because of weak bonding between DLC film and the substrate. For improvement adhesion, a layer between DLC film and the substrate was prepared by dual post plasma. DLC film was deposited on nitrided layer by linear ion source. The composed compound layer between substrate and DLC film was investigated by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The synthesized bonding structure of DLC film was analyzed using a micro raman spectrometer. Mechanical properties were measured by nano-indentation. In order to clarify the mechanism for improvement in adhesive strength, it was observed by scratch test.

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아크지속시간 측정을 통한 나선형 VI 전극의 전극배치에 따른 아크제어 성능비교 (Comparison of Arc Control Ability as a Function of Configuration of Spiral Type VI Contacts by Measuring Arcing Time)

  • 김병철;박홍태;오일성;임기조
    • 한국전기전자재료학회논문지
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    • 제22권2호
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    • pp.184-190
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    • 2009
  • One of the purposes of arc control is to change its state to the diffuse state before current zero as soon as possible. This can provide optimal conditions for full extinction of arc by minimizing the quantity of residual plasma between contacts near current zero. TRV(transient recovery voltage) occurs at current zero at the same time with current interruption. If there is substantial residual plasma near current zero it can cause 'post arc current' by the interaction of its conductance with TRV. In this paper, arc control ability as a function of configuration of spiral type VI contacts was compared on the criteria of the time taken for arc to reach to the diffuse state.

PEO 코팅 처리된 AZ91 합금의 산화층에 미치는 후-열처리의 영향 (Influence of subsequent-annealing on the oxide layer of AZ91 Mg alloy prepared by plasma electrolytic oxidation)

  • 김용민;고영건;신동혁
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 추계학술대회 논문집
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    • pp.429-432
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    • 2009
  • The influence of the subsequent-annealing (SA) treatment on plasma electrolytic oxidation (PEO)-treated Mg-based alloy was investigated and the dependence of the dehydration reaction on the SA temperature was also studied. For this purpose, a series of the SA treatments were carried out on the coated samples at two different temperatures, i.e. 423 and 523 K for 10 h. In contrast to the sample without SA treatment, the sample annealed at 523 K exhibited a significant difference in term of surface morphology since the MgO content in the oxide layer increased with increasing SA temperature. With increasing SA temperature, the dehydration of $Mg(OH)_2$ led to the increase in the relative amount of the MgO, which was a hard phase. From the nano-indentation results, the applied loads of the samples were seen to increase as SA temperature increased. However, the corrosion resistance of the sample annealed at 423 K was higher than that of the samples annealed at 523 K.

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A Study on Virtual Studio Application using Microsoft Hololens

  • Lee, Jaehyun;Kim, Seunghyeon;Kim, Lyounghui;Kang, Jinwook;Lee, Seunghyun;Kwon, Soonchul
    • International journal of advanced smart convergence
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    • 제6권4호
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    • pp.80-87
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    • 2017
  • Mixed Reality (MR) shows a composite image of a virtual object in the real world. It has been applied to various fields by the introduction of head mounted display (HMD) such as Microsoft's Hololens [1-3]. The virtual studio in broadcasting combines the contents created by computer graphics with the actual set to reproduce the 3D image screen. This requires physical space such as a set of chroma keys. It also requires professional knowledge and manpower and costly equipment to post-process the graphics and information for long periods of time. Therefore, in this paper, we aim to study the implementation of virtual studio based on Mixed Reality using Microsoft Hololens. Through the implementation of 'Holo-studio' application, realistic and virtual objects of broadcasting camera viewpoint were acquired at the same time. Using Microsoft's spectator view library, the frame rate is degraded in objects with high polygons (100,000 polygons). The proposed method maintains 60 fps image transmission in high polygon objects. The results of this paper show the possibility of using virtual studio at low cost which does not need separate physical space.

코로나 방전처리에 의한 폴리에스테르 및 P/C 혼방직물의 복합기능화 가공(II) - 복합 기능화 가공 - (Multi-Functional Finish of Polyester and P/C blend Fabrics by Corona Discharge(II) - Multifunctional finish-)

  • Lee, Bang One;Pak, Pyong Ki;Yeo, Joo Hong;Lee, Hwa Sun
    • 한국염색가공학회지
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    • 제9권3호
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    • pp.1-9
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    • 1997
  • Plasma techniques permit modification of the surface layers of the substrate while maintaining its bulk properties. The use of plasma treatment on textile fibers and fabrics is very limited, however, the limitations, plasma treatments have been used to modify surface properties of textiles. In this study, multifunctional finish was performed by corona discharge technique for surface functionalization. Electron spectroscopy for chemical analysis(ESCA) was used to determine the ratios of carbon, oxygen, nitrogen, and phosphor at a 20$\AA$ sampling depth. K/S value and limiting oxygen index(LOI) value were used to obtain information on the effect of the finished fabrics. The mechanism of the flame retardancy was analyzed by the thermogravimetry-and the residue number. In ESCA, relative N1s intensity increased in case of mixtrure. The flame retardancy of the polyester and polyester/cotton fabrics treated with JA-6034 and JA-6050 was found to be operative mainly in the condensed phase mechanism. The multifunctional finish was better effect for the post treated finish agent.

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Effect of Platelet-rich Plasma (PRP) on Regeneration of Rat Sciatic Nerve in a Silicone Chamber

  • Minn, Kyung-Won;Jeong, Eui-Cheol;Chang, Hak;Kwon, Sung-Tack;Kim, Suk-Wha;Baek, Rong-Min
    • Archives of Plastic Surgery
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    • 제37권2호
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    • pp.105-109
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    • 2010
  • Purpose: The purpose of this study is to determine the effect of platelet-rich plasma (PRP) on rat sciatic nerve regeneration in a 10 mm silicone chamber. Methods: A total of 6 inbred Lewis rats were used in this study. Bilateral sciatic neurectomy was performed on each rat. On one side, silicone chambers containing PRP solutions were implanted; on the contralateral side, the chambers without PRP were implanted as a control. In 12 weeks post-implantation, chambers were retrieved and both gastrocnemius muscles were excised. Nerves biopsy samples were examined under a light microscope after Masson trichrome staining. Results: Cross sections of the midpoints of PRP treated nerves were significantly larger and appeared more mature than those of controls. Conclusion: Based on morphological evidence, PRP has a positive effect on neural regeneration, and it may therefore be useful for treating peripheral nerve injuries.

Porcine Blood Plasma Transgluataminase Combined with Thrombin and Fibrinogen as a Binder in Restructured Meat

  • Tseng, Tsai-Fuh;Tsai, Chong-Ming;Yang, Jeng-Huh;Chen, Ming-Tsao
    • Asian-Australasian Journal of Animal Sciences
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    • 제19권7호
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    • pp.1054-1058
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    • 2006
  • The purpose of this study was to use pig blood plasma transglutaminase (TGase) combined with thrombin and fibrinogen as a binder, which was applied to restructured meat, and to investigate its effect on the restructured meat quality. Pig meat was obtained 10 h post mortem from a traditional market was ground using a 10 mm aperture plate. A binder admixture was added (TGase:thrombin:fibrinogen mixed as 0.5:1:20 (v/v/v) to which was added 12% of its volume of 0.25 M calcium chloride) at 0, 5, 10, 15 and 20% of meat weight. Measurements included cooking loss, shrinkage rate, shear value, total plate count, pH value, TBA value, color difference, tension strength and sensory evaluation. The results showed that ground meat containing 20% w/w of binder admixture had higher cooking loss, shrinkage rate and shear value (p<0.05). Addition of different percentages of binder admixture did not affect total plate count, pH value, TBA value, and sensory evaluation of restructured meat (p>0.05). Tension strength was increased with increased level of binder admixture. Addition up to 15% binder admixture to restructured meat showed better scores of sensory texture, flavor and total acceptability (p<0.05).