Thermal Stability of TiN/Ti Barrier Metals with Al Overlayers and Si Substrates Modified under Different Annealing Histories (형성조건에 따른 TiN/Ti Barrier Metal의 Al 및 Si 과의 열적 안정성)
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- Journal of the Korean Institute of Telematics and Electronics A
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- v.30A no.7
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- pp.47-59
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- 1993