• 한국세라믹학회지
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• 제53권5호
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• pp.548-556
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• 2016

Recently, porous alumina-based ceramics have been extensively applied in the semi-conductor and display industries, because of their high mechanical strength, high chemical resistance, and high thermal resistance. However, the high electrical resistance of alumina-based ceramics has a negative effect in many applications due to the generation of static electricity. The low electrical resistance and high air permeability are key aspects in using porous alumina-based ceramics as vacuum chucks in the semi-conductor industry. In this study, we tailored the pore structure of porous alumina-based ceramics by adjusting the mixing ratio of the starting alumina, which has different particle sizes. And the electrical resistance was controlled by using chemical additives. The characteristics of the specimens were studied using scanning electron microscopy, mercury porosimetry, capillary flow porosimetry, a universal testing machine, X-ray diffraction, and a high-resistance meter.

• 한국세라믹학회지
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• 제52권6호
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• pp.403-409
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• 2015

Porous alumina ceramics are involved in many industrial applications due to the exceptional properties of these products. This study addresses the preparation of porous alumina ceramics using hollow microspheres as a pore-forming agent and slip casting as a green-body-forming technique. A uniform distribution of pores is a basic requirement of a porous material. This study investigates three different slurry systems, i.e., as-prepared alumina slurry, alumina slurry electrostatically dispersed by hydrochloric acid (HCl), and slurry dispersed by the commercial dispersant 'Darvan C-N'. At a low viscosity, the hollow microspheres in the slurry tend to float, which causes a non-uniform pore distribution. To avoid this phenomenon, the viscosity of the slurry was increased to the extent that the movement of hollow microspheres ceased in the slurry. As a result, a uniform pore distribution was achieved.

• 한국세라믹학회지
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• 제54권4호
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• pp.331-339
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• 2017

Porous alumina-based ceramics are of special interest due to their outstanding mechanical properties and their thermal and chemical stability. Nevertheless, the high electrical resistance of alumina-based ceramics, due to the generation of static electricity, leads to difficulty in applying a vacuum chuck in the semi-conductor process. Therefore, development of alumina-based ceramics for applications with vacuum chucks aims to have primary properties of low electrical resistance and high air permeability. In this study, we tailored the electrical resistance of porous alumina-based ceramics by adjusting the amount of $MnO_2$ (with $TiO_2$ fixed at an amount of 2 wt%) and by using coarse alumina powder for high air permeability. The characteristics of the specimens were studied using scanning electron microscopy, mercury porosimeter, capillary flow porosimetry, universal testing machine, X-ray diffraction and high-resistance meter.

• 한국세라믹학회지
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• 제47권6호
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• pp.529-533
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• 2010

Porous frit-bonded alumina ceramics were fabricated using alumina and frit as raw materials. The effects of frit content and sintering temperature on microstructure, porosity, and flexural strength were investigated at low temperature of $750{\sim}850^{\circ}C$. Increased addition of frit content or higher sintering temperature resulted in improved flexural strength of porous frit-bonded alumina ceramics. It was possible to produce frit-bonded alumina ceramics with porosities ranging from 35% to 40%. A maximum strength of 52MPa was obtained at a porosity of ~38% when 90 wt% alumina and 10 wt% frit powders were used.

• 한국세라믹학회지
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• 제33권5호
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• pp.547-555
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• 1996

Porous alumina ceramics were fabricated by pseudo-boehmite phydosol-gel process within/without commercial $\alpha$-alumina particles average 1 and 40 micron respectively. The pore characteristics of fired specimens were studied by the measurement of bulk density total porosity thyermal analysis pore volume pore distribution BET area XRD and SEM. with increasing of firing temperature pore volume and BET surface area were decreased and the average pore size was increased to approximately 146$\AA$ upto 80$0^{\circ}C$ by de-watering of [OH] and formation of $\alpha$-alumina. The fired relative density of the alumina-dispersed specimen with average 1 micron particle was increased with the amounts of dispersed particle by bimodal packing theory which is compared to the ones of specimen including of average 40 micron particle. It was confirmed that the percola-tion threshold in porous ceramics with coarser particle (40 micron) has formed between the transformed-alumina from hydrogel and dispersed-alumina of above 50 vol% particle and the total porosity was increased at the threshold point above.

• 한국세라믹학회지
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• 제41권1호
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• pp.19-23
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• 2004

The Hertzian indentation contact damage behavior of porous alumina with controlled pore shape was investigated by experiments. Porous alumina ceramics containing well-defined pore shape, size and distribution were prepared by incorporation of fugitive spherical starch. Porous alumina with isolated pore structure was prepared with porosity range up to 30%. The indentation stress-strain curves of porous alumina were constructed. Elastic modulus and yield stress can be obtained from the stress-strain relationship. Impulse excitation method for the measurement of elastic modulus was also conducted as well as Hertzian indentation and was confirmed as a useful tool to evaluate the elasticity of highly porous ceramics. Elastic modulus of the inter-connected pore structure is more sensitive to porosity than that of the isolated pore structure. When the specimen had isolated pore structure, higher yield point was obtained than it had inter-connected pore structure. This study proposed that the elastic modiulus of porous ceramics is strongly related to not only porosity, but also the structure of pore.

• 한국생산제조학회지
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• 제24권4호
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• pp.368-373
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• 2015

Porous alumina ceramics with two different pore sizes were fabricated using hollow microspheres as the pore-forming agent. The relative density, total porosity, and microstructure of the obtained alumina ceramics were studied. It was found that the total porosity of sintered samples with different amounts of hollow microsphere content, from 2.0 to 4.0 wt%, was 69.3-75.6%. The interconnected and spherical cell morphology was obtained with 3.0 wt% hollow microsphere content. The resulting ceramics consist of a hierarchical structure with large-sized cells, and small-sized pores in the cell walls. Moreover, the compressive strength of the sintered samples varied from 8.3-11.5 MPa, corresponding to hollow microsphere contents of 2.0-4.0 wt%.

• 한국기계가공학회지
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• 제11권1호
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• pp.62-67
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• 2012

Recently UV laser is widely used to process micro parts using various materials such as polymers, metals and ceramics because it has a very high intensity at the focused spot area. It is generally known that there are still some difficulties for alumina($Al_2O_3$) ceramics to directly make micro patterns like holes and lines on the surface of working material using 355nm UV laser because the alumina has a very low absorption coefficient at that wavelength. But nowadays new alumna with nano-porous holes is developed and applied to advanced micro functional parts of IT, BT and BT industries. In this paper, we are going to show the mechanism of photo-thermal ablation for nano-porous ceramics. Inside hole there is a lot of multiple reflections along the depth of hole. Experimentally we can find the micro hole drilling and micro grooving on the surface of nano-porous alumina.

• 한국세라믹학회지
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• 제36권6호
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• pp.662-670
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• 1999

Porous alumina was fabricated from pressureless powder packing forming method using powders granulated by spray drying. It was investigated the pore size distribution of fabricated porous alumina. The results of microstructural observation showed that intraganular pore size and intragranular pore size. At 1700$^{\circ}C$ there were no intragranular pores but it showed homogeneous distribution of intergranular pore size. The bending strength and shrinkage increased as porosity decreased. In case of thermal shock resistance sudden decrease of bending strength to $\Delta$T was not shown because intergranular large pore prevented sudden crack propagation.

• 한국세라믹학회지
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• 제32권1호
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• pp.113-119
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• 1995

The green body was fabricated by a new forming method, pressureless powder packaing forming method, and the characteristics of sintered specimen were investigated. It was found that alumina ceramics prepared by the present method showed porous structure with narrow pore size distribution, and in case of abrasive powder sintered body, compared with dry-pressed specimen, had the nearly same density. Especially, the specimen prepared with spray-dried granules showed the characteristic that granules were not either deformed or fractured during forming and sintering process. Therefore, it was found that this new forming method was effective method in fabrication of porous ceramics on account of easy control of porosity and pore size and its high thermal stability.