• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.319-320
• /
• 2012

Large aperture optical modulator called optical shutter is a key component to realize time-of-flight (TOF) based three dimensional (3D) imaging systems [1-2]. The transmission type electro-absorption modulator (EAM) is a prime candidate for 3D imaging systems due to its advantages such as small size, high modulation performance [3], and ease of forming two dimensional (2D) array over large area [4]. In order to use the EAM for 3D imaging systems, it is crucial to remove GaAs substrate over large area so as to obtain high uniformity modulation performance at 850 nm. In this study, we propose and experimentally demonstrate techniques for backside etching of GaAs substrate over a large area having high uniformity. Various methods such as lapping and polishing, dry etching for anisotropic etching, and wet etching ([20%] C6H8O7 : H2O2 = 5:1) for high selectivity backside etching [5] are employed. A high transmittance of 80% over the large aperture area ($5{\times}5mm^2$) can be obtained with good uniformity through optimized backside etching method. These results reveal that the proposed methods for backside etching can etch the substrate over a large area with high uniformity, and the EAM fabricated by using backside etching method is an excellent candidate as optical shutter for 3D imaging systems.

• Journal of Biosystems Engineering
• /
• v.33 no.5
• /
• pp.362-369
• /
• 2008

There is developing interest in precision agriculture in Korea, despite the fact that typical Korean fields are less than 1 ha in size. Describing within-field variability in typical Korean production settings is a fundamental first step toward determining the size of management zones and the inter-relationships between limiting factors, for establishment of site-specific management strategies. Measurements of rice (Oriza Sativa L) yield, chlorophyll content, and soil properties were obtained in a small (100-m by 30-m) Korean rice paddy field. Yield data were manually collected on 10-m by 5-m grids (180 samples with 3 samples in each of 60 grid cells) and chlorophyll content was measured using a Minolta SPAD 502 in 2-m by 2-m grids. Soil samples were collected at 275 points to compare results from sampling at different scales. Ten soil properties important for rice production in Korea were determined through laboratory analyses. Variogram analysis and point kriging with and without median polishing were conducted to determine the variability of the measured parameters. Influence of variogram model selection and other parameters on the interpretation of the data was investigated. For many of the data, maximum values were greater than double the minimum values, indicating considerable spatial variability in the small paddy field, and large-scale spatial trends were present. When variograms were fit to the original data, the limits of spatial dependency for rice yield and SP AD reading were 11.5 m and 6.5 m, respectively, and after detrending the limits were reduced to 7.4 m and 3.9 m. The range of spatial dependency for soil properties was variable, with several having ranges as short as 2 m and others having ranges greater than 30 m. Kriged maps of the variables clearly showed the presence of both large-scale (trend) variability and small-scale variability in this small field where it would be reasonable to expect uniformity. These findings indicate the potential for applying the principles and technology of precision agriculture for Korean paddy fields. Additional research is needed to confirm the results with data from other fields and crops.d similar tendency with the result for the frequency less than 20 Hz, but the width of change was reduced highly.

• Magazine of the Korean Society of Agricultural Engineers
• /
• v.45 no.6
• /
• pp.194-206
• /
• 2003

A pilot study was performed to examine the feasibility of the pond system for further polishing of treatment wetland effluent to agricultural reuse of reclaimed water. The constructed wetland and pond system was installed in Konkuk University and the effluent from septic tank of school building was used as an influent to the wetland system. The effluent of the wetland was used as an influent to pond systems. The influent concentrations of total coliform(TC), fecal coliform (FC), and E. coli were about $10^5$MPN/100 ml, and they were reduced to less than 10,000 MPN/100 ml on average after wetland treatments, showing over 95 % removal. And they were further reduced to less than 1,000 MPN/100 ml in average, showing over 85∼93 % removal after pond treatment. Turbidity and SS were improved effectively on average and their pond effluent concentration was about 4.5 NTU and 9.8 mg/L in average, respectively Average $BOD^5$ concentrations were also reduced substantially to 9.3 mg/L with about 83 % removal rate after wetland and pond treatment systems. Nutrients removal was relatively low and removal rate for T-N and T-P was less than 43 and 44%, respectively after wetland and pond treatment. Considering stable performance and effective removal of bacterial indicators as well as other water quality parameters, low maintenance, and cost-effectiveness, pond system was thought to be an effective and feasible alternative for agricultural reuse of reclaimed water. This paper describes a preliminary result Iron pilot study and further investigations are recommended on the optimum design parameters before full scale application.

• Journal of Periodontal and Implant Science
• /
• v.51 no.5
• /
• pp.298-315
• /
• 2021

Purpose: Peri-implantitis therapy and implant maintenance are fundamental practices to enhance the longevity of zirconia implants. However, the use of physical decontamination methods, including hand instruments, polishing devices, ultrasonic scalers, and laser systems, might damage the implant surfaces. The aim of this systematic review was to evaluate the effects of physical decontamination methods on zirconia implant surfaces. Methods: A systematic search was conducted using 5 electronic databases: Ovid MEDLINE, PubMed, Scopus, Web of Science, and Cochrane. Hand searching of the OpenGrey database, reference lists, and 6 selected dental journals was also performed to identify relevant studies satisfying the eligibility criteria. Results: Overall, 1049 unique studies were identified, of which 11 studies were deemed suitable for final review. Air-abrasive devices with glycine powder, prophylaxis cups, and ultrasonic scalers with non-metal tips were found to cause minimal to no damage to implantgrade zirconia surfaces. However, hand instruments and ultrasonic scalers with metal tips have the potential to cause major damage to zirconia surfaces. In terms of laser systems, diode lasers appear to be the most promising, as no surface alterations were reported following their use. Conclusion: Air-abrasive devices and prophylaxis cups are safe for zirconia implant decontamination due to preservation of the implant surface integrity. In contrast, hand instruments and ultrasonic scalers with metal tips should be used with caution. Recommendations for the use of laser systems could not be fully established due to significant heterogeneity among included studies, but diode lasers may be the best-suited system. Further research-specifically, randomised controlled trials-would further confirm the effects of physical decontamination methods in a clinical setting.

• Journal of the Optical Society of Korea
• /
• v.14 no.4
• /
• pp.326-332
• /
• 2010

We review the research on specialty fiber couplers with emphasis placed on the characteristics that make them attractive for biomedical imaging, optical communications, and sensing applications. The fabrication of fiber couplers has been carried out with, in addition to conventional single mode fiber, various specialty fibers such as photonic crystal fiber, double clad fiber, and hole-assisted fiber with a Ge-doped core. For the fiber coupler fabrication, the side polishing and the fused biconical tapered methods have been developed. These specialty fiber couplers have been applied to optical coherence tomography, fluorescence spectroscopy, fiber sensors, and optical communication systems. This review aims to provide a detailed statement on the recent progress and novel applications of specialty fiber couplers.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.4 s.181
• /
• pp.99-108
• /
• 2006

Since mold industries are regarded as belonging to three types of bad business, capable young people are reluctant to work in this field. The industries are hard to employ skilled workers who have much experience and knowledge On the mold manufacturing. Thus, effective CAM systems are required for unskilled workers to create process plans and NC data for the manufacturing, and process plans play important roles in the downstream manufacturing processes, such as NC machining, polishing, and final assembly. This study proposes a decision support system that facilitates unskilled workers to easily select high quality NC-data, as well as to increase productivity. The proposed system is assumed to follow a CAM operation scenario that consists of next three steps: 1) identifying several process plans and enumerating feasible unit machining operations (UMOs) from material and part surface information, 2) creating all feasible NC-data based on UMOs using a commercial CAM system, 3) selecting the best NC data among the feasible NC data using four screening criteria, such as machining accuracy, machining allowance, cutting load, and processing time. A case study on the machining of a camera core mold is provided to demonstrate the proposed system.

• Transactions on Electrical and Electronic Materials
• /
• v.7 no.4
• /
• pp.157-162
• /
• 2006

Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.

• Transactions of Materials Processing
• /
• v.33 no.2
• /
• pp.118-122
• /
• 2024

Micro-electromechanical systems (MEMS) based in-situ heating holders have been developed to enable high resolution imaging of heat treatment analysis. However, unlike the standard 3 mm metal disk specimens used in the furnace-based heating holder and general transmission electron microscopy holder, the MEMS-based in-situ heating holder requires thin specimens that can be penetrated by electrons to be transferred onto the MEMS chip. Previously, focused ion beam milling was used to transfer metal specimens, but it has the disadvantage of being expensive and the risk of specimen damage due to gallium ions. Therefore, in this study, we devised a method of transferring metallic materials by ultrasonic treatment using a transmission electron microscopy specimen made by electro jet polishing. A 3mm electropolished metal disk was placed in an appropriate solution, ultrasonicated, and then drop casted. The transfer of the specimen was successful, but it was confirmed that dislocations were formed inside the specimen due to ultrasonic treatment. This study provides a novel method for transferring metallic materials onto MEMS chips, which is cost-effective and less gallium ion damaging to the specimen. The results of this study can be used to improve the efficiency of heat treatment analysis using MEMS-based in-situ heating holders.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.54 no.5
• /
• pp.227-231
• /
• 2005

We have developed a microsystem with a capillary electrophoresis (CE) and an electrochemical detector (ECD). The microfabricated CE-ECD systems are adequate for a disposable type and the characteristics are optimized for an application to the electrochemical detection. The system was realized with polydimethylsiloxane (PDMS)-glass chip and indium tin oxide electrode. The injection and separation channels (80 um wide$\ast$40 um deep) were produced by moulding a PDMS against a microfabricated master with relatively simple and inexpensive methods. A CE-ECD systems were fabricated on the same substrate with the same fabrication procedure. The surface of PDMS layer and ITO-coated glass layer was treated with UV-Ozone to improve bonding strength and to enhance the effect of electroosmotic flow. For comparing the performance of the ITO electrodes with the gold electrodes, gold electrode microchip was fabricated with the same dimension. The running buffer was prepared by 10 mM 2-(N-morpholino)ethanesulfonic acid (MES) titrated to PH 6.5 using 0.1 N NaOH. We measured olectropherograms for the testing analytes consisted of catechol and dopamine with the different concentrations of 1 mM and 0.1 mM, respectively. The measured current peaks of dopamine and catechol are proportional to their concentrations. For comparing the performance of the ITO electrodes with the gold electrodes, electropherograms was measured for CE-ECD device with gold electrodes under the same conditions. Except for the base current level, the performances including sensitivity, stability, and resolution of CE-ECD microchip with ITO electrode are almost the same compared with gold electrode CE-ECD device. The disposable CE/ECD system showed similar results with the previously reported expensive system in the limit of detection and peak skew. When we are using disposable microchips, it is possible to avoid polishing electrode and reconditioning.

• The Journal of Korean Academy of Prosthodontics
• /
• v.37 no.1
• /
• pp.51-70
• /
• 1999

Dental porcelain is one of the materials of choice for restoration where esthetics is of concern, but has a considerable potentials of wear. The wear of enamel is variable when opposed by different porcelain systems and surface conditions, and the exposed dentine and opaque porcelain due to clinical failure is expected to have high potentials of wear. The purpose of this study was to investigate the wear effects of self-glazed, polished incisal porcelain. polished dentine and opaque porcelain against human enamel in the laboratory by use of a pin-on-disk type wear tester. 4 types of dental porcelain($Vita-{\Omega}$, Ceramco-II, Vintage powder $Vita-{\alpha}$ of In-Ceram system) and type IV gold alloy as cotrol group were used for test specimens. Intact buccal cusps of maxillary premolar were used for enamel specimens, and the cusp converged to a point and was devoid of visible abrasion, caries, decalcification. The upper part was the cusp of a maxillary premolar and the lower part was a porcelain specimen. The enamel wear was deter-mined by weighing the cusp before and after each test. Surface profilometer was used to quantitate wear of the porcelain specimens. Vicker's hardness tester was used to evaluate the surface hardness of test specimens. The SEM was used to evaluate the wear surfaces. The results were as follows : 1 Self-glazed porcelain produced more enamel wear than polished porcelain, especially the enamel wear of $Vita-{\alpha}$ self-glazed porcelain was 3.2 times more than that of other groups. 2. Opaque porcelain produced least porcelain wear, $Vita-{\alpha}$ self-glazed porcelain produce greatest porcelain wear, but there was no statistically significant difference between the groups(p>0.05). 3. The enamel wear of dentine porcelain was 3.8 times more than that of polished inisal porcelain(p<0.05), and the enamel wear of opaque porcelain was 1.9 times more than that of polished inisal porcelain, but there was no statistically significant difference between the groups(p>0.05) 4. Overglazed porcelain produced less enamel wear than self-glazed porcelain, and more enamel wear than polished porcelain, but there was no statistically significant difference between the groups(P>0.05). 5. The hardness number of $Vita-{\Omega}$ dentine and Ceramco-II opaque porcelain was larger, but that of Vintage dentine and $Vita-{\alpha}$ self-glazed porcelain was similar to other groups. 6. Examination of SEM photographs revealed that overglazed porcelain had smoother surface than self-glazed porcelain, and self-glazed porcelain had smoother surface than polished porcelain. Much polishing scratches and larger porosities were observed on the opaque porcelain specimen, and much polishing scratchess and small porosities were observed on the dentine porcelain specimen.