• 공업화학
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• 제34권5호
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• pp.493-500
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• 2023

본 연구에서는 스크린 프린팅 공정을 통해 탄소 잉크 기반의 2상 전극을 제작하고, 전극 표면에 이리듐 산화물(IrO_x)을 코팅함으로써 전극의 분극 현상을 제어할 수 있는 임피던스 센서를 개발하였다. IrO_x는 순환 전압 전류법으로 탄소 전극의 표면 위에 순환 수(0~50 cycles)에 따라서 코팅되었다. 전자주사현미경을 이용하여 cycle 수가 증가할수록 IrO_x 입자의 크기와 수가 증가하는 경향성을 확인하였다. 전기화학 임피던스 분석을 이용하여 상기 제조된 센서들의 NaCl 농도에 따른 임피던스 변화 값을 조사하였다. 50 cycle에서 제조된 센서가 가장 우수한 결정계수와 재현성을 나타내었으며, 이는 분극 현상이 잘 제어되었기 때문이다. 실제 용액 샘플들을 이용한 삼투압 장비와 비교 측정 실험을 수행함으로써 IrO_x 기반 센서의 안구건조증 진단 센서로의 활용가치를 증명하였다.

• 마이크로전자및패키징학회지
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• 제19권1호
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• pp.61-66
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• 2012

반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 화학적-기계적 연마(CMP: Chemical-Mechanical Planarization) 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 화학적-기계적 연마 공정의 중요성은 더욱 강조되고 있다. 화학적-기계적 연마공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 화학적-기계적 연마 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리(Slurry), 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. 패드 컨디셔닝이란 컨디셔너가 화학적-기계적 연마 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 화학적-기계적 연마 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 스크래치(Scratch) 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 유기박막을 표면에 증착하여 부식을 방지하고자 하였다. 컨디셔너 제작에 사용되는 금속인 니켈과 니켈 합금을 기판으로 하고, 증착된 유기박막으로는 자기조립단분자막(SAM: Self-Assembled Monolayer)과 불화탄소(FC: FluoroCarbon) 박막을 증착하였다. 자기조립단분자막은 2가지 전구체(Perfluoroctyltrichloro silane(FOTS), Dodecanethiol(DT))를 사용하여 기상 자기조립 단분자막 증착(Vapor SAM) 방법으로 증착하였고, 불화탄소막은 10 nm, 50 nm, 100 nm 두께로 PE-CVD(Plasma Enhanced-Chemical Vapor Deposition, SRN-504, Sorona, Korea) 방법으로 증착하여 표면의 부식특성을 평가하였다. 표면 부식 특성은 동전위분극법(Potentiodynamic Polarization)과 전기화학적 임피던스 측정법(Electrochemical Impedance Spectroscopy(EIS)) 등의 전기화학 분석법을 사용하여 평가되었다. 또한 측정된 임피던스 데이터를 전기적 등가회로(Electrical Equivalent Circuit) 모델에 적용하여 부식 방지 효율을 계산하였다. 동전위분극법과 EIS의 결과 분석으로부터 유기박막이 증착된 표면의 부식전류밀도가 감소하고, 임피던스가 증가하는 것을 확인하였다.

• Korean Chemical Engineering Research
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• 제49권2호
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• pp.181-186
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• 2011

본 연구에서는 실리카 나노 입자의 표면 개질을 위해 실란 커플링제인 3-(trimethoxysilyl)propylmethacrylate(MPS) 를 사용하여 표면 개질 반응을 수행하였다. 용매의 pH, MPS의 가수 분해 반응시간, 표면 개질 반응시간 및 실리카 표면의 실라놀기(Si-OH)에 대한 MPS의 몰 비를 변화하여 각각의 반응조건이 실리카 표면개질 반응에 미치는 영향을 연구하였다. 개질반응 후 Fourier Transform Infrared Spectroscopy(FTIR), 원소분석(EA) 및 고체 상태 cross-polarization magic angle spinning(CP/MAS) Nuclear Magnetic Resonance Spectroscopy(NMR)법을 사용하여 표면이 개질된 실리카 입자들의 분석을 수행하였다. 연구 결과 용매의 pH가 4.5일 때 MPS가 단량체 형태로 실리카 표면의 실라놀기와 반응하고 이외의 pH에서는 MPS가 이량체, 삼량체 혹은 사량체의 올리고머 형태로 실리카의 실라놀기와 반응함이 우세함을 나타내었다. 가수분해반응 시간을 30분에서 90분으로 증가시키면 MPS가 올리고머 형태로 실리카 표면의 실라놀기와 반응하는 것이 우세하고, 투입한 MPS 몰 비의 증가도 MPS가 올리고머 형태로 실리카 표면의 실라놀기와 반응하는 것이 우세함을 나타내었다.

• Corrosion Science and Technology
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• 제12권1호
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• pp.40-49
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• 2013

Effects of magnesium and pH on corrosion of aluminum galvanically coupled to iron have studied by using potentio- dynamic and static tests for polarization curves, Mott-Schottky test for analysis of semiconductor property, and GD-AES and XPS for film analysis. Pitting potential was sensitive to magnesium as an alloying element but not to pH, while passive current was sensitive to pH but not to magnesium. It was explained with, instead of point defect model (PDM), surface charge model describing that the ingression of chloride depends on the state of surface charge and passive film at film/solution interface is affected by pH. In addition, galvanic current of aluminum electrically coupled to iron was not affected by magnesium in pH 8.4, 0.2M citrate solution but was increased by magnesium at the solution of pH 9.1. The galvanic current at pH 9.1 increased with time at the initial stage and after the exposure of about 200 minute, decreased and stabilized. The behavior of the galvanic current was related with the concentration of magnesium at the surface. It agreed with the depletion of magnesium at the oxide surface by using glow discharge atomic emission spectroscopy (GD-AES). In addition, pitting potential of pure aluminum was reduced in neutral pH solution where chloride ion maybe are competitively adsorbed on pure aluminum. It was confirmed by the exponential decrease of pitting potential with log of [$Cl^-$] around 0.025 M of [$Cl^-$] and linear decrease of the pitting potential. From the above results, unlike magnesium, alloying elements with higher electron negativity, lowering isoelectric point (ISE), are recommended to be added to improve pitting corrosion resistance of aluminum and its alloys in neutral solutions as well as their galvanic corrosion resistance in weakly basic solutions.

• 한국진공학회지
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• 제6권S1호
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• pp.96-109
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• 1997

In order to simulate the corrosion behavior of Zr-4 alloy in pressurized water reactors it was implanted (or bombarded) with 190ke V $Zr^+\; and \;Ar^+$ ions at liquid nitrogen temperature and room temperature respectively up to a dose of $5times10^{15} \sim 8\times10^{16} \textrm{ions/cm}^2$ The oxidation behavior and electrochemical vehavior were studied on implanted and unimplanted samples. The oxidation kinetics of the experimental samples were measured in pure oxygen at 923K and 133.3Pa. The corrosion parameters were measured by anodic polarization methods using a princeton Applied Research Model 350 corrosion measurement system. Auger Electron Spectroscopy (AES) and X-ray Photoelectric Spectroscopy (XPS) were employed to investigate the distribution and the ion valence of oxygen and zirconium ions inside the oxide films before and after implantation. it was found tat: 1) the $Zr^+$ ion implantation (or bombardment) enhanced the oxidation of Zircaloy-4 and resulted in that the oxidation weight gain of the samples at a dose of $8times10^{16}\textrm{ions/cm}^2$ was 4 times greater than that of the unimplantation ones;2) the valence of zirconium ion in the oxide films was classified as $Zr^0,Zr^+,Zr^{2+},Zr^{3+}\; and \;Zr^{4+}$ and the higher vlence of zirconium ion increased after the bombardment ; 3) the anodic passivation current density is about 2 ~ 3 times that of the unimplanted samples; 4) the implantation damage function of the effect of ion implantation on corrosion resistance of Zr-4 alloy was established.

• Tribology and Lubricants
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• 제20권6호
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• pp.306-313
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• 2004

Many of the current development in surface modification engineering are focused on multilayered coatings, which have the potential to improve the tribological properties. Four different multilayered coatings were deposited on AISI D2 steel in this study. The prepared samples are designed as $WC-Ti_{0.6}Al_{0.4}N,\;WC-Ti_{0.53}Al_{0.47}N,\;WC-Ti_{0.5}Al_{0.5}N\;and\;WC-Ti_{0.43}Al_{0.57}N$. The multilayered coatings were investigated with respect to coating surface and cross-sectional morphology, roughness, adhesion, hardness, porosity and tribological behaviors. Especially, wear tests of four multilayered coatings were performed by using a ball-on-disc configuration with a linear sliding speed of 0.017 m/sec and a normal load of 5.38 N load. The tests were carried out at room temperature in air by employing AISI 52100 steel ball $(H_R\;=\;66) $ having a diameter of 10 mm. The surface morphology, and topography of the wear scars of samples and balls have been determined by using scanning electron spectroscopy (SEM). Also, wear mechanism was determined by using SEM coupled with energy-dispersive spectroscopy (EDS). Results have showed an improved wear resistance of the $WC-Ti_{1-x}Al_xN$coatings with increasing of Al (aluminum) concentration.

• Corrosion Science and Technology
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• 제19권2호
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• pp.82-88
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• 2020

This work examined the corrosion protection performance of benzoate loaded hydrotalcite/graphene oxide (HT/GO-BZ) for carbon steel. HT/GO-BZ was fabricated by the co-precipitation method and characterized by infrared spectroscopy, X-ray diffraction, and scanning electronic microscopy. The corrosion inhibition action of HT/GO-BZ on carbon steel in 0.1 M NaCl solution was evaluated by electrochemical measurements. The benzoate content in HT/GO-BZ was determined by UV-Vis spectroscopy. Subsequently, the effect of HT/GO-BZ on the corrosion resistance of the water-based epoxy coating was investigated by the salt spray test. The obtained results demonstrated the intercalation of benzoate and GO in the hydrotalcite structure. The benzoate content in HT/GO-BZ was about 16%. The polarization curves of the carbon steel electrode revealed anodic corrosion inhibition activity of HT/GO-BZ and the inhibition efficiency was about 95.2% at a concentration of 3g/L. The GO present in HT/GO-BZ enhanced the inhibition effect of HT-BZ. The presence of HT/GO-BZ improved the corrosion resistance of the waterborne epoxy coating.

• 대한화학회지
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• 제59권2호
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• pp.142-147
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• 2015

Two new chitosan derivatives, polyamine grafted chitosan copolymers have been synthesized for corrosion protection of carbon steel in acidic medium. First, methyl acrylate graft chitosan copolymer (CS-MAA) was prepared by the reaction of chitosan (CS) and methyl acrylate (MAA) via the Michael addition reaction. Then, CS-MAA was reacted with ethylene diamine (EN) and triethylene tetramine (TN) respectively to synthesize ethylene diamine grafted chitosan copolymer (CS-MAA-EN) and triethylene tetramine grafted chitosan copolymer (CS-MAA-TN), and the structures were characterized by Fourier-transform infrared spectroscopy (FT-IR). At last, the corrosion inhibition activities on Q235 carbon steel were investigated by using gravimetric measurements, metallographic microscope, potentiodynamic polarization and electrochemical impedance spectroscopy (EIS) measurements. The compounds CS-MAA-EN and CS-MAA-TN show an appreciable corrosion inhibition property against corrosion of Q235 carbon steel in 5% HCl solution at $25^{\circ}C$. It has been observed that CS-MAA-EN shows greater corrosion inhibition efficiency than CS-MAA-TN. The inhibition efficiency of CS-MAA-EN was close to 90% when the mass fraction concentration was 0.2%~0.3%; the inhibition efficiency of CS-MAA-TN was close to 85% when the mass fraction concentration was 0.02%. The present work provided very promising results in the preparation of green corrosion inhibitors.

• Corrosion Science and Technology
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• 제9권2호
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• pp.92-97
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• 2010

Many kinds of alternative fuels such as biodiesel, ethanol, methanol, and natural gas have been developed in order to overcome the limited deposits in fossil fuels. In some cases, the alternative fuels have been reported to cause degrade materials. The corrosion rates of metals were measured by immersion test, a kind of time consuming test because low conductivity of these fuels was not allowed to employ electrochemical tests. With twin two-electrode cell newly designed for the study, however, electrochemical impedance spectroscopy (EIS) test was successfully applied to evaluation of the corrosion resistance ($R_p$) of zinc, iron, aluminum, and its alloys in an oxidized biodiesel and gasoline/ethanol solutions and the corrosion resistance from EIS was compared with the corrosion rate from immersion test. In biodiesel, $R_p$ increased in the order of zinc, iron, and aluminum, which agreed with the corrosion resistance measured from immersion test. In addition, on aluminum showing the best corrosion resistance ($R_p$), the effect of magnesium as an alloying element was evaluated in gasoline/ethanol solutions as well as the oxidized biodiesel. $R_p$ increased with addition of magnesium in gasoline/ethanol solutions containing chloride and the oxidized biodiesel. In the mean while, in gasoline/ethanol solutions containing formic acid, Al-Mg alloy added 1% magnesium had the highest $R_p$ and the further addition of magnesium decreased $R_p$. It can be explained with the fact that the addition of more than 1% magnesium increases the passive current density of Al-Mg alloys.

• Journal of the Optical Society of Korea
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• 제13권1호
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• pp.60-64
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• 2009

We attempted the first measurement of the spectral width of the nickel-like molybdenum x-ray laser (${\lambda}\;=\;18.895\;nm$) by use of a high-resolution spectrometer in order to determine the strength of the magnetic field required for the generation of a circularly polarized x-ray laser. The spectral width was measured to be ${\Delta}{\lambda}\;=\;18\;m{\AA}$ under the substantial lasing condition. The magnetic field required for the generation of a circularly polarized x-ray laser was 40 T. The splitting of the x-ray laser line was clearly obtained under 15 T external magnetic field. The strength of the magnetic field estimated from the splitting of the x-ray laser line was large compared with the external magnetic field. It implies that there might be an alternative mechanism for enhancement of the magnetic field in the gain medium plasma.