• 제목/요약/키워드: Plasma-atomic emission spectrometer

검색결과 62건 처리시간 0.028초

MgO 증착을 위한 유도결합 플라즈마 마그네트론 스퍼터링에서 실시간 공정 진단 (A Real-Time Diagnostic Study of MgO Thin Film Deposition Process by ICP Magnetron Sputtering Method)

  • 주정훈
    • 한국표면공학회지
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    • 제38권2호
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    • pp.73-78
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    • 2005
  • A real-time monitoring of ICP(inductively coupled plasma) assisted magnetron sputtering of MgO was carried out using a QMS(quadrupole mass spectrometer), an OES(optical emission spectrometer), and a digital oscilloscope with a high voltage probe and a current monitor. At the time of ICP ignition, the most distinct impurity was OH emission (308.9 nm) which was dissociated from water molecules. For reactive deposition oxygen was added to Ar and the OH emission intensity was reduced abruptly When the discharge voltage was regulated by a PID controller from 240V(metallic mode) to 120V(oxide mode), the emission intensity from Mg (285.2 nm) changed proportionally to the discharge voltage, but the intensity of Ar I(811.6 nm) was constant. At 100V of discharge voltage, Mg sputtering was almost stopped. Emissions from Ar I(420.1 nm) and Mg I were dropped down to 1/10, but Ar I(811.6 nm) didn't change. And the emission from atomic oxygen (O I, 777.3 nm) was increased to 10 times. These results are compatible with those from QMS study.

유도 결합 플라스마 원자방출분광기/차폐 시스템의 특성 및 방사성 물질 분석에 대한 적용성 평가 (Characteristic Feature of Inductively Coupled Plasma Atomic Emission Spectrometer/Shielding System and Evaluation of Its Applicability to Analysis of Radioactive Materials)

  • 이창헌;서무열;최계천;박양순;지광용;김원호
    • 분석과학
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    • 제13권4호
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    • pp.474-483
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    • 2000
  • 사용후핵연료에 함유되어 있는 핵분열생성물을 분석하기 위하여 여러 원소를 동시에 분석할 수 있고, 분석감도가 커서 시료의 방사능과 폐기물의 양을 감소시킬 수 있는 유도 결합 플라스마 원자방출분광기/차폐 시스템을 구성하였다. 방사성 물질이 직접 접촉되는 플라스마 들뜸원과 시료용액 도입부를 스테인리스 스틸 재질의 글로브박스 내부에 설치하였으며, 고주파 들뜸전원, 분광기, 검출기 그리고 전기, 전자 및 아르곤 가스 공급 제어장치는 외부에 설치하였다. 분석능과 방사선 안전의 관점에서 시스템의 특성을 검증하였으며, 사용후핵연료 용해용액과 원자력발전소의 일차냉각수를 대상으로 핵분열생성물과 방사성 부식생성물 분석에 대한 적용성을 평가한 결과 $0.01-0.1mgL^{-1}$ 농도범위에서 상대표준편차는 5% 이하였다.

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1.8m 망원경을 이용한 방출선 천체 연구 (EMISSION LINE SPECTROSCOPY WITH THE 1.8M OPTICAL TELESCOPE)

  • 형식;;김강민
    • 천문학논총
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    • 제15권spc1호
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    • pp.61-71
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    • 2000
  • The emission line objects such as planetary nebulae, symbiotics, gaseous nebulae, HII regions, novae, supernovae, SNRs, nearby spiral galaxies, dIrr, dE, and nearby active galactic nuclei, would be goldmines for us to dig with the 1.8m bohyunsan optical (BOAO) telescope. We discussed the importance of strategically important diagnostic lines and atomic constant calculation for a study of Galactic and extragalactic emission objects. The scientific background on a spectrometer development history is briefly presented and spectroscopic research areas other than the emission objects are also summarized.

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직독식 원자방출분광기를 이용한 철강중의 성분원소 분석 (A Direct Reading Atomic Emission Spectrometer for Chemical Analysis in the Iron and Steels)

  • 김영만;정찬이;김선태;최범석
    • 대한화학회지
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    • 제38권11호
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    • pp.800-807
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    • 1994
  • 직독식 원자방출분광기로 철강 재료중의 구성원소를 매트릭스 보정법으로 신속히 분석하는 방법에 대하여 연구하였다. 선형과 비선형법으로 매트릭스 보정계수를 구하였으며 이때 구한 매트릭스 계수는 서로 차이가 있지만 이들의 계수를 이용하여 구한 분석결과는 비교적 잘 일치하였다.

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An Investigation on the Extraction and Quantitation of a Hexavalent Chromium in Acrylonitrile Butadiene Styrene Copolymer (ABS) and Printed Circuit Board (PCB) by Ion Chromatography Coupled with Inductively Coupled Plasma Atomic Emission Spectrometry

  • Nam, Sang-Ho;Kim, Yu-Na
    • Bulletin of the Korean Chemical Society
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    • 제33권6호
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    • pp.1967-1971
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    • 2012
  • A hexavalent chromium (Cr (VI)) is one of the hazardous substances regulated by the RoHS. The determination of Cr (VI) in various polymers and printed circuit board (PCB) has been very important. In this study, the three different analytical methods were investigated for the determination of a hexavalent chromium in Acrylonitrile Butadiene Styrene copolymer (ABS) and PCB. The results by three analytical methods were obtained and compared. An analytical method by UV-Visible spectrometer has been generally used for the determination of Cr (VI) in a sample, but a hexavalent chromium should complex with diphenylcarbazide for the detection in the method. The complexation did make an adverse effect on the quantitative analysis of Cr (VI) in ABS. The analytical method using diphenylcarbazide was also not applicable to printed circuit board (PCB) because PCB contained lots of irons. The irons interfered with the analysis of hexavalent chromium because those also could complex with diphenylcarbazide. In this study, hexavalent chromiums in PCB have been separated by ion chromatography (IC), then directly and selectively detected by inductively coupled plasma atomic emission spectrometry (ICP-AES). The quantity of Cr (VI) in PCB was 0.1 mg/kg.

토양 시료 중 Atomic Absorption Spectrometry (AAS) 및 Inductively Coupled Plasma-Atomic Emission Spectrometry (ICP-AES)를 이용한 총 크롬 분석방법 비교 (Comparison of analytical methods for quantifying total chromium in soil using Atomic Absorption Spectrometer (AAS) and Inductively Coupled Plasma-Atomic Emission Spectrometry (ICP-AES))

  • 이홍길;김지인;변윤주;김현구;윤정기
    • 한국지하수토양환경학회지:지하수토양환경
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    • 제22권6호
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    • pp.22-28
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    • 2017
  • The accuracy of analytical results in response to the use of different additives ($NH_4Cl$, KCl, $LaCl_3$) and oxidant gases was evaluated and compared by using Atomic Absorption Spectrometry (AAS). Identification of spectroscopic interferences and possible improvements in Inductively Coupled Plasma-Atomic Emission Spectrometry (ICP-AES) analysis were also discussed. The average accuracies of total chromium using Certified Reference Materials (CRMs) were found to be 72.1~94.2% in air/acetylene flame condition by AAS, and they were improved to 100.5~110.5% when the oxidants was changed to nitrous oxide rather than adding the additives. The field samples showed similar trends to CRMs, but chromium concentrations were highly variable depending on analytical conditions. The average accuracies using CRMs were estimated to be 89.3~166.1% by ICP-AES, and improved to below 121.7% after eliminating iron interference. Field samples with low chromium and high iron concentration were measured to be > 30% lower in total chromium concentrations by ICP-AES than AAS in nitrous oxide/acetylene flame. Total chromium concentrations in soil could be analyzed with better accuracy under nitrous oxide/acetylene flame by AAS because it was more effective to increase the temperature of the flame than to eliminate the chemical interference for maximizing atomization of chromium. When using ICP-AES, interference substances, total chromium levels, and analytical conditions should be also considered.

유아용 일회용 기저귀의 유해성 평가 (Hazardous Substance Analysis of Disposable Diaper for Infant)

  • 신정화;윤혜온;박미애;안윤경
    • 한국의류학회지
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    • 제28권1호
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    • pp.165-171
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    • 2004
  • The analytical method of toxic heavy metals in disposable diapers was developed. Disposable diapers obtained from Korea, Japan, America and German were determinated and quantified. Sample treatment (Total Digestion) was wet chemical acid digestion for extraction of nine hazardous inorganic elements (Sb, As, Pb, Cd, Cr, Co, Cu, Ni, Hg) in disposable diapers. Inductively Coupled Plasma Mass Spectrometer (ICP-MS) and Inductively Coupled Plasma Atomic Emission Spectrometer (ICP-AES) have been used for analyzing nine hazardous inorganic elements. The results were as follows : The concentration of extractable Sb which was treated for 3 hours with artificial urine and disposable diapers was higher than those of 6 hours and 24 hours. The concentration of extractable Cr was same as Sb. On the other hands, the behavior of Cu and Ni were different from Sb and Cr. Concentrations of extractable Cu and Ni increased as increasing the reaction time between artificial urine and disposable diapers.

Adsorption properties and metal growth aspects on the surface of activated carbon monolith electrochemically deposited with Ag

  • Oh, Won-Chun;Lim, Chang-Sung
    • 한국결정성장학회지
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    • 제14권2호
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    • pp.37-46
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    • 2004
  • The electrochemical adsorption of the Ag ions from aqueous solution on pelletized activated carbon monolith was investigated over wide range of operation time. The adsorption capacities of pelletized activated carbon monolith are associated with their internal porosity and are related properties such as surface area, pore size distribution. The chemical industry generates wastewater that contains toxic matters like heavy metals in small concentrations so that their economic recovery is not feasible. But, the method using activated carbon monolith can be used to withdrawal of heavy metals in waste water. After the electrochemical treatment, the quantitative properties in Ag ion solutions are also examined by pH concentration and studied elemental analysis by ICP-Atomic Emission Spectrometer and Energy Disperse X-ray (EDX) spectra. It is consider that the pH is very important factor at the reason of water pollutant with increasing acidity in industrial field. The result of quantitative analysis using Inductively Coupled Plasma-Atomic Emission Spectrometer of metal after electrochemical reaction in Ag ions solution depending on time are shown that the amount of Ag ions deposited was decreased with growth of Ag particles on the carbon surfaces as increasing electrochemically treated time. And, surface morphologies are investigated by scanning electron microscopy (SEM) to explain the changes in adsorption properties.

원자방출 분광분석을 위한 수평형 유도결합 플라스마의 개발과 납 검출한계 비교 (Development of an Axially Viewed Inductively Coupled Plasma for Atomic Emission Spectrometry and Comparison between the Detection Limits of Lead)

  • 조성일;한명섭;이상화;이종해;우진춘
    • 대한화학회지
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    • 제41권6호
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    • pp.292-298
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    • 1997
  • 유도코일을 5회 감고, 외측 석영관 길이를 일반적인 ICP(Inductively Coupled Plasma) 토오치에서 보다 50 mm 더 길게 제작한 수평형 ICP 방출원을 제작한 후, ICP 방출분광분석기를 구성하였다. 신호대 잡음비 및 바탕선의 세기를 고주파 출력, 시료 유량, 알곤가스 유량 그리고 차단가스 유량변화에 대하여 측정하고 최적조건을 구했다. 이들 조건에서,수직형 플라스마와 비교하여 분광분석학적으로 비슷한 정도의 특징을 가진 바탕선 스펙트럼을 파장범위 200~500 nm에서 얻었다. 납(II), 220.35 nm의 방출선에서 검출한계가 11 ppb로 산출되었으며, 수직형과 비교하여 약 5배 낮은 값을 보였다.

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도시폐기물 소각로에서 발생되는 바닥재중의 금속류 유해특성에 관한 연구 (Hazardous Characteristics of metals in Bottom Ash from Municipal Solid Waste Combustors(MSWC) of Korea)

  • 정다위;김유능;윤영자;김연호
    • 분석과학
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    • 제14권3호
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    • pp.253-258
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    • 2001
  • 본 연구에서는 우리나라 생활폐기물 대형소각시설(200톤/일 이상) 9개소에서 발생되는 소각재중, 바닥재에 대한 금속류의 용출시험 및 함량시험을 수행하여 유해특성과 유해잠재성을 고찰하였다. 용출시험은 우리나라 폐기물공정시험방법에 따라 수행하였으며, 함량시험은 수은(Hg)의 경우 열분해금아말감원자흡광분광기(TDA-AAS)로 측정하고, 납 등 9개 원소는 US-EPASW-846 3050B방법으로 전처리하고 불꽃원자흡광분광기(FAAS) 또는 유도결합플라스마원자발광분광기(ICP-AES)로 측정하였다. 용출시험 결과, 납과 구리가 주 오염물질이었다. 함량시험결과, 철이 가장 높은 농도로 나타났고 농도는 Fe>Zn>Cu>Mn>Pb>Cr>As>Cd>Hg 순으로 나타났으며, 각 소각시설마다 농도순이 평균적으로는 같았다.

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