• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.236-236
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• 2011

Silicon oxynitride (SiON) was deposited for gas barrier film on polyethylene terephthalate (PET) using octamethylycyclodisiloxane (Si4O4C8H24, OMCTS) precursor by plasma enhanced chemical vapor deposition (PECVD) at low temperature. The ion flux and substrate temperature were measured by oscilloscope and thermometer. The chemical bonding structure and barrier property of films were characterized by Fourier transform infrared (FT-IR) spectroscopy and the water vapor transmission rate (WVTR), respectively. The deposition rate of films increases with RF bias and nitrogen dilution due to increase of dissociated precursor and nitrogen ion incident to the substrate. In addition, we confirmed that the increase of nitrogen dilution and RF bias reduced WVTR of films. Because, on the basis of FT-IR analysis, the increase of the nitrogen gas flow rate and RF bias caused the increase of the C=N stretching vibration resulting in the decrease of macro and nano defects.

• Journal of the Korean institute of surface engineering
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• v.45 no.2
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• pp.89-94
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• 2012

A study to replace a high temperature thermal carbonization process with microwave plasma process is carried for PAN fiber as a starting material. Near atmospheric pressure microwave plasma (1 Torr~45 Torr) was used to control to get the fiber temperature up to $1,000^{\circ}C$. Even argon is an inert gas, its plasma state include high internal energy particles; ion (15.76 eV) and metastable (11.52 eV). They are very effective to lower the necessary thermal temperature for carbonization of PAN fiber and the resultant thermal budget. The carbonization process was confirmed by both EDS (energy dispersive spectroscopy) of plasma treated fibers and OES (optical emission spectroscopy) during processing step as a real time monitoring tool. The same trend of decreasing oxygen content was observed in both diagnostic methods.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1997.10a
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• pp.93-99
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• 1997

High Temperature wear behavior of plasma sprayed ZrO$_2$ and MoS$_2$, $Fe_2O_3$ coatings were investigated for high temperature wear resistance applications. The MoS$_2$, $Fe_2O_3$ added powders containing 2.5, 5.0, 7.5, 10.0 mol% of $MoS_2$, $Fe_2O_3$ for plasma spray were made by spray drying method. Wear test were performed at temperature ranges from room temperature to 600$\circ$C. The microstructural change of coatings and the worn. surface were examined by SEM and XRD. In ZrO$_2$ coating, the coefficient of friction and wear amount of room temperature to 400$\circ$C was increased with temperature and decreased with temperature over 400$\circ$C. The coefficient of friction and wear amount of MoS$_2$ added coatings were increased with temperature, but those of $Fe_2O_3$ added coatings had lower coefficient of friction and higher wear resistance than ZrO$_2$ coating.

• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.5
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• pp.246-252
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• 2002

Two-dimensional steady state simulations of planar type radio frequency inductively coupled plasma (RFICP) have been performed. The characteristics of RFICP were investigated in terms of power transfer efficiency, equivalent circuit analysis, spatial distribution of plasma density and electron temperature. Plasma density and electron temperature were determined from the equations of ambipolar diffusion and energy conservation. Joule heating, ionization, excitation and elastic collision loss were included as the source terms of the electron energy equation. The electromagnetic field was calculated from the vector potential formulation of ampere's law. The peak electron temperature decreases from about 4eV to 2eV as pressure increases from 5 mTorr to 100 mTorr. The peak density increases with increasing pressure. Electron temperatures at the center of the chamber are almost independent of input power and electron densities linearly increase with power level. The results agree well with theoretical analysis and experimental results. A single turn, edge feeding antenna configuration shows better density uniformity than a four-turn antenna system at relatively low pressure conditions. The thickness of the dielectric window should be minimized to reduce power loss. The equivalent resistance of the system increases with both power and pressure, which reflects the improvement of power transfer efficiency.

• Korean Journal of Materials Research
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• v.4 no.3
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• pp.280-286
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• 1994

As-grown $YBa_2Cu_3O_{7-x}$ films on MgO(100)substrates were prepated by a reactive co-evaporation method, and effects of activated oxygen plasma on the crystallinity and superconductivity at substrate temperature ranging from $450^{\circ}C$ to $590^{\circ}C$ were investigated. The film deposited under the activated oxygen plasma at the substrate temperature of $590^{\circ}C$ had a single crystal phase. Whereas, when films were deposited under only oxygen gas, they were not in perfect single crystal phase but with slight polycrystalline nature. When the substrate temperature was $590^{\circ}C$, $Tc_{zero}$'s were 83K and 80K for films with and without activated oxygen plasma, respectively. The critical temperature, the crystal structure and the surface morphology of as-grown films were found to be insensitive to the activated oxygen plasma which is introduced during deposition instead of oxygen gas, but the crystalline quality was improved somewhat by the introduction by the introduction of actvated oxygen plasma.

• Korean Journal of Agricultural Science
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• v.45 no.1
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• pp.94-104
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• 2018

Nitrite is an essential additive for cured meat product. Plasma is ionized gas and reactive nitrogen species in plasma can be infused into meat batter and subsequently generate nitrites by reaction with water molecules after plasma treatment. However, the increase of nitrite in meat batter is limited with direct treatment of atmospheric pressure cold plasma because of the increase of meat batter temperature. Therefore, this study investigated the influence of indirect treatment of atmospheric pressure cold plasma on the physicochemical properties of meat batter. Meat batter was indirectly treated with plasma at 1.5 kW for 60 min. The pH of meat batter decreased while the temperature increased with plasma treatment time. The total aerobic bacterial count of meat batter was not affected by plasma treatment. The nitrite content of meat batter was increased to 377.68 mg/kg after 60 min of plasma treatment. The residual nitrite content of cooked meat batter also increased with plasma treatment time. The CIE $a^*$-value of cooked meat batter increased. As plasma treatment time increased, lipid oxidation tended to increase and protein oxidation significantly increased. According to these results, the indirect treatment of atmospheric pressure cold plasma can be used as a new curing method for replacing synthetic nitrite salts.

• Journal of the Korean Society of Propulsion Engineers
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• v.18 no.1
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• pp.26-32
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• 2014

In this study, DC (Direct current) type steam plasma igniter is developed for effective ignition of high-energy density metal aluminum and gas temperature is measured by emission spectrum of OH radical. Because of the ultra-high gas temperature, the DC plasma jet is measured by Boltzmann plot method which is the non-contact optical technique and spectrum comparison-analysis. And both methods were applied to experiment after accurate verification. As a result, we could identify that plasma jet temperature is 2900 K ~ 5800 K in the 30 mm range from the nozzle tip.

• Journal of the Semiconductor & Display Technology
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• v.15 no.4
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• pp.33-35
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• 2016

In this study, a new plasma source was used in the ALD process. Line type plasma sources were analyzed by electric and magnetic field simulation. And the results were compared with plasma density and electron temperature measurement results. As a result, the results of the computer simulation and the diagnosis results of plasma density and electron temperature showed similar tendency. At this time, the plasma uniformity is 95.6 %. $Al_2O_3$ thin film was coated on 6 inch Si-wafer, using this plasma source. The uniformity of the thin film was more than 98% and the thin film growth rate was 0.13 nm/cycle.

• Textile Coloration and Finishing
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• v.6 no.3
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• pp.44-51
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• 1994

Wool and silk fabrics dyed with C.l. Acid Black 155 were subjected to sputter etching and exposed to a low temperature argon plasma. Color depth of shade of the fabrics increased considerably, but sputter etching was more effectively than argon low temperature plasma treatment. And measured for any significant chemical modification by ESCA (XPS). Sputter etching and argon low temperature plasma treatments incorporated oxygen atoms into the surface.

• Asian-Australasian Journal of Animal Sciences
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• v.4 no.3
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• pp.293-298
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• 1991

A study was conducted to determine the effect of environmental temperature and level of food intake on plasma concentration of thyroid hormones. Three dairy heifers were used in an experiment which consisted of three levels of chamber temperature (10, 20 and $30^{\circ}C$) and three levels of food intake (100, 75 and 50% of recommended requirements). The analysis showed significant effects of environmental temperature on plasma triiodothyronine concentration, rectal temperature, respiration rate and heart rate but not on heat production. The range of plasma triiodothyronine was 2.51~1.79 ng/ml when the environmental temperature varied from 10 to $30^{\circ}C$. Effects of feed intake level were significant for heart rate and heal production. Heat production decreased from 25.9 to $20.0kJ/kg^{0.75}{\cdot}h$ when the TDN intake decreased from 66.3 to $35.1g/kg^{0.75}{\cdot}d$. There was no interactive effect of environmental temperature and feed intake level. Plasma triiodothyronine concentration decreased under high environmental temperature without any changes in heat production. The effects of environmental temperature and feed intake level on the physiological function of thyroid gland, as indicated by the relative circulating rate of thyroid hormones, were found to be clear.