• Applied Science and Convergence Technology
• /
• v.23 no.6
• /
• pp.328-339
• /
• 2014

In this article, plasma monitoring tools and mulivariate analysis techniques were reviewed. Optical emission spectroscopy was reviewed for a chemical composition analysis tool and RF V-I probe for a physical analysis tool for plasma monitoring. Multivariate analysis techniques are discussed to the sensitivity improvement. Principal component analysis (PCA) is one of the widely adopted multivariate analysis techniques and its application to end-point detection of plasma etching process is discussed.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.369-369
• /
• 2011

In the current work, we demonstrate the gas phase plasma synthesis of ultrafine boron nanoparticles by decomposing boron trichloride (BCl3) gas in an argon-hydrogen thermal plasma and quenching the hot plasma by expansion through a ceramic nozzle, driving the homogeneous nucleation of nanoparticles. It is shown that ultrafine nanoparticles can be produced from the experiments. We also show the characterization results regarding the oxidation of boron nanoparticles at room temperature using X-ray Photoelectron Spectroscopy (XPS) and the combined Scanning Transmission Electron Microscope (STEM) and Electron Energy Loss Spectroscopy (EELS).

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.61 no.5
• /
• pp.717-720
• /
• 2012

Various types of dielectric-barrier-discharge (DBD) devices have been developed for diverse applications for the last decade. In this study, a flat non-thermal DBD micro plasma source under atmospheric pressure has been developed. The flat-panel type plasma is generated by bipolar pulse voltages, and driving gas is air. In this study, the plasma source was investigated with intensified charge coupled device (ICCD) images and Optical Emission Spectroscopy (OES). The micro discharges are generated on the crossed electrodes. For theoretical analysis, 2-dimensional fluid simulation was performed. The plasma source can be driven in air, and thus the operation cost is low and the range of application is wide.

• 한국연소학회:학술대회논문집
• /
• 2013.06a
• /
• pp.99-101
• /
• 2013

The equivalence ratio is measured by LIBS(Laser-induced Breakdown spectroscopy) in hydrocarbon flame and high temperature (${\sim}3200^{\circ}C$) oxyhydrogen flame, where a stoichiometric mixture of hydrogen and oxygen is produced from water through electrolysis. The ratio of the hydrogen and oxygen (H/O) atomic lines intensities is used for quantitatively determining the quivalence ratio. laser energy is evaluated for determining the optimal condition for plasma diagnostics. The minimum laser energy for generating plasma in a laminar premixed hydrocarbon flame was about 70 mJ, whereas oxyhydrogen flame. consequently the irradiated spot of a lower density in high temperature oxyhydrogen flame gave rise to bigger plasma in size, thus limiting the spatial resolution of the LIBS measurement.

• Journal of the Korean institute of surface engineering
• /
• v.34 no.5
• /
• pp.475-480
• /
• 2001

Diffusion of Cu into the low-k para-xylene based plasma polymer (pXPP) thin films deposited by plasma-enhanced chemical vapor deposition using the para-xylene precursor was comparatively measured using various methods. Cu layer was deposited on the surfaces of pXPPs treated by $N_2$ plasma generated in a magnetically enhanced inductively coupled plasma reactor. Diffusion characteristics of Cu into pXPPs were measured using Rutherford backscattering spectroscopy (RBS), secondary ion mass spectroscopy (SIMS), cross-sectional transmission electron microscopy (XTEM), and current-voltage (I-V) measurements for the vacuum-annealed Cu/pXPPs for 1 hour at $450^{\circ}C$ and were compared. The results showed a correlation between the I-V measurement and SIMS data are correlated and have a sensitivity enough to evaluate the dielectric properties but the RBS or XTEM measurements are not sufficient to conclude the electrical properties of low-k dielectrics with Cu in the film bulk. The additional results indicate that the pXPP layers are quite resistant to Cu diffusion at the annealing temperature of $450^{\circ}C$ compared to the other previously reported organic low-k materials.

• Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
• /
• 2001.06a
• /
• pp.4101-4101
• /
• 2001

Information of body composition (fat and protein) in living animal is important to determine the nutrients requirement. Deuterium oxide (D2O) dilution techniques, as one of isotope dilution techniques have been useful for the prediction of body composition. However, the determination of D2O concentration is time consuming and complicated. Therefore this study was conducted to develop a new method to predict D2O concentration in plasma using near infrared spectroscopy technique (NIRS). Four dairy cows in early lactation were used. They were fed total mixed ration containing conr silage, timothy hay, and concentrates to make 17.0%CP and 14.0 MJDE/kgDM. Dosing D2O was at week 1,3 and 5 after parturition. After dosing D2O, the blood was collected from hour 0 to 72. Blood samples were then centrifuge at 3,000 rpm for 10 minutes to obtain plasma. D2O concentration was analyzed by gas chromatograph (deuterium oxide analyzable system, HK102, Shokotsusyou) after extracted from plasma by liophilization. Plasma sample was scanned by NIRS using Pacific Scientific (Neotec) model 6500 (Perstorp Analytical, Silver Spring, MD) in the range of wavelength from 1100 to 2500 nm. Calibration equation was developed using multiple linear regression. Sample from one animal (cow #550; n: 74) was used for developing the calibration while the rest three animals were used for validating the equation. The range, R and SEC of the calibration set samples were 135-925 ppm, 0.93 and 48.1 ppm, respectively. Validation of the calibration equation for three individual cows was done and the average of NIR predicted value of D2O at each collection time from three weeks injection showed a high correlation. The range, r and 53 of plasma from cow #474 were 322-840 ppm,0.93 and 53.1; cow #478 were 146-951 ppm,0.95 and 39.8; cow #942 were 313-885 ppm,0.95 and 37.2, respectively. Judgement of accuracy based on ratio of standard deviation and standard error in validation set samples (RPD) for cow #474, #478 and #942 were 2.2,4.3 and 3.4, respectively. The error in application due to the variation between individual was considered smaller than the bias from collection period, however, this prediction can be overcome with correction of standard zero-minute concentration of blood. The results of this preliminary study on the use of NIRS for determination of D2O in plasma showed very promising as shown by a convenient and satisfy accuracy. Further study on various physiological stage of animal should be done.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.254.1-254.1
• /
• 2014

Atmospheric plasma's electron temperature is less than thermal plasma, so it is useful at bio experiment. We have investigated the optical emission spectroscopy (OES) lines by spectrometer during Atmospheric plasma bombardment onto the PBS surface by using an Ar gas flow. Also we have measured the OH radical density inside the solution induced by the Atmospheric plasma bombardment. OH radical species are appeared at 308 nm and 309 nm. Densities of OH radical species has been found to be significantly decreased versus depth of the solution from 2 mm to 6 mm. OH radical density inside the PBS is measured to be about $1.87{\times}1016cm-3$ downstream at 2 mm from the surface under optimized Ar gas flow of 200 sccm in Atmospheric plasma. Also we have investigated cell viability of lung cancer and normal cell after Atmospheric plasma treatment for fixed exposure time in 60 seconds, but different depths. We used SEM, we observed change of cell morphorogy, did experiment about FDA & PI Staining method. It is found that there is selectivity between the lung cancer and lung normal cell, in which cancer cell definitely has higher cell death ratio more than normal cell. We have investigated change of bond structure in FT-IR spectroscopy, the following peaks were observed: and intense O-H peak at 3422 cm-1 and at 2925 cm-1 corresponds to C-H stretch vibrations of methylene group.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.48 no.12
• /
• pp.1013-1020
• /
• 2020

Spark-induced breakdown spectroscopy (SIBS) utilizes an electric spark to induce a strong plasma for collecting atomic emissions. This study analyses the potential for usinga compact SIBS instead of conventional laser-induced breakdown spectroscopy (LIBS) in discriminating rocks and soils for planetary missions. Targeting bulky solids using SIBS has not been successful in the past, and therefore a series of optimizations of electrode positioning and electrode materials were performed in this work. The limit of detection (LOD) was enhanced up to four times compared to when LIBS was used, showing a change from 78 to 20 ppm from LIBS to SIBS. Because of the higher energy of plasma generated, the signal intensity by SIBS was higher than LIBS in three orders of magnitude with the same spectrometer setup. Changing the electrode material and locating the optimum position of the electrodes were considered for optimizing the current SIBS setup being tested for samples of planetary origin.

• Analytical Science and Technology
• /
• v.22 no.2
• /
• pp.141-147
• /
• 2009

A laser induced breakdown spectroscopy (LIBS) measurement was carried out to derive an optimized measurement condition with a high reproducibility and to grow a plasma sphere to 20 mm high under a 600 mtorr vacuum in order to improve an accuracy of measurement. The measurement of the plasma was taken at a 6.0 mm distance, in the direction of a plasma sphere, from a sample. This location belongs to the outer sphere region in the plasma. The calibration curve of 'Ni' and 'Cu' was acquired by the signal intensity ratio and the atomic ratio for the samples, and linear regression of 'Cu' was $R^2$=0.9886, and the linear regression of 'Ni' was $R^2$=0.9988. The accuracy of LIBS was improved pre-existence as the measurement error of 'Ni' was 0.78%.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.304.1-304.1
• /
• 2016

We have investigated the effect of plasma nitridation of atomic layer deposited-Al2O3 films of monocrystalline Si wafers and the thermal properties of nitridated Al2O3 films. Nitridation was performed on Al2O3 to form aluminum oxynitride (AlON) using NH3 plasma treatment in a plasma-enhanced chemical vapor deposition and it was conducted at temperature of $400^{\circ}C$ with various plasma power condition. After nitridation, we performed firing and forming gas annealing (FGA). For each step, we have observed the minority carrier lifetime and the implied Voc by using quasi-Steady-State photoconductance (QSSPC). We confirmed a tendency to increase the minority carrier lifetime and the implied Voc after the nitridation. On the other hand, the minority carrier lifetime and the implied Voc was decreased after Firing and forming gas annealing (FGA). To get more information, we studied properties of the plasma treated Al2O3 films by using Secondary Ion Mass Spectroscopy (SIMS) and X-ray Photoelectron Spectroscopy (XPS).