Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Characterization of Boron Nanoparticles Synthesized with a Thermal Plasma System

  • Shin, Weon-Gyu (Department of Mechanical Engineering, Chungnam National University) ;
  • Girshick, Steven L. (Department of Mechanical Engineering, The University of Minnesota) ;
  • Oh, Dong-Ho (Department of Mechanical Engineering, Chungnam National University)
  • Published : 2011.02.09
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Abstract

In the current work, we demonstrate the gas phase plasma synthesis of ultrafine boron nanoparticles by decomposing boron trichloride (BCl3) gas in an argon-hydrogen thermal plasma and quenching the hot plasma by expansion through a ceramic nozzle, driving the homogeneous nucleation of nanoparticles. It is shown that ultrafine nanoparticles can be produced from the experiments. We also show the characterization results regarding the oxidation of boron nanoparticles at room temperature using X-ray Photoelectron Spectroscopy (XPS) and the combined Scanning Transmission Electron Microscope (STEM) and Electron Energy Loss Spectroscopy (EELS).

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