• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.26 no.6
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• pp.59-65
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• 2012

This paper presents a digital control solution which can extract the reactor parameters in atmosphere plasma power supply. The critical issue of the atmosphere plasma power supply is a impedance matching. For the impedance matching, the reactor parameters should be known, but the parameters depend on the reactors. Therefore, the reactor parameters have to measure for the impedance matching. The proposed method is performed by detection of phase difference between inverter voltage and current, and extraction of impedance through active, reactive power.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.917-921
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• 2002

In this paper, we made different types of non-thermal plasma reactors such as Metal-particle reactor with $Al_2O_3$ to measure NOx removal characteristic and the dielectric effect for NOx removal. NOx removal rate is not so good when we use just dielectric of $Al_2O_3$ at the Metal-particle reactor, also we just put sludge pellets(100%) without Metal-particle reactor with $Al_2O_3$ and dielectric such as $TiO_2$, $BaTiO_3$ to measure the effect of sludge for NOx removal so that NOx removal rate is almost the same. However NOx removal rate is more than 90% in case of the reactor of composition shape used both dielectric of $Al_2O_3$ and sludge pellets at the same time. In case of the shape of plasma reactor with dielectric, the Metal-particle reactor with $Al_2O_3$, and the metal-particle reactor with both $Al_2O_3$ and dielectric such as $TiO_2$, $BaTiO_3$ at the same time, they are almost the same effect for NOx removal, so we made MNPR(Metal-particle Non-thermal Plasma Reactor with $Al_2O_3$) to reduce these kinds of demerits. Finally, we think MNPR should be much better than other reactors for NOx removal.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.3
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• pp.157-161
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• 2004

We present a simple analytical expression of plasma density by making use of the electron density equation to study the dynamic behavior of the corona discharge plasma. It assumes that a specified voltage profile is fed through the inner conductor of the reactor chamber consisting of two coaxial conducting cylinders. The analytical description is based on the electron continuity equation with ionization and attachment by electrons. It is found that the electron density profile calculated between two coaxial cylindrical electrodes depends very sensitively on the Profile of applied voltage. The analytical expression of plasma density and its generation will provide important scaling laws in the corona discharge plasma.

• Journal of the Korean Vacuum Society
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• v.7 no.1
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• pp.72-76
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• 1998

A new gas-flow type reactor for plasma polymerization was developed to synthesize functional polymers, which enhances reaction of radicals activated in the discharge. Styrene was used for the plasma polymerization and molecular strucure and molecular weight distribution of the plasma -polymerized styrene were studies. The ploymer was evaluated to be an efficient electron beam resist. The sensitivity of the plasma-polymerized styrene film formed by this new reactor was better than that of the reported values of conventional polystyrene, Fine resist patterns could be successfully developed by a wet process.

• Journal of Industrial Technology
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• v.14
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• pp.63-75
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• 1994

The objective of this research is to analyze the phenomena of negative ion behavior in silane plasma chemical vapor deposition. Based on the plasma chemistry, the model equations for the formation and transport of negative ions were proposed and solved. The evolutions of gaseous species along the reactor were presented for several conditions of process variables such as reactor pressure, total gas flow rate, and electric field. Based on the model results, it is found that : (1) The concentration profiles of positive ions show the sharp peaks at the center of plasma reactor. (2) Most of negative ions are located in bulk plasma region, because the negative ions are excluded from the sheath region by electrostatic repulsion.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.2
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• pp.215-223
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• 2005

Non-thermal plasma decomposition of gas-phase styrene was investigated in this study using three different types of plasma reactors; dielectric-barrier discharge (DBD) reactor, surface discharge (SD) reactor and plasma-driven catalyst (PDC) reactor packed with 2.0 wt% $Ag/TiO_2$ catalysts. The main parameters used for the comparative assessment of the plasma reactors include the decomposition efficiency, carbon balance, byproduct distribution, COx ($CO+CO_2$) selectivity and COx yield. The SD and the DBD reactors showed better conversion efficiency of styrene than that of the PDC reactor due to their larger capability in ozone formation. On the other hand, the PDC reactor showed better carbon balance, the yield and the selectivity of COx. The required specific input energies to achieve 100% carbon balance from the decomposition of 100 ppmv styrene using the plasma alone reactors and the PDC reactor were 420 J/L and 110 J/L, respectively. The major decomposition products in gas-phase were CO, $CO_2$ and HCOOH regardless of the types of plasma reactors. In the case of SD and DBD reactors, the $CO_2$ selectivity ranged in $39.5{\sim}60%$. The $CO_2$ selectivity in the PDC reactor was in range of $68.5{\sim}75.5%$.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.4
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• pp.37-42
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• 2006

The effect of arc like streamer discharge is investigated on the hydrogen generation using the multineedle-plate electrode geometry plasma realtor(MPER) and the needle-plate electrode geometry plasma reactor(NPER). In order to restrict waves at the water surface when the high voltage applied, two kinds of the insulator such as the rectangular mesh or the hole mesh type are installed under the water surface. The discharge assistant of the two type(the saw type and the $TiO_2$ pellet type) was placed under the water surface to investigate the effect of the water surface conditions. The experimental results are compared in case of the reactor with and without the discharge assistant on the water surface.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.10
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• pp.1406-1418
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• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• Korean Chemical Engineering Research
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• v.53 no.5
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• pp.614-619
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• 2015

A plasma surface modification of powders has been carried out in a circulating fluidized bed reactor under reduced pressure. Polystyrene (PS) particles treated by plasma are grafted with polyethylene glycol (PEG) on the surface. The virgin, plasma-treated and grafted powders were characterized by DPPH method, FTIR, SEM and contact angle meter. The plasma-treated PS powders have well formed peroxide on the surface, By PEG grafting polymerization, PEG is well grafted and dispersed on the surface of the plasma-treated PS powders. The PEG-g-PS particle was successfully synthesized using the plasma circulating fluidized bed reactor under reduced pressure.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.6
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• pp.543-550
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• 2002

In this paper, the $CF_4$ decomposition rate and by-product were investigated for two simulated plasma reactors which are metal particle reactor and spiral wire reactors as a function of mixed gases. The $CF_4$ decomposition rate by plasma reactor with metal particle electrode had a gain of 20~25% over that by plasma reactor with spiral wire electrode. The $CF_4$ decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The $CF_4$ decomposition efficiency of metal particle reactor was about 80% at AC 24kV. The $CF_4$ decomposition rate used Ar-$N_2$ as base gas was the highest among three base gases of $N_2$, $Ar-N_2$, air. The by-products of the $N_2$, $N_2Ar$ base as were similar, but in case of air base they were different.