• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 춘계학술대회 논문집 센서 박막재료연구회 및 광주 전남지부
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• pp.22-26
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• 2008

In this paper, we developed a hybrid simulation model of carbon laser ablation under the Ar plasmas consisted of fluid and particle methods. Three kinds of carbon particles, which are carbon atom, ion and electron emitted by laser ablation, are considered in the computation. In the present simulation, we adopt capacitively coupled plasma with asymmetrical electrodes. As a result, in Ar plasmas, carbon ion motions were suppressed by a strong electric field and were captured in Ar plasmas. Therefore, a low number density of carbon ions were deposited upon substrate. In addition, the plume motions in Ar gas atmosphere was also discussed.

• 한국전기전자재료학회논문지
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• 제14권10호
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• pp.835-844
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• 2001

In this paper, we report the successful growth of crystalline carbon nitride films in Si(100) by a laser-electric discharge method. The laser ablation of the target leads to vapor plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy(AES) were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films with a deposition time of 2 hours is studied using a scanning electron microscopy (SEM). In order to determine the structural crystalline parameters, X-ray diffraction (XRD) was used to analysis the grown films.

• 한국자기학회지
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• 제19권3호
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• pp.94-99
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• 2009

Pulsed Laser Deposition 방법으로 합성된 $La_{0.7}Ca_{0.3}MnO_3$ 박막의 물리적 특성을 증착 조건에 따라 조사하였다. 기존에 알려진 바와는 매우 달리 매우 낮은 산소 분압 ($1.0{\times}10^{-5}$, $1.0{\times}10^{-6}Torr$)에서도 큐리 온도가 높은 박막의 합성이 이루어졌으며 이는 박막의 합성 과정에서 쳄버 내부의 산소 분압보다는 플라즈마 plume의 모양과 그 내부 물질들의 운동에너지가 박막의 질을 결정하는 매우 중요한 요소임을 의미한다. 이러한 양질 박막의 합성 증착 조건을 이용하여 $La_{0.7}Ca_{0.3}MnO_3$ 을 Nb가 도핑된 $SrTiO_3$ 기판위에 증착함으로써 p-n 접합을 제작하였으며 이의 전류-전압곡선이 정류 특성을 보였고 그 모양은 자기장에 의해 바뀔 수 있음을 확인하였다.

• 한국항공우주학회지
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• 제45권11호
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• pp.932-938
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• 2017

플라자마의 거동을 오일러리안 격자와 라그랑지안 입자를 혼합하여 해석하는 Particle-in-cell 기법을 적용하여 간략화된 홀추력기를 해석하였다. 본 연구는 중성입자, 이온입자 뿐만 아니라 전자도 라그랑지안 기법으로 개별추적 계산하기 때문에 message passing interface 기법을 이용해 대용량 계산이 가능한 병렬클러스터링을 적용하였다. 계산에 앞서 일정한 벡터의 자기장에서 전자군의 나선형 거동을 해석하였고, 절대해와 일치함을 확인하여 코드를 검증하였다. 실린더 내부에 반경방향으로 일정한 자기장과 축방향으로 일정한 전기장을 고정시켜 플라즈마의 거동을 PIC 모델을 이용하여 해석하였다. 반응 실린더 내부에 전자가 로렌츠 힘에 의해 이중나선을 그리며 구속되는 현상이 잘 포착되었고, 고속 회전하는 전자와 주입된 중성입자가 충돌하여 이온화 되었고, 대전된 입자가 축방향의 전기장에 의해 급 가속하는 현상 또한 잘 모사되어 플라즈마의 플룸 거동을 모사하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.185-185
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• 2011

ZnTe semiconductor is very attractive materials for optoelectronic devices in the visible green spectral region because of it has direct bandgap of 2.26 eV. The prototypes of ZnTe light emitting diodes (LEDs) have been reported [1], showing that their green emission peak closely matches the most sensitive region of the human eye. Another application to photovoltaics proved that ZnTe is useful for the production of high-efficiency multi-junction solar cells [2,3]. By using the pulse laser deposition system, ZnTe thin films were deposited on ZnO thin layer, which is grown on (0001) Al2O3substrates. To produce the plasma plume from an ablated ZnO and ZnTe target, a pulsed (10 Hz) YGA:Nd laser with energy density of 95 mJ/$cm^2$ and wavelength of 266 nm by a nonlinear fourth harmonic generator was used. The laser spot focused on the surface of the ZnO and ZnTe target by using an optical lens was approximately 1 mm2. The base pressure of the chamber was kept at a pressure around $10^{-6}$ Torr by using a turbo molecular pump. The oxygen gas flow was controlled around 3 sccm by using a mass flow controller system. During the ZnTe deposition, the substrate temperature was $400^{\circ}C$ and the ambient gas pressure was $10^{-2}$ Torr. The structural properties of the samples were analyzed by XRD measurement. The optical properties were investigated by using the photoluminescence spectra obtained with a 325 nm wavelength He-Cd laser. The film surface and carrier concentration were analyzed by an atomic force microscope and Hall measurement system.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2011년도 제37회 추계학술대회논문집
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• pp.608-611
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• 2011

이차 추진제로 많이 쓰이는 알루미늄을 고출력 레이저를 이용하여 공기 중의 산소와 반응시켜 발생되는 rich 및 stoichiometric 상태의 알루미늄-산소 연소 현상에 대해 레이저 분광분석법을 이용하여 연구하였다. 7ns의 펄스 주기와 1064nm의 주파수를 가진 Q-switched Nd:YAG 레이저로 40 - 2500mJ의 에너지가 공급되었으며, 플라즈마 빛은 echelle 회절 분광기와 ICCD 카메라로 감지하였다. 레이저 분광분석을 통하여 연료인 알루미늄과 산화제인 산소의 원자 신호를 얻었을 뿐만 아니라, 현상이 일어나는 환경인 플라즈마 온도와 전자밀도가 계산되었다. 특정 전자 밀도비 비교를 통하여, 고출력 레이저를 통해 일어나는 알루미늄과 산소의 연소 및 폭발 현상 변화에 대한 분석이 가능하다는 것에 본 논문의 중요성이 있다.

• 한국항공우주학회지
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• 제44권9호
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• pp.789-795
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• 2016

이차 추진제로 많이 쓰이는 알루미늄을 고출력 레이저를 조사하여 공기 중의 산소와 반응시켜 발생되는 알루미늄과 산소의 화학 반응을 레이저 분광분석법을 이용하여 연구를 수행 하였다. 7ns의 펄스 주기와 1064nm의 주파수를 가진 Q-switched Nd:YAG 레이저로 40 - 2500mJ($6.88{\times}10^{10}-6.53{\times}10^{11}W/cm^2$)의 에너지가 공급되었으며, 플라즈마 빛은 echelle 회절 분광기와 ICCD 카메라로 감지하였다. 분광분석을 통하여 알루미늄과 산소의 원자/분자 신호 분석과 현상이 일어나는 플라즈마 환경의 특성 연구를 위해 들뜸 온도(2200K~6600K) 및 전자밀도($3.15{\times}10^{15}{\sim}2.38{\times}10^{16}cm^{-3}$) 계산, 그리고 알루미늄 표면의 크레이터(Crater) 분석을 수행하였다. 본 연구는 고 레이저 복사 조도 환경하에서 발생되는 화학 반응과 플라즈마의 특성을 파악하는 방법을 제시하고 있다.

• Journal of Advanced Marine Engineering and Technology
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• 제30권5호
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• pp.636-644
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• 2006

Recently, there were some successful examples that the laser welding was introduced into production line. However, the spread of laser welding is not sufficient in many industries. There are several reasons why it is difficult to penetrate the laser welding into production lines. Because it is different from reflection, absorption and permeation of laser beam according to material and surface condition. Moreover, there are significant problems in processing such as absorption and scattering of beam by the induced plasma or plume. Therefore, understanding of mechanism on formation of weld defect in laser welding of the laminated core for motor is very important. In this paper, it was analyzed in terms of materials which was source of defect in laser welding and conventional arc welding. As a results of analysis, insulation coating film of the laminated core was judged to main factor of weld defect. it could be well aware as tracing carbon volume, and it was deduced that weld defect by insulation coating film was caused by difference of mechanism between the two heat sources.

• 한국전기전자재료학회논문지
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• 제21권9호
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• pp.818-824
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• 2008

The Separated Pulsed Laser Deposition (SPLD) technique uses two chambers that are separated by a conic metallic wall with a central orifice. The pressures of ablation chamber and deposition chamber were controlled by the differential vacuum system. We deposited zinc oxide (ZnO) thin films by SPLD method to obtain high quality thin films. When the bias voltage of +500 V was applied between a substrate and an orifice, the ZnO thin film was deposited efficiently. The deposited ZnO thin film at ablation chamber gas pressure of Ar 5 mTorr showed the sharpest ultraviolet absorption edge indicatory the band gap of about 3.1 eV. ZnO thin films were deposited using effect of electric and magnetic fields in the SPLD method. E${\times}$B drift happened by an electric fields and a magnetic fields, activated plasma plume, as a result the film surface became very smooth. When the bias voltage of +500 V and magnet of 0,1 T were applied the ZnO thin films surface state showed high quality. Grain size was 41.99 nm and RMS was 0.84 nm.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1408-1409
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• 2007

In this paper, we developed a hybrid simulation model of carbon laser ablation under the Ar plasmas consisted of fluid and particle methods. Three kinds of carbon particles, which are carbon atom, ion and electron emitted by laser ablation, are considered in the computation. In the present modeling, we adopt capacitively coupled plasma with ring electrode inserted in the space between the substrate and the target, graphite. This system may take an advantage of ${\mu}m$-sized droplets from the sheath electric field near the substrate. As a result, in Ar plasmas, carbon ion motions were suppressed by a strong electric field and were captured in Ar plasmas. Therefore, a low number density of carbon ions were deposited upon substrate. In addition, the plume motions in Ar gas atmosphere was also discussed.