• Journal of the Korean institute of surface engineering
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• v.45 no.4
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• pp.174-180
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• 2012

Low pressure inductively coupled plasma characteristics of argon and oxygen are numerically simulated for a 400 mm rectangular type system with a plasma fluid model. The results showed lower power absorption profile at the corner than a circular one in a 13.56 MHz driven 1.5 turn antenna system with a drift-diffusion and quasi-neutrality assumption. Ions controlled by electric field are more non-uniform than metastables and the power absorption profile of oxygen plasma is affected by horizontal gas flow pattern to show 25% lower power absorption at the pumping flange side. Oxygen negative ions which are generated in electron collisional dissociation of oxygen molecules was calculated as 0.1% of oxygen atoms with similar spatial profile.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.320-324
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• 2004

Laser Propulsion is a device that generates thrust using laser energy. Laser-driven In-Tube Accelerator (LITA) has been developed at Tohoku University. LITA is a laser propulsion system that accelerates an object not in an open air but in a tube. Experiments of vertical launching and pressure measurement on the tube wall were carried out and in order to observe the initial state of plasma and blast wave, the visualization experiment was carried out using the shadowgraph method. In this study, the time variation of pressure on the tube wall is numerically simulated solving Euler equation. In order to model the laser energy, heat source function added to the frozen flow Euler equation. Plasma size from the shadowgraph images was used for the initial condition of laser energy input. For verification of the modeling, these results were compared with the previous experimental and numerical results. From these verifications, an analysis of LITA performance will be investigated.

• Journal of the Korean Vacuum Society
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• v.21 no.5
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• pp.249-257
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• 2012

Nonlinear dynamical behaviors of plasma in the Pierce diode are investigated by a numerical code developed using a one dimensional fluid model. The plasma in Pierce diode is alternately stable and unstable as Pierce parameter is changed. The dynamical characteristics of neutral and non-neutral Pierce system is examined analytically and numerically. It alternately has growing and oscillatory mode as Pierce parameter varies. As Pierce parameter is decreased, each oscillatory mode undergoes a sequence of subharmonic period-doubling bifurcation and then culminate in a chaotic strange attractor. The analysis for this nonlinear behavior can be used as a model for understanding of beam-plasma interaction in more complex geometries and a data for chaos control.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.1
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• pp.28-35
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• 2004

$N_2$ has been one of the most useful gases in industrial application, for example, plasma ashing, surface cleaning and decomposition of pollution gases. In order to clarify $N_2$ plasma properties and increase practical applications, many experimental and theoretical investigations have been carried out until now on. In this papa, we examined the characteristics of $N_2$ RF Plasmas using one-dimensional fluid model. $N_2$ plasmas showed a double-layer structure in both sheath regions as the power source voltage becomes higher. Generally, a double-layer structure should be showed in electro-negative plasmas, but not in electro-postive plasmas such as $N_2$ discharge. However, most electrons in $N_2$ plasmas lost their energy by many excitation reactions in the near of both electrodes where electron collisions were actively executed and such continuous reactions during an RF period made this structure strong with increase of the power source voltage. The dependence of $N_2$ plasma properties on pressure was also discussed.

• Journal of the Korean Society of Propulsion Engineers
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• v.19 no.1
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• pp.25-32
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• 2015

Dielectric barrier discharge (DBD) plasma actuator was designed to reduce aerodynamic drag in a cylindrical model and wind tunnel test was performed at various wind velocities. In addition, computational fluid dynamics (CFD) analysis and flow visualization were used to investigate the effect of the plasma on the flow stream in the cylinderical model. At low wind velocity, the plasma actuator had no effects because flow separation did not appear. The aerodynamic drag was reduced by 14% at 14 m/s and by 27% at 17 m/s, respectively. It was confirmed by CFD analysis and flow visualization that the DBD plasma actuator decreased in pressure difference around the cylindrical model, thus decreasing the magnitude of wake vortex.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.255.2-255.2
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• 2014

Electrode erosion is indispensable for atmospheric plasma systems, as well as for switching devices, due to the high heat flux transferred from arc plasmas to contacts, but experimental and theoretical works have not identified the characteristic phenomena because of the complex physical processes. Our investigation is concerned with argon free-burning arcs with anode erosion at atmospheric pressure by computational fluid dynamics (CFD) analysis. We are also interested in the energy flux and temperature transferring to the anode with a simplified unified model of arcs and their electrodes. In order to determine two thermodynamic quantities such as temperature and pressure and flow characteristics we have modified Navier-Stokes equations to take into account radiation transport, electrical power input and the electromagnetic driving forces with the relevant Maxwell equations. From the simplified self-consistent solution the energy flux to the anode can be derived.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.270-274
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• 1997

The numerical model that can describe the ignition of the pseudospark discharge using hybrid fluid-particle method has been developed. The evolution process of the discharge has been divided into four phases along the potential distribution. After the plasma enters in the hollow cathode, the confining effect which is one of hollow cathode properties occurs and the electron current on anode rises rapidly. As the plasma expands successively, the sheath contracts and as the electric field in the sheath increases, the field-enhanced thermionic emission(Schottky emission) occurs. From numerical results, the physical mechanism that causes the rapid current rise in the ignition of the pseudospark discharge could be identified.

• Journal of the Semiconductor & Display Technology
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• v.13 no.4
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• pp.1-5
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• 2014

The plasma density distribution in between the electrode and lateral wall of a narrow gap CCP was investigated. The plasma density distribution was obtained using single Langmuir probe, having two peaks of density distribution at the center of electrode and at the peripheral area of electrodes. The plasma density distribution was compared with the RF fluctuation of plasma potential taken from capacitive probe. Ionization reactions obtained from numerical analysis using CFD-$ACE^+$ fluid model based code. The peaks in two region for plasma density and voltage fluctuation have similar spatial distribution according to input power. It was found that plasma density distribution between the electrode and the lateral wall is closely related with the local ionization.

• Journal of the Korean Vacuum Society
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• v.21 no.3
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• pp.121-129
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• 2012

RF biased inductively coupled plasma (ICP) is widely used in semiconductor and display etch processes which are based on vacuum science. Up to now, researches on how rf-bias power affects have been focused on the controls of dc self-bias voltages. But, effect of RF bias on plasma parameters which give a crucial role in the processing result and device performance has been little studied. In this work, we studied the correlation between the RF bias and plasma parameters and the recent published results were included in this paper. Plasma density was changed with the RF bias power and this variation can be explained by simple global model. As the RF bias was applied to the ICP, increase in the electron temperature from the electron energy distribution was measured indicating electron heating. Plasma density uniformity was enhanced with the RF bias power. This study can be helpful for the control of the optimum discharge condition, as well as the basic understanding for correlation between the RF bias and plasma parameters.

• 한국전산유체공학회:학술대회논문집
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• 1996.05a
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• pp.125-130
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• 1996

A numerical analysis is conducted on heat transfer and fluid flow of a plasma spraying process under the DC-RE hybrid electromagnetic field. Plasma flow is analyzed by using Eulerian approach and the equation of particle motion is simultaneously solved using a trajectory analysis with a lumped-heat-capacity model. Axisymmetric two dimensional electromagnetic fields governed by Maxwell's equations are solved based on a vector potential concept. The effects of the RF electromagnetic field on the temperature and velocity fields of the turbulent plasma flow are clarified. Control characteristics of phase changes and dispersed features of particles by applying the RF electromagnetic field are also clarified in an attempt to improve the plasma spraying process