• Korean Journal of Materials Research
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• v.15 no.3
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• pp.161-165
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• 2005

We investigated selective dry etching of GaAs over AlGaAs and InGaP in high density planar inductively coupled $BCl_3/SF_6$ plasmas. The process parameters were ICP source power (0-500 W), RE chuck power (0-30W) and gas composition $(60-100\%\;BCl_3\;in\;BCl_3/SF_6)$. The process results were characterized in terms of etch rate, selectivities of GaAs over AlGaAs and InGaP, surface morphology, surface roughness and residues after etching. $BCl_3/SF_6$ selective etching of GaAs showed quite good results in this study. Selectivities of GaAs $(GaAs:AlGaAs\~36:1,\;GaAs:InGaP\~45:1)$ were superior at $18BCl_3/2SF_6$, 20 W RF chuck power, 300 W ICP source power and 7.5 mTorr. Addition of $(5-15\%)SF_6\;to\;BCl_3$ produced relatively high selectivities of GaAs over AlGaAs and InGaP during etching due to decrease of etch rates of AlGaAs and InGaP (boiling points of etch products: $AlF_3\~1300^{\circ}C,\;InF_3>1200^{\circ}C$ at atmosphere) at the condition. SEM and AFM data showed slightly sloped sidewall and somewhat rough surface$(RMS\~9nm)$. XPS study on the surface of processed GaAs proved a very clean surface after dry etching. It shows that planar inductively coupled $BCl_3/SF_6$ plasmas could be a good candidate for selective dry etching of GaAs over AlGaAs and InGaP.

• Journal of Korea Foundry Society
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• v.10 no.1
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• pp.50-56
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• 1990

Continuous casting of the $Al-Al_3Ni$: eutectic composite was carried out by the upward continuous casting process. The morphology of the eutectic growth and the stability of solid-liquid interface were investigated under various growth conditions in an upward continuous casting. The effect of growth conditions on the mechanical properties of the $Al-Al_3$ Ni eutectic composit was also investigated, and the results were compared with those by the Bridgman method. As for the results, it was possible to get the planar solid-liquid interface at the condition of $G_L/R$＝$1.04{\times}10^3^{\circ}Csec/mm^2$. And the inter-rod spacing of $Al-Al_3Ni$ eutectic composite was decreased with the increase of pulling speed. The reduction of inter-rod spacing & value of $G_L/R$ caused the increase of ultimate tensile strength in $Al-Al_3Ni$: eutectic composite. The ultimate tensile strengths of $Al-Al_3Ni$ by the upward continuous casting were higher then those by the Bridgman method.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1852-1854
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• 1999

In order to enhance satellite communication system performance, filters are required with the characteristics of sharp skirt, low insertion loss, and high power handling capability. But the performance of microwave passive filters is significantly declined by the conduction losses, especially in case of planar structures using film conductors. By using high temperature superconducting(HTS) film material as the conductor, higher performance could be expected. We have designed and developed narrow bandpass filters using haripin-type superconducting microstrip line for satellite communication. High quality superconducting YBCO thin films have been grown on MgO substrates by pulsed laser deposition(PLD) The deposited YBCO films were patterned by conventional wet-etching process. The transition temperatures of these films had shown 86 - 89 K. The film thicknesses were about 500 nm. Experimental results are presented for the insertion loss and return loss of the filter at 60 K.

• Journal of computational fluids engineering
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• v.13 no.4
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• pp.114-125
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• 2008

Current state and perspective of DNS of turbulence and turbulent combustion are discussed with feature trend of the fastest supercomputer in the world. Based on the perspective of DNS of turbulent combustion, possibility of perfect simulations of IC engine is shown. In 2020, the perfect simulation will be realized with 30 billion grid points by 1EXAFlops supercomputer, which requires 4 months CPU time. The CPU time will be reduced to about 4 days if several developments were achieved in the current fundamental researches. To shorten CPU time required for DNS of turbulent combustion, two numerical methods are introduced to full-explicit full-compressible DNS code. One is compact finite difference filter to reduce spatial resolution requirements and numerical oscillations in small scales, and another is well-known point-implicit scheme to avoid quite small time integration of the order of nanosecond for fully explicit DNS. Availability and accuracy of these numerical methods have been confirmed carefully for auto-ignition, planar laminar flame and turbulent premixed flames. To realize DNS of IC engine with realistic kinetic mechanism, several DNS of elemental combustion process in IC engines has been conducted.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.14 no.4
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• pp.155-159
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• 2004

Numerical analysis which is based on finite element techniques, implicit Euler method and frontal solving algorithm was performed to study the effects of the crucible shape on the temperature of sapphire crystal and the shape of the melt/crystal interface in heat exchanger method. The computer simulation described here and effective to solving the heat transport phenomena with the transition of the interface shape from hemispherical to planar. In the work, various crucibles with differently shaped corners at their bottom are considered to improve the deflection of the melt/crystal interface. The shape of the crucible should be considered as one of the variables for the process optimization.

• Korean Journal of Materials Research
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• v.24 no.9
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• pp.451-457
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• 2014

We developed a high-performance methane gas sensor based on a $SnO_2$ hollow hemisphere array structure of nano-thickness. The sensor structures were fabricated by sputter deposition of Sn metal over an array of polystyrene spheres distributed on a planar substrate, followed by an oxidation process to oxidize the Sn to $SnO_2$ while removing the polystyrene template cores. The surface morphology and structural properties were examined by scanning electron microscopy. An optimization of the structure for methane sensing was also carried out. The effects of oxidation temperature, film thickness, gold doping, and morphology were examined. An impressive response of ~220% was observed for a 200 ppm concentration of $CH_4$ gas at an operating temperature of $400^{\circ}C$ for a sample fabricated by 30 sec sputtering of Sn, and oxidation at $800^{\circ}C$ for 2 hr in air. This high response was enabled by the open structure of the hemisphere array thin films.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.59.1-59.1
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• 2015

In the Linford group at Brigham Young University we have recently developed three new sets of materials for three different areas of separations science: thin layer chromatography (TLC), high performance liquid chromatography (HPLC), and solid phase microextraction (SPME). First, via microfabrication we have grown patterned carbon nanotube (CNT) forests on planar substrates that we have infiltrated with inorganic materials such as silicon nitride. The coatings on the CNTs are conformal and typically deposited in a process like low pressure chemical vapor deposition. The resulting materials have high surface areas, are porous, and function as effective separation devices, where separations on our new TLC plates are typically significantly faster than on conventional devices. Second, we used the layer-by-layer (electrostatically driven) deposition of poly (allylamine) and nanodiamond onto carbonized poly (divinylbenzene) microspheres to create superficially porous particles for HPLC. Many interesting classes of molecules have been separated with these particles, including various cannabinoids, pesticides, tricyclic antidepressants, etc. Third, we have developed new materials for SPME by sputtering silicon onto cylindrical fiber substrates in a way that creates shadowing of the incoming flux so that materials with high porosity are obtained. These materials are currently outperforming their commercial counterparts. Throughout this work, the new materials we have made have been characterized by X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, scanning electron microscopy, transmission electron microscopy, etc.

• Proceedings of the KSME Conference
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• 2001.06e
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• pp.542-547
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• 2001

A non-intrusive Planar Laser-Induced Fluorescence(PLIF) technique was applied to study the turbulent mixing process in a Rushton turbine reactor. Instantaneous and ensemble averaged concentration fields are obtained by measuring the fluorescence intensity of Rhodamine B tracer excited by a thin Nd:Yag laser sheet illuminating the whole center plane of the stirred tank. The gray level images captured by a 14-bit cooled CCD camera can be transformed to the local concentration values using a calibration matrix. The dye injection point was selected at the tank wall with three quarter height (3/4H) from the tank bottom to observe the mixing characteristics in upper bulk flow region. There exist distinct two time scales: the rapid decay of mean concentration in each region after the dye infusion reflects the large scale mixing while the followed slow decay reveals the small scale mixing. The temporal change of concentration probability functions conjectures the two sequential processes in the batch type mixing. An inactive column of water existed above the impeller disk, in which the fluid rotates with the shaft but is isolated from the mean bulk flow.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.4
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• pp.768-773
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• 2010

In this paper, we study on an optimal design of a triple-band PIFA (Planar Inverted-F Antenna) of 433 MHz, 912 MHz and 2.45 GHz by using evolution strategy. Generally, the resonant frequency of the PIFA is determined by the width and length of a U-type slot used. However the resonant frequencies of the multiple U slots are varied by the mutual effect of the slots. Thus the optimal width and length of U-type slots are determined by using an optimal design program based on the evolution strategy. To achieve this, an interface program between a commercial EM analysis tool and the optimal design program is constructed for implementing the evolution strategy technique that seeks a global optimum of the objective function through the iterative design process consisting of variation and reproduction. The resonant frequencies of initial model are 439.5 MHz, 981.5 MHz and 2.563 GHz. However, the resonant frequencies of the triple-band PIFA yielded by the optimal design program are 430.5 MHz, 907 MHz and 2.4515 GHz. Measured resonant frequencies are 433.5 MHz, 905.5 MHz and 2.454GHz, which show a good agreement with the simulation results.

• Journal of the Korean Ceramic Society
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• v.22 no.2
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• pp.17-24
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• 1985

In the composition of $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ the effect of particle size on PbO vaporization were measured, . The initial step of discontinuous vaporization of unreated PbO during the calcining process was depended on the particle size. All additives $La_2O_3Nb_2O_5$ and $Al_2O_3$ inhibited the grain growth of the composition $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ +2wt% excess PbO. The dielectric and piezoelectric properties of the composition $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ were improved by the addition of 2wt% excess PbO and proper additive. The electromechanical planar coupling factor of 0.65 and mechnical quality factor of 390 could be obtained by adding 5wt% $Nb_2O_5$ to the composition 2wt% excess PbO+$Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$.