• Korean Journal of Materials Research
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• v.12 no.3
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• pp.211-214
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• 2002

Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.5
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• pp.390-396
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• 2009

The present research was focused to investigate the quality of non-polar SiC substrates grown by a conventional PVT method for optoelectronic applications. The half part of the PVT-grown 6H-SiC crystal boules was sliced along a-direction and m-direction to extensively analyze non-polar planes and then remaining part of that was sliced along the basal plane to produce wafers. The non-polar SiC m-plane and a-plane exhibited apparent peaks around 2 theta=$120^{\circ}$((3-300) plane) and 2 theta=$60^{\circ}$ ((11-20) plane), respectively. FWHM values of m-plane measured along a-direction and c-direction were 60 arc see and 57 arcsec respectively, a-plane measured along m-direction and c-direction were 41 arcsec and 51 arcsec respectively. The typical absorption spectra of SiC crystals indicated that each of SiC crystals were the 6H-SiC with fundamental absorption energy of about 3.04 eV. Non-polar planes contained no micropipe on etched surface. The carrier concentration and mobility of non-polar SiC wafers have estimated by Raman spectrum. It was observed that the carrier mobility is low in the area far from seed crystal with compared to other places.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2004.04a
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• pp.135-138
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• 2004

Conventional piezoelectric lead-zirconate-titanate (PZT) senor has high sensitivity, but it is very brittle. Recently polymer films such as polyvinylidene fluoride (PVDF) and poly(vinylidene fluoride­trifluoroethylene) (P(VDF-TrFE)) copolymer have been used as a sensor. The advantages of polymer sensor are the flexibility and mechanical toughness. Simple process and possible several shapes are also additional advantages. Polymer sensor can be directly embedded in a structure. In this study, nondestructive damage sensitivity of single basalt fiber/epoxy composites was investigated with sensor type and thermal damage using AE and oscilloscope. And AE waveform for epoxy matrix with various damage types was compared to each other. The damage sensitivity of two polymer sensors was rather lower than that of PZT sensor. The damage sensitivity of PVDF sensor did not decrease until thermal damage temperature at $80^{\circ}C$ and they decreased significantly at $110^{\circ}C$ However, the damage sensitivity of P(VDF-TrFE) sensor at $110^{\circ}C$ was almost same in no damage sensor. For both top and side impacts, the difference in arrival time increased with increasing internal and surface damage density of epoxy matrix.

• Smart Structures and Systems
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• v.6 no.7
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• pp.835-849
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• 2010

This study investigated propagation characteristics of piezo-activated guided waves in an aluminium rectangular-section tube for the purpose of damage identification. Changes in propagating velocity and amplitude of the first wave packet in acquired signals were observed in the frequency range from 50 to 250 kHz. The difference in guided wave propagation between rectangular- and circular-section tubes was examined using finite element simulation, demonstrating a great challenge in interpretation of guided wave signals in rectangular-section tubes. An active sensor network, consisting of nine PZT elements bonded on different surfaces of the tube, was configured to collect the wave signals scattered from through-thickness holes of different diameters. It was found that guided waves were capable of propagating across the sharp tube curvatures while retaining sensitivity to damage, even that not located on the surfaces where actuators/sensors were attached. Signal correlation between the intact and damaged structures was evaluated with the assistance of a concept of digital damage fingerprints (DDFs). The probability of the presence of damage on the unfolded tube surface was thus obtained, by which means the position of damage was identified with good accuracy.

• Land and Housing Review
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• v.2 no.4
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• pp.407-413
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• 2011

This paper reports a novel structural health monitoring (SHM) technique for detecting de-bonding between a concrete beam and CFRP (Carbon Fiber Reinforced Polymer) sheet that is attached to the concrete surface. To achieve this, a multi-scale actuated sensing system with a self-sensing circuit using piezoelectric active sensors is applied to the CFRP laminated concrete beam structure. In this self-sensing based multi-scale actuated sensing, one scale provides a wide frequency-band structural response from the self-sensed impedance measurements and the other scale provides a specific frequency-induced structural wavelet response from the self-sensed guided wave measurement. To quantify the de-bonding levels, the supervised learning-based statistical pattern recognition was implemented by composing a two-dimensional (2D) plane using the damage indices extracted from the impedance and guided wave features.

• Korean Journal of Materials Research
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• v.4 no.7
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• pp.783-791
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• 1994

Piezoelectric ZnO thin films were deposited on 7059 glass substrate by rf magnetron sputtering. The effects of deposition parameter, such as rf power, gas pressure and $O_{2}$/Ar gas ratio, on the crystallinity and electrical properties of the deposited ZnO thin films were studied. It was found that the deposition rate was higher than the previously reported values. ZnO films were suitable for SAW filter since a standard deviation of XRD (002) peak rocking curve was less than $6^{\circ}$. ZnO thin films, which were deposited at $O_{2}$/Ar ratio larger than 25%, showed high resistance. SAW filter was fabricated using ZnO film, of which thickness was 0.25 of the wavelength of the propatating surface acoustic wave. The measured frequency response was consistent with the calculated one. The SAW filter had center frequency 39.08 MHz, phase velocity 2501 m/sec and insertion loss 29 dB.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.11
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• pp.1157-1169
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• 2008

This paper presents spectral element formulation which approximates Lamb wave propagation by PZT transducers bonded on a thin plate. A two layer beam model under 2-D plane strain condition is introduced to simulate high-frequency dynamic responses induced by a piezoelectric (PZT) layer rigidly bonded on a base plate. Mindlin-Herrmann and Timoshenko beam theories are employed to represent the first symmetric and anti-symmetric Lamb wave modes on a base plate, respectively. The Euler-Bernoulli beam theory and 1-D linear piezoelectricity are used to model the electro-mechanical behavior of a PZT layer. The equations of motions of a two layer beam model are derived through Hamilton's principle. The necessary boundary conditions associated with the electro-mechanical properties of a PZT layer are formulated in the context of dual functions of a PZT layer as an actuator and a sensor. General spectral shape functions of response field and the associated boundary conditions are obtained through equations of motions converted into frequency domain. Detailed spectrum element formulation for composing the dynamic stiffness matrix of a two layer beam model is presented as well. The validity of the proposed spectral element is demonstrated through numerical examples.

• The Journal of the Acoustical Society of Korea
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• v.40 no.4
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• pp.270-277
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• 2021

In the power ultrasound fields, the flange position for fixing the transducer is an important factor influencing on electro-mechanical efficiency of the transducer. We suggested a practical method that can determine the installation position of the flange for different resonance modes of the bolt-clamped type Langevin ultrasonic transducer. A semicircular wedge-shaped jig was manufactured and moved along the lateral surface of the transducer. The vibration characteristics were examined after a constant pressure was applied to the semicircular wedge-shaped jig. By observing the change of the input admittance of the transducer depending on the position of the pressure application, the optimum position for the flange installation could be determined. The resonant modes of the transducer were calculated by a Mason's equivalent circuit, and the particle velocity distribution for each resonance mode was calculated by a transmission line model. Since the optimum positions determined from an experimental result show a good correspondence with the node positions of the vibration modes calculated by the transmission line model, the validity of the suggested method was verified.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.4
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• pp.407-411
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• 2022

Bulk-sized PbTiO₃ (PT), which is widely known as a high-performance ferroelectric oxide but cannot be fabricated into a monolithic ceramic due to its high c/a ratio, was successfully prepared with a high tetragonality by partially substituting Ni ions for Pb ions using a solid-state reaction method. We found that Ni-doped PT was well-fabricated as a bulk monolith with a significant c/a ratio of ~1.06. X-ray diffraction on as-sintered and crushed samples revealed that NiTiO₃ secondary phase was present at the doping level of more than 2 at.%. Scanning electron microscopic study showed that NiTiO₃ secondary phase grew on the surface of PT specimens regardless of the doping level possibly due to the evaporation of Pb during sintering. We demonstrated that an unconventional introduction of Ni ions into A-site plays a key role on the fabrication of bulk PT, though how Ni ion functions should be studied further. We expect that this study contributes to a further development of displacive ferroelectric oxides with a high c/a ratio.

• Journal of Periodontal and Implant Science
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• v.46 no.5
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• pp.303-319
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• 2016

Purpose: The purpose of this animal study was to perform a 3-dimensional micro-computed tomography (micro-CT) analysis in order to investigate the influence of root surface distance to the alveolar bone and the periodontal ligament on periodontal wound healing after a guided tissue regeneration (GTR) procedure. Methods: Three adult Sus scrofa domesticus specimens were used. The study sample included 6 teeth, corresponding to 2 third mandibular incisors from each animal. After coronectomy, a circumferential bone defect was created in each tooth by means of calibrated piezoelectric inserts. The experimental defects had depths of 3 mm, 5 mm, 7 mm, 9 mm, and 11 mm, with a constant width of 2 mm. One tooth with no defect was used as a control. The defects were covered with a bioresorbable membrane and protected with a flap. After 6 months, the animals were euthanised and tissue blocks were harvested and preserved for micro-CT analysis. Results: New alveolar bone was consistently present in all experimental defects. Signs of root resorption were observed in all samples, with the extent of resorption directly correlated to the vertical extent of the defect; the medial third of the root was the most commonly affected area. Signs of ankylosis were recorded in the defects that were 3 mm and 7 mm in depth. Density and other indicators of bone quality decreased with increasing defect depth. Conclusions: After a GTR procedure, the periodontal ligament and the alveolar bone appeared to compete in periodontal wound healing. Moreover, the observed decrease in bone quality indicators suggests that intrabony defects beyond a critical size cannot be regenerated. This finding may be relevant for the clinical application of periodontal regeneration, since it implies that GTR has a dimensional limit.