• Title/Summary/Keyword: Piezoelectric pump

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Fabrication of the Liquid Analyzer us ing Micro-stereolithography Technology (Micro-stereolithography 기술을 이용한 용액분석 소자 제작)

  • 이영태
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.12
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    • pp.994-1000
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    • 2001
  • In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.

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The Flow Analysis and Evaluation of the Peristaltic Micropump (마이크로 정량펌프의 유동해석과 작동성능 평가)

  • 박대섭;최종필;김병희;장인배;김헌영
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.2
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    • pp.195-202
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    • 2004
  • This paper presents the fabrication and evaluation of mechanical behavior for a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, the middle plate, the upper plate and the tube that connects inlet and outlet of the pump. The lower plate includes the channel and the chamber, and the plain middle plate are made of glass and actuated by the piezoelectric translator. Channels and a chamber on the lower plate are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The upper plate does the roll of a pump cover and has inlet/outlet/electric holes. Three plates are laminated by the aligner and bonded by the anodic bonding process. Flow simulation is performed using error-reduced finite volume method (FVM). As results of the flow simulation and experiments, the single chamber pump has severe flow problems, such as a backflow and large fluctuation of a flow rate. It is proved that the double-chamber micropump proposed in this paper can reduce the drawback of the single-chamber one.

Fundamental Study on Cathodic Protection and Material Development as Erosion-Control Methods of Oceanic Centrifugal Pump(1) (해상용 원심펌프 임펠러의 침식억제법으로 음극방식 및 재료개발에 관한 기초연구 1)

  • 이진열;임우조
    • Journal of Advanced Marine Engineering and Technology
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    • v.19 no.2
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    • pp.56-66
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    • 1995
  • Recently, with theraped advancement in th oceanology such an ocean-going vessel and oceanic structures, there is a need to study the cavitation erosion-corrosion control of pump impeller, the partial element of ocean machinery, for more effective operation. Especially, the cathodic protection (impressed current method & Al-sacrificial anode method) was applied to sea water, and Cu-alloy material mixed Zn & Al was used as a control method of cavitation erosion-corrosion. In this study, used the piezoelectric vibrator with 20KHz, 24.mu.m to cavity generation apparatus, and investigated the weight loss, weight loss rate, electrode potential & current density etc. under this condition. According to test result, thos describes how to indentify an influence of the cathodic protection and Al & Zn addition in material development for the control of cavitation erosion-corrosion, and those will serve as fundamental data on the cavitation erosion-corrosion control of oceanic centrifugal pump.

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Performance Evaluation of a Bidirectional Piezoelectric Hybrid Actuator (양방향 압전-유압 하이브리드 구동장치의 성능 시험)

  • Jin, Xiaolong;Ha, Ngocsan;Goo, Namseo;Bae, Byungwoon;Kim, Taeheun;Ko, Hanseo;Lee, Changseop
    • Journal of the Korea Institute of Military Science and Technology
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    • v.18 no.3
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    • pp.213-219
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    • 2015
  • Piezoelectric-based hydraulic actuator is a hybrid device consisting of a hydraulic pump driven by piezoelectric stacks that is coupled to a conventional hydraulic cylinder via a set of fast-acting valves. Nowadays, such hybrid actuators are being researched and developed actively in many developed countries by requirement of high performance and compact flight system. In this research, a piezoelectric hybrid actuator has been designed and tested. To achieve bi-directional capabilities in the actuator, solenoid valves were used to control the direction of output fluid. The experimental testing of the actuator in uni-directional and bi-directional modes was performed to examine performance issues related to the solenoid valves. The results showed that the bi-directional performance was slightly lower than uni-directional performance due to air bubble developed in the valve system. A new design to solve the vacuum problem has been proposed to improve the performance of the hybrid actuator.

Electro-Fluid-Structural Interaction Simulation of a Valveless Micropump (시뮬레이션을 통한 무밸브 마이크로 펌프의 전기-유체-구조 상호작용에 대한 연구)

  • Li, Guang-Zhe;Goo, Nam-Seo;Han, Cheol-Heui
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.36 no.1
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    • pp.7-13
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    • 2008
  • In this paper, the pumping performance of a piezoelectric valveless micropump is simulated with a commercial finite element analysis software, COMSOL Multiphysics. The micropump developed in the previous work is composed of a 4-layer lightweight piezo-composite actuator (LIPCA), a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, structural domain and fluid domain are coupled in the simulation. Water flow rates are numerically predicted for geometric parameters of the micropump. Based on this study, the micropump is optimally designed to obtain its highest pumping performance.

바이오응용을 위한 압전 공진형 MEMS 소자

  • Kim Yong Bum;Kim Hyung Joon;Kang Ji-Yoon;Kim Tae Song
    • 한국가시화정보학회:학술대회논문집
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    • 2002.04a
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    • pp.1-7
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    • 2002
  • This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

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An Active Voltage Doubling Rectifier with Unbalanced-Biased Comparators for Piezoelectric Energy Harvesters

  • Liu, Lianxi;Mu, Junchao;Yuan, Wenzhi;Tu, Wei;Zhu, Zhangming;Yang, Yintang
    • Journal of Power Electronics
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    • v.16 no.3
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    • pp.1226-1235
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    • 2016
  • For wearable health monitoring systems, a fundamental problem is the limited space for storing energy, which can be translated into a short operational life. In this paper, a highly efficient active voltage doubling rectifier with a wide input range for micro-piezoelectric energy harvesting systems is proposed. To obtain a higher output voltage, the Dickson charge pump topology is chosen in this design. By replacing the passive diodes with unbalanced-biased comparator-controlled active counterparts, the proposed rectifier minimizes the voltage losses along the conduction path and solves the reverse leakage problem caused by conventional comparator-controlled active diodes. To improve the rectifier input voltage sensitivity and decrease the minimum operational input voltage, two low power common-gate comparators are introduced in the proposed design. To keep the comparator from oscillating, a positive feedback loop formed by the capacitor C is added to it. Based on the SMIC 0.18-μm standard CMOS process, the proposed rectifier is simulated and implemented. The area of the whole chip is 0.91×0.97 mm2, while the rectifier core occupies only 13% of this area. The measured results show that the proposed rectifier can operate properly with input amplitudes ranging from 0.2 to 1.0V and with frequencies ranging from 20 to 3000 Hz. The proposed rectifier can achieve a 92.5% power conversion efficiency (PCE) with input amplitudes equal to 0.6 V at 200 Hz. The voltage conversion efficiency (VCE) is around 93% for input amplitudes greater than 0.3 V and load resistances larger than 20kΩ.

Three Dimensional Electro-Fluid-Structural Interaction Simulation for Pumping Performance Evaluation of a Valveless Micropump (무밸브 마이크로 펌프의 성능평가를 위한 3차원 전기-유체-구조 상호작용 해석)

  • Pham, My;Phan, Van Phuoc;Han, Cheol-Heui;Goo, Nam-Seo
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.37 no.8
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    • pp.744-750
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    • 2009
  • In this study, the pumping performance of a piezoelectric valveless micropump is simulated. The micropump, which was developed in the previous work, is composed of a four-layer lightweight piezocomposite actuator, a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, the fluid domain and the structural domain are coupled in the three-dimensional simulation. We used ANSYS for the piezoelectric and structural domains and ANSYS CFX for the fluid domain. The effects of driven frequency on the flow rate have been investigated by simulating the flow characteristics for 10 Hz and 40 Hz driven frequencies. The flow rates with respect to driven frequencies up to 300 Hz have been calculated.

UV emission characterization of ZnO thin films depending on the variation of oxygen pressure (분위기 산소압변화에 따른 ZnO박막의 UV발광 특성분석)

  • Bae, Sang-Hyuck;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1523-1525
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    • 1999
  • ZnO is a wide-bandgap II-VI semiconductor and has a variety of potential application. ZnO exhibits good piezoelectric, photoelectric and optic properties, and is good for a electroluminescence device. ZnO films have been deposited at (0001) shappire by PLD technique. Chamber was evacuated by turbomolecular pump to a base pressure of $1{\times}10^{-6}$ Torr Nd:YAG pulsed laser was operated at ${\lambda}=355nm$. The ZnO films were deposited at oxygen pressures from base to 500 mTorr. The substrate temperatures was increased from $200^{\circ}C$ to $700^{\circ}C$. At aleady works, UV emission and green-yellow PL was observed. In this work, ZnO films showed UV, violet, green and yellow emissions. UV emission was enhanced by increasing partial oxygen pressure. We investigated relationship between partial oxygen pressure and UV emission.

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Effect of Cathodic Protection on Erosion-Corrosion Control in Alloy Metals of Marine Bearing (舶용 베어링 합금재의 침식-부식억제에 미치는 음극방식의 효과)

  • 임우조;이진열
    • Tribology and Lubricants
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    • v.11 no.1
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    • pp.58-65
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    • 1995
  • When marine lubricating oil began to be emulsified and oxidized through ingressive water that have leaked from cooling pump seal systems, cooler, purifier system and piping system, the cavitation erosion-corrosion in alloy metals of bearings remains to the various troublesome problem at effective engine performance. Therefore, applied the cathodic protection to the control test of cavitation erosion-corrosion, and appointed the marine system oil containing 3% sea water as test environments, with different conductibility. Also, used the piezoelectric vibrator with 20 KHz, 24 $\mu$m as the cavity generation apparatus, and examined the weight loss, potential value, current density etc. in specimens with those condition. According to this testing data, investigated influence of cathodic protection on the control characteristics of cavitation erosion-corrosion, and will serve those as an elementary design data of marine bearing.