Fabrication of the Liquid Analyzer us ing Micro-stereolithography Technology

Micro-stereolithography 기술을 이용한 용액분석 소자 제작

  • 이영태 (안동대학교 전기전자공학교육과)
  • Published : 2001.12.01

Abstract

In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.

Keywords

References

  1. Transducers '95 LIGA and related technologies for industrial application W.Menz
  2. J. Micromech. Microeng. v.5 High-rate directional deep dry etching for bulk silicon micromachining M.Esashi;M.Takinami;Y.Wakabayashi;K.Minami
  3. Sensors and Actuators v.73 3D microfabrication by combining microstereolithography and thick resist UV lithography A.Bertsch;H.Lorenz;P.Renaud
  4. MEMS 2000 Fluid drive chips containing multiple pump and switching valves for biochemical IC family Koji Ikuta;Tadahiro Hasegawa;Takao Adachi;Shoji Maruo
  5. MEMS 2001 3D micromixers-downscaling large scale industrial static mixers Arnaud Bertsch;Staphan Heimgartner;Peter Cousseau;Philippe Renaud
  6. MEMS 2000 An intergrated micro-electrophoretic chip fabricated using a new stereolithographic process Yoshiaki Mizukami;Daniel Rajniak;Masatoshi Nishimura
  7. MEMS 2001 In-chip cell-free protein synthesis from DNA by using biochemical IC chip Koji Ikuta;Atsushi Takahashi;Shoji Maruo
  8. 전기전자재료학회논문지 v.14 no.2 새로운 ICP 장치를 이용한 고온 초전도체의 dry etching과 기존의 wet etching 기술과의 비교 강형곤;임성훈;임연호;한윤봉;황종선;한병성
  9. 전기전자재료학회논문지 v.14 no.2 단결정 6H-SiC의 광전 화학습식식각에 대한 연구 송정균;정두찬;신무환
  10. 전기전자재료학회논문지 v.14 no.3 전기화학적 식각정지에 의한 고수율 실리콘 박막 멤브레인제작 정귀상;박진성;이원재;송재성
  11. 한국센서학회지 v.10 no.4 Stereolithography 기술을 이용한 마이크로 펌프 제작 이영태;서희돈
  12. Microelectromechanical System(MEMS)ASME 1997 Design high-performance micro-pumps based on no-moving-parts valves Ron L.Bard;Nigel R.Sharma;Fred K.Forster;Martin A.Afromowitz;Robert J.Penney
  13. Sensors and Actuators v.A46-47 A valve-less planar fluid pump with two pump chamber Anders Olsson;Goran Stemme;Erik stemme
  14. Micro Total Analysis System '98 Micromixer incorporated with piezoelectrically driven valveless micropump Z.Yang;H.Goto;M.Matsumoto;T.Yoda
  15. Technical Digest of the 9th Sensor Symposium Photoetching and electrochemical discharge drilling of pyrex glass Shuichi Shoji;Masayoshi Esashi
  16. 한국전기전자재료학회추계학술대회 논문집 v.14 no.1 전해 방전법에 의한 유리의 미세 구멍 가공 이환훈;이영태