바이오응용을 위한 압전 공진형 MEMS 소자
- Kim Yong Bum (Department Microsystem Research Center, Korea Institute of Science and Technology) ;
-
Kim Hyung Joon
(Department Microsystem Research Center, Korea Institute of Science and Technology)
;
-
Kang Ji-Yoon
(Department Microsystem Research Center, Korea Institute of Science and Technology)
;
-
Kim Tae Song
(Department Microsystem Research Center, Korea Institute of Science and Technology)
- 김용범 (한국과학기술연구원 마이크로시스템 연구센터) ;
-
김형준
(한국과학기술연구원 마이크로시스템 연구센터)
;
-
강지윤
(한국과학기술연구원 마이크로시스템 연구센터)
;
-
김태송
(한국과학기술연구원 마이크로시스템 연구센터)
- Published : 2002.04.01
Abstract
This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.