This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

A number of research groups worldwide are studying electronic implants that can be mounted on retinal optic nerve/visual cortex to restore vision of patients suffering from retinal degeneration. The implants consist of a neural interface made of biocompatible materials, one or more integrated circuits for stimuli generation, a camera, an image processor, and a telemetric channel. The realization of these classes of neural prosthetic devices is largely due to the explosive development of micro- and nano-electronics technologies in the late $20^{th}$ century and biotechnologies more recently. Animal experiments showed promise and some human experiments are in progress to indicate that recognition of images can be obtained and improved over time. We, at NBS-ERC of SNU, have started our own retinal implant project in 2000. We have selected polyimide as the biomaterial for an epi-retinal stimulator. In-vitro and in-vivo biocompatibility studies have been performed on the electrode arrays. We have obtained good affinity to retinal pigment epithelial cells and no harmful effect. The implant also showed very good stability and safety in rabbit eye for 12 weeks. We have also demonstrated that through proper stimulation of inner retina, meaning vision can be obtained.

Most microfluidic devices such as heat sinks for cooling micro-chips, DNA chip, Lab-On-Chip, and micro pumps etc. have microchannels of various size. Therefore, the design of practical microfluidics demands detail information on flow structure inside the microchannels. However, detail velocity field measurements are rare and difficult to carry out. In addition, as the microfluidics expands, accurate understanding of microscale transport phenomena becomes very important. In this research, micro-PIV system was employed to measure the velocity fields of flow inside a micro-channel. We carried out PIV measurements for several microchannels with varying channels width, inlet and outlet shape, filters, CCD camera and ICCD camera, etc. For effective composition of micro-PIV system, first of all, it is essential to understand optics related with micro-imaging of particles and the particle dynamics encountered in micro-scale channel flows. In addition, it is necessary to find the optimal condition for given experimental environment and? micro-scale flow to be investigated. The problems encountered in measuring velocity field of micro-channel flows are discussed in this paper.