• 정보저장시스템학회논문집
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• 제2권2호
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• pp.96-99
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• 2006

In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• 한국전기전자재료학회논문지
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• 제34권6호
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• pp.480-486
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• 2021

Magnetoelectric (ME) composite is composed of a piezoelectric material and a magnetostrictive material. Among various ME structures, 2-2 type layered ME composites are anticipated to be used as high-sensitivity magnetic field sensors and energy harvesting devices especially operating at its resonance modes. Rosen type piezoelectric transducer using piezoelectric material is known to amplify a small electrical input voltage to a large electrical output voltage. The output voltage of these Rosen type piezoelectric transducers can be further enhanced by modifying them into ME composite structures. Herein, we fabricated Rosen type ME composites by sandwiching Rosen type PMN-PZT single crystal between two Ni layers and studied their ME coupling. However, the voltage step-up ratio at the resonance frequency was found to be smaller than the value calculated with α_ME value. The ATILA FEA (Finite Elements Analysis) simulation results showed that the position of the nodal point was changed with the presence of a magnetostrictive layer. Thus, while designing a Rosen type ME composite with high performance in a resonant driving situation, it is necessary to optimize the position of the nodal point by optimizing the thickness or length of the magnetostrictive layer.

• Smart Structures and Systems
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• 제12권1호
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• pp.55-71
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• 2013

Structural health monitoring (SHM) is vital for detecting the onset of damage and for preventing catastrophic failure of civil infrastructure systems. In particular, piezoelectric transducers have the ability to excite and actively interrogate structures (e.g., using surface waves) while measuring their response for sensing and damage detection. In fact, piezoelectric transducers such as lead zirconate titanate (PZT) and poly(vinylidene fluoride) (PVDF) have been used for various laboratory/field tests and possess significant advantages as compared to visual inspection and vibration-based methods, to name a few. However, PZTs are inherently brittle, and PVDF films do not possess high piezoelectricity, thereby limiting each of these devices to certain specific applications. The objective of this study is to design, characterize, and validate piezoelectric nanocomposites consisting of zinc oxide (ZnO) nanoparticles assembled in a PVDF copolymer matrix for sensing and SHM applications. These films provide greater mechanical flexibility as compared to PZTs, yet possess enhanced piezoelectricity as compared to pristine PVDF copolymers. This study started with spin coating dispersed ZnO- and PVDF-TrFE-based solutions to fabricate the piezoelectric nanocomposites. The concentration of ZnO nanoparticles was varied from 0 to 20 wt.% (in 5 % increments) to determine their influence on bulk film piezoelectricity. Second, their electric polarization responses were obtained for quantifying thin film remnant polarization, which is directly correlated to piezoelectricity. Based on these results, the films were poled (at 50 $MV-m^{-1}$) to permanently align their electrical domains and to enhance their bulk film piezoelectricity. Then, a series of hammer impact tests were conducted, and the voltage generated by poled ZnO-based thin films was compared to commercially poled PVDF copolymer thin films. The hammer impact tests showed comparable results between the prototype and commercial samples, and increasing ZnO content provided enhanced piezoelectric performance. Lastly, the films were further validated for sensing using different energy levels of hammer impact, different distances between the impact locations and the film electrodes, and cantilever free vibration testing for dynamic strain sensing.

• 한국건설순환자원학회논문집
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• 제12권2호
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• pp.162-168
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• 2024

본 연구에서는 전기역학적 임피던스(electro-mechanical impedance, EMI) 센싱기법을 통해 플라이애시를 치환한 시멘트 페이스트의 응결시점을 평가하였다. 시멘트 중량대비 10 %, 20 %, 30 %를 플라이애시로 치환하여 물-바인더비 40 %의 시멘트 페이스트를 제조하였다. 제조된 시멘트 페이스트에 압전 센서를 매립하여 압전 센서의 EMI 신호변화를 연속적으로 모니터링하였다. EMI 센싱기법의 유효성을 검증하기 위해 비카트침 시험과 간이단열 온도시험을 동시에 수행하였다. 실험결과, 시멘트 페이스트의 응결구간에서 압전센서의 EMI 공진피크와 공진주파수에서 주목할 만한 변화가 나타났다. EMI 센싱기법에서 측정된 응결시간은 비카트침 시험과 간이단열 온도시험에서 측정된 응결시간과 상관관계가 있음을 확인하였다.

• 한국구조물진단유지관리공학회 논문집
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• 제14권6호
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• pp.171-178
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• 2010

가스관, 송유관 등의 배관구조물은 주요자원의 수송을 책임지는 핵심 지하시설물 중 하나이다. 이들은 사고 및 자연적인 노후화로 인해 국부적인 손상이 발생할 위험에 노출 되어있다. 하지만 대부분의 배관구조물은 지하의 좁은 공간에 복잡하게 연결되어있기 때문에 구조물의 건전성을 지속적으로 모니터링 하는데 어려움이 있었다. 이러한 지금까지 관리방식의 한계점을 극복하기 위해 최근 유비쿼터스 센서 네트워크 기반의 온라인 방식의 상시적 구조물 건전성 평가방법에 대한 연구가 활발히 이뤄지고 있다. 본 논문에서는 전기-역학적 임피던스 기반의 실시간 배관 구조물 건전성 평가방법에 대하여 연구하였다. 배관 구조물에 발생하기 쉬운 볼트 풀림과 균열의 두 가지 국부손상을 가정하였고 압전효과를 가진 PZT와 MFC 센서를 이용하여 구조물의 상태에 따른 임피던스를 계측하여 손상탐색 실험을 수행하였다. 하나의 센서로 가진과 센싱을 동시에 수행할 수 있는 저비용 셀프센싱 기법을 사용하였고 배관 상태에 대한 객관적인 판단을 위해 손상지수인 RMSD 값을 사용하여 계측된 신호를 이용하여 손상의 정도를 정량화 시켰다. 손상여부의 판단을 위해 일반 극치 분포를 이용하여 최적화된 통계적인 정상상태의 임계값을 설정하였다. 위와 같은 실험적 연구과정을 통해 제안된 실시간 배관 구조물 건전성 평가 방법의 타당성과 효율성을 확인해 보았다.

• Journal of Advanced Marine Engineering and Technology
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• 제35권3호
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• pp.309-316
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• 2011

This paper deals with the experimental study of the vibration suppression of the smart structures. First, a new high-speed active control system is presented using the DSP320C6713 microprocessor. A peripheral system developed is composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA 95 for fast data processing. Next, the processing time of the peripheral device is tested and the corresponding test results are provided. Since fast data processing is very important in the active vibration control of the structures, achieving the fast loop times of the control system is focused. The control algorithm using PPF in addition to FIR filter is implemented. Finally, numerous experiments were carried out on the aluminum plate to validate the superior performance of the vibration control system at different control loop times.

• Journal of Advanced Marine Engineering and Technology
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• 제33권6호
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• pp.918-924
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• 2009

This paper deals with the experimental assessment of the vibration suppression of the smart structures. First, we have presented the paper about the new high-speed active control system that we have developed using the DSP320C6713 microprocessor and a peripheral system composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA95. Since fast data processing is very important in the active vibration control of the structures, we utilized the fast processing DSP320C6713 microprocessor as a main processor to the controller and fast peripheral devices for fast control loop. To realize a fast active vibration control, we have analyzed and tested the processing time of the peripheral devices and provided the corresponding test results. Especially, we have focused on achieving the fast signal amplification of the PA95 device since it takes most of loop times of the control system. Finally, we performed numerous experiments of active vibration control of the aluminum plate to validate the superior performance of the developed control system based on previous mode tests of the plate.

• 한국음향학회지
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• 제9권4호
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• pp.18-32
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• 1990

최근 신호 처리 기기와 센서로서 각광을 받고 있는 SAW Device 는 때론 목적에 따라 수중에서 사용해야 할 때가 있다. 그러나 유체내의 고체 표면을 전파하는 표면파의 경우, 유체내로의 에너지 손실로 인해 설계상에 많은 어려움을 주고 있다. 따라서 본 연구에서는 이러한 어려움을 극복할 수 있는 최적 설계법으로서, 컴퓨터 모형해석을 통해 수중에서 압전물질에 의한 표면파의 최대 발진 효율, 최소 전파 감쇄율, 그리고 pure mode 전파를 이룰 수 있는 SAW Device 의 최적 geometry, 즉 초적 압전 결정 평면, 표면과 전파 방향, 그리고 무차원 전파 계수 들을 구하였다. 본 논문에서는 표면파가 전파하는 고체 재료로서 PZT와 PVDF 적층, 그리고 쇠 하부층을 사용하였으나, 이 설계법은 임의의 유체층과 고체층의 조합에도 적용할 수 있다. 동일한 기술은 수중음향 계측기, antifouling, 그리고 산업 및 의료 분야 등에 쓰이는 센서와 발진기의 설계에도 바로 응용할 수 있다.

• 한국전산구조공학회논문집
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• 제24권5호
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• pp.553-567
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• 2011

최근 3년간 판 구조물 건전성 감시분야에서 시간반전램파(Time reversal Lamb waves)의 가능성이 주목받고 있다. 이 연구에서는 직사각형 평판에서 시간반전램파의 공간모임을 적은 연산비용으로 효과적으로 모사할 수 있는 수치기법을 제안한다. 제안된 기법에서는 파 반사에 의해 발생하는 실제 탐지자의 거울상 효과와 등가를 이루는 활성 가상탐지자를 이용하여 시간반전과정을 주파수 영역에서 정식화한다. 시간반전램파의 공간모임 모사에서 필요한 순방향 및 역방향 파 전달은 스칼라 형태의 함수로 표현한다. 제안된 방법을 웨이퍼 형태의 압전소자가 병치된 직사각형 평판에서 시간반전램파의 공간 모임 문제에 적용하고 유한요소해석 결과와 비교하여 타당성을 검증한다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.194-194
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• 2008

Lead oxide based ceramics, represented by PZT, are the most widely used materials for piezoelectric actuators, sensors, and transducers due to their excellent piezoelectric properties. In particular, high-performance multilayered piezoelectric ceramics for advanced electronic components have drawn great attention. In order to develop piezoelectric ceramics capable of being sintered at low temperature for multilayer piezoelectric device applications, the effect of CuO additions on the microstructures and electromechanical properties of the 0.4Pb$(Mg_{1/3}Nb_{2/3})O_3-0.25PbZrO_3-0.35PbTiO_3$ ceramics was investigated. The samples with CuO addition were synthesized by ordinary sintering technique. X-ray diffractions indicated that all samples formed a single phase perovskite structure. The addition of CuO improved the sinterability of the samples and caused an increase in the density and grain size at low temperature. The optimum sintering temperature was lowered by CuO additions. Excellent piezoelectric and electromechanical responses, $d_{33}$ ~ 663 pC/N, $k_p$ ~ 0.72, were obtained for the samples of high density with 0.1 wt% CuO addition sintered at $1050^{\circ}C$ for 4 h in air. These results show that the piezoelectric properties of PMNZT ceramics can be improved by controlling the microstructure and this system is potentially a good candidate as multilayer piezoelectric device for a wide range of electro-mechanical transducer applications.