• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.735-738
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• 2003

Downsizing electronics requires precision position control with an accuracy of sub-micron order, which demands development of ultra-fine displacive devices. Piezoelectric transducer is one of devices transferring electric field energy into mechanical energy and being capable for fine displacement control. The transducer has been widely used as fine Position control device Multilayer piezoelectric actuator, one of typical piezo-transducer, is fabricated by stacking alternatively ceramic and electrode layers several hundred times followed by cofiring process. Electrode material should be tolerable in the firing process maintaining at ceramic-sintering temperatures up to $1100{\sim}1300^{\circ}C$. Ag-Pd can be used as stable electrode material in heat treatment above $960^{\circ}C$. Besides, adding small quantity ceramic powder allow the actuator to be fabricated in a good shape by diminishing shrinkage difference between ceramic and electrode layers, resulting in avoidance of crack and delamination at and/or nearby interface between ceramic an electrode layers. This study presents synthesis of nano-oxide-added Ag/Pd powders and its feasibility to candidate material tolerable at high temperature. The powders were formed in a co-precipitation process of Ag and Pd in nano-oxide-dispersed solution where Ag and Pd precursors are melted in $HNO_3$ acid.

• International Journal of Precision Engineering and Manufacturing
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• 제1권2호
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• pp.76-83
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• 2000

A study on the robust control of a composite beam with a distributed PVDF sensor and piezo-ceramic actuator is presented in this paper. $1^{st}$ and $2^{nd}$ natural frequencies are considered in the modeling, because robust control theory which has robustness to structured uncertainty is adopted to suppress the vibration. If the controllers designed by $H_{\infty}$ theory do not satisfy control performance, it is improved by $\mu$-synthesis method with D-K iteration so that the $\mu$-controller based on the structured singular value satisfies the nominal performance and robust performance. Simulation and experiment were carried out with the designed controller and the verification of the robust control properties was presented by results.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.90.3-90
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• 2002

$\textbullet$ Introduction of fuzzy logic controller for dynamic system under irregular disturbance $\textbullet$ Fuzzy rules by displacement information and the frequency characteristics of the system $\textbullet$ Modal analysis for the frequency informations of the system $\textbullet$ Introduction of mode selecting unit(MSU) based on Fast-Fourier transform(FFT) algorithm $\textbullet$ Piezo ceramic as an actuator of flexible structure

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1275_1276
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.22.5-22
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• 2001

Robust control of a GFR composite beam with a distributed PVDF sensor and piezo-ceramic actuator is presented En this paper. Modal analysis method and modal coordinates are introduced to obtain the state educations of the structural system. 1st and 2nd natural frequencies are considered In the modeling, because robust control theory which is robustness to structured uncertainty is adopted to suppress the vibration. If the controllers designed by H$\^$$\infty$/ theory do not satisfy control performance, it is improved by ${\mu}$-synthesis method with D-K Iteration so that the ${\mu}$-controller based on the structured singular value satisfies the nominal performance and robust performance.

• 한국전기전자재료학회논문지
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• 제21권4호
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• pp.335-340
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• 2008

In this study, novel structured thin ultrasonic rotary motor has been proposed. Ultrasonic motors are based on an elliptical motion on the surface of elastic body. Thin brass plate was used as a cross shaped vibrator and eight ceramic plates were attached on upper side and bottom side of the brass plate. From the thin stator, elliptical displacements of the four contact tips were obtained. To find the optimal size of the stator, motions of the motors were simulated using ATILA by changing length, width and thickness of the ceramics. The stators had commonly three resonance peaks and contact tips of the stator moved on tangential or normal trajectories at these resonance peaks. The maximum displacements at the resonance peaks were compared. As results, maximum displacements of the contact tips were obtained at the length of 16 mm, width of 6 mm and thickness of 0.4 mm. Changes of the resonance frequencies were inversely proportional to the length of ceramic and proportional to the width of ceramic. The motor was fabricated by using the designed stator. And, the characteristics of the motor were compared with the simulated results. When the motor was fabricated with these results, speed fo 935 rpm was obtained by input voltage of 25 Vrms at 93.5 kHz.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.946-949
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• 2003

This paper reports on the fluid flow simulation results of a multilayer type piezoelectric valve. The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed type using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a MLCA(Multilayer Type Ceramic Actuator). It is confirmed that the complete laminar flow and the lowest flow leakage are strongly depend on the valve seat geometry. In addition, turbulent flow was occurs in valve outlet according to increase seat dimension, height and inlet pressure. From this, we was deducts the optimum geometry of the valve seat and diaphragm deflection that have an great influence fluid flow in valve. Thus, it is expected that our simulation results would be apply for piezoelectric applications such as valve and pump, fluidic control systems.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.498-498
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• 2000

A study on the robust control of a composite beam with a distributed PVDF sensor and piezo-ceramic actuator is presented in this paper. 1st and 2nd natural frequencies are considered in the modeling, because robust control theory which has robustness to structured uncertainty is adopted to suppress the vibration. If the controllers designed by H$_{\infty}$ theory do not satisfy control performance, it is improved by $\mu$-synthesis method with D-K iteration so that the $\mu$-controller based on the structured singular value satisfies the nominal performance and robust performance. Simulation and experiment were carried out with the designed controller and the verification of the robust control properties was presented by results.