• 한국수소및신에너지학회논문집
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• 제21권1호
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• pp.35-41
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• 2010

Water management is an important issue of PEM fuel cell operation. Water is the product of the electrochemical reactions inside fuel cell. If liquid water accumulation becomes excessive in a fuel cell, water columns will clog the gas flow channel. This condition is referred to as flooding. A number of researchers have examined the water removal methods in order to improve the performance. In this paper, a new water removal method that investigates the use of vibro-acoutic methods is presented. Piezo-actuators which are devices to generate the flexural wave are attached at the end of a cathode bipolar plate. Flexural wave is used to impart energy to resting droplets and thus cause movement of the droplets in the direction of the traveling wave.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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• pp.959-961
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• 1999

ZnO thin films are deposited by using an RF magnetron sputtering system. Structural and electrical properties are analyzed as a function of deposition conditions, such as RF power, Ar/($Ar+O_2$) ratio, and substrate temperature. The c-axial growth of ZnO is observed to be preferable to the $SiO_2$/Si substrate, rather than the Si substrate. By adding the oxygen gas during deposition, the electrical resistivity of films is increased, but the c-axial growth is inhibited. A pizoelectric resonator of Al/ZnO/Al is also fabricated to estimate the electric-mechanical coupling coefficient($k^2$) of ZnO film. The value of $k^2$ obtained from our work is about 10.14 %.

• 대한기계학회논문집B
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• 제26권1호
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• pp.74-81
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• 2002

Combustion phenomena in a sub-millimeter scale combustor have been investigated. To evaluate scale effect on flame propagation characteristics, a cylindrical combustion chamber with variable depth was built in-house. The combustor was charged with premixed gas of hydrogen and air and ignited electronically. A piezo electric pressure transducer recorded transient pressure after the ignition. Measurements were made at different test conditions specified with chamber depth and initial pressure as parameters. Visual observation was made through a quartz glass window on top side of the combustion chamber using high speed digital video camera. From the pressure data, available work was estimated and compared with energy input required for stable ignition. The preliminary results suggested that the net thermal energy release is sufficient to generate power and enables a combustor of the size in the present study to be used as the energy source of a micro power devices .

• 설비공학논문집
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• 제27권10호
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• pp.552-557
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• 2015

The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.

• 한국소음진동공학회논문집
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• 제18권11호
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• pp.1134-1142
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• 2008

In this paper, a model-based stick-slip compensation for the micro-positioning is proposed using an enhanced stick-slip model based on statistical rough surface contact model. The smart structure is comprised with PZT(lead (Pb) zirconia(Zr) Titanate(Ti)) based stack actuator incorporating with the PID(proportional-integral-derivative) control algorithm, mechanical displacement amplifier and positioning devices. For the stick-slip compensation, the elastic-plastic static friction model is used considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model of system for the positioning apparatus was derived from the dynamic behaviors of structural parts. PID feedback control algorithms with the developed stick-slip model as well as feedforward friction compensator are formulated for achieving the accurate positioning performance. Experimental results are provided to show the performances of friction control using the developed positioning apparatus.

• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.142-147
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• 2022

After introducing Hybrid Bonding technology into image sensors using stacked sensors and image processors, large quantity production became possible. As a result, it is currently used in most of the CMOS image market in smartphones and other image-based devices worldwide, and almost all stacked CIS manufacturing sites have focused on miniaturization using hybrid bonding. In this study, an upper wafer handling module for Wafer to Wafer Hybrid Bonding developed to increase the alignment and precision between wafers when wafer bonding. The module was divided two parts to reduce error of both the alignment and degree of precision during wafer bonding. Wafer handling module developed both new Tip/Tilt system controlling θx,θy of upper wafer and striker to push upper wafer. Based on this, it was confirmed through the stability evaluation that the upper wafer handling module can be controlled without any problem during W2W hybrid bonding.

• 대한전자공학회논문지SD
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• 제42권11호
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• pp.1-8
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• 2005

본 논문은 MEMS (Micro-Mechanical-Electronic System) 기술을 이용한 온도, 압력, 습도 복합 센서의 설계와 제작, 그리고 평가에 관한 것이다. 이러한 MEMS 복합 센서는 휴대 전화나 PDA와 같이 가정용 제품에 사용되어 환경을 모니터링하는 건강 측정용 센서로서 사용될 것이다. 이 연구의 범위는 이러한 개별 센서의 연구 및 모든 센서를 하나의 실리콘 웨이퍼 상에서 집적할 수 있는 구조에 관한 연구, 그리고 복합 센서를 MEMS 공정에서 제작할 수 있는 공정 호환성에 대한 연구와 얻어진 센서 prototype의 측정, 평가로 이루어져 있다. 이 연구에서 우리는 온도와 압력 센서의 경우에는 선형성과 이력특성이 $1\%FS$안에 들어오는 특성을 얻었으며 단지 습도 센서의 경우에는 $5\%FS$에 해당하는 선형성과 이력 특성을 얻었다. 다만 원리적으로 습도 센서의 동작 특성은 비선형적이며 우리가 3차로 근사화할 경우에 보다 낳은 결과를 얻을 것을 기대할 수 있다. 이러한 특성을 더욱 개선하기 위한 것은 추후의 연구 영역이 될 것이다.

• 대한심미치과학회지
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• 제28권2호
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• pp.64-73
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• 2019

심한 치조골의 위축과 흡수로 인한 형태학적 변화는 임플란트의 성공적인 식립과 임플란트의 골유착에 영향을 미친다. 이를 극복하기 위한 다양한 골증대술 중 치조제분할술은 좁은 치조골 폭을 성공적으로 증대시키는 수술방법으로 보고되었다. 또한 다양하게 개발되는 임플란트 디자인과 치조제 팽창 기구 등은 심하게 흡수된 위축된 하악부위에서도 협측골 파절을 최소화할 수 있다. 가철성 부분의치의 사용으로 심하게 흡수된 하악 구치부에 치조제 분할술과 최소 크기의 블록형 골이식술을 이용해 한개의 스크류로 수용부의 고정을 획득한 후 동시적 접근법을 이용한 골이식 증례를 보고 하고자 한다. 보철과와 치주과의 협업으로 환자의 기능과 심미를 회복해준 증례로 사료된다.

• 한국전자통신학회논문지
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• 제13권5호
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• pp.1093-1100
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• 2018

웨어러블 기기에서 반도체의 소형화 및 저전력 기술이 빠르게 진행됨에 따라 다양한 초소형 형태의 응용서비스를 제공할 수 있게 되었다. 최근에는 태양열, 피에조, 마찰 등 다양한 에너지 하베스터를 이용해 저전력 반도체는 매우 낮은 전원으로도 동작할 수 있게 되었다. 웨어러블 상황에서의 대부분에 에너지 하베스팅은 비연속적(non-linear)으로 발전된다. 이에 따라 본 연구에서는, 3Hz의 낮은 주파수기반 디바이스 플랫폼을 제작하여 실험적으로 평가하였다. 본 연구는 비연속적 발전 환경을 고려해, 2단계의 저장환경과 사용된 에너지 발전소자의 맞춘 에너지 고효율 변환 플랫폼 설계하였다. 또한, 비연속적 에너지 수집 환경에서 안정적인 에너지를 저장 유지를 통해 약 4.67mW/min 발전하였다.

• 한국전기전자재료학회논문지
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• 제32권5호
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• pp.418-425
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• 2019

A piezoelectric ceramic fiber composite (PCFC) was successfully fabricated using $0.69Pb(Zr_{0.47}Ti_{0.53})O_3-0.31[Pb(Zn_{0.4}Ni_{0.6})_{1/3}Nb_{2/3}]O_3$ (PZT-PZNN) for use in small-scale wind energy harvesters. The PCFC was formed using an epoxy matrix material and an array of Ag/Pd-coated PZT-PZNN piezo-ceramic fibers sandwiched by Cu interdigitated electrode patterned polyethylene terephthalate film. The energy harvesting performance was evaluated in a custom-made wind tunnel while varying the wind speed and resistive load with two types of flutter wind energy harvesters. One had a five-PCFC array vertically clamped with a supporting acrylic rod while the other used the same structure but with a five-PCFC cantilever array. Stainless steel (thickness: $50{\mu}m$) was attached onto one side of the PCFC to form the PZT-PZNN cantilever. The output power, in general, increased with an increase in the wind speed from 2 m/s to 10 m/s for both energy harvesters. The highest output power of $15.1{\mu}W$ at $14k{\Omega}$ was obtained at a wind speed of 10 m/s for the flutter wind energy harvester with the PZT-PZNN cantilever array. The results presented here reveal the strong potential for wind energy harvester applications to supply sustainable power to various IoT micro-devices.