• Tribology and Lubricants
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• v.38 no.6
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• pp.247-254
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• 2022

Chemical mechanical polishing (CMP) is a hybrid surface-polishing process that utilizes both mechanical and chemical energy. However, the recently emerging semiconductor substrate and thin film materials are challenging to process using the existing CMP. Therefore, previous researchers have conducted studies to increase the material removal rate (MRR) of CMP. Most materials studied to improve MRR have high hardness and chemical stability. Methods for enhancing the material removal efficiency of CMP include additional provision of electric, thermal, light, mechanical, and chemical energies. This study aims to introduce research trends on CMP using ultraviolet (UV) light to these methods to improve the material removal efficiency of CMP. This method, photocatalysis-assisted chemical mechanical polishing (PCMP), utilizes photocatalytic oxidation using UV light. In this study, the target materials of the PCMP application include SiC, GaN, GaAs, and Ru. This study explains the photocatalytic reaction, which is the basic principle of PCMP, and reviews studies on PCMP according to materials. Additionally, the researchers classified the PCMP system used in existing studies and presented the course for further investigation of PCMP. This study aims to aid in understanding PCMP and set the direction of future research. Lastly, since there have not been many studies on the tribology characteristics in PCMP, research on this is expected to be required.

• Journal of Korean Society on Water Environment
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• v.35 no.6
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• pp.550-556
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• 2019

This study was carried out to improve the photocatalytic reaction of TiO₂ photocatalyst. During the photocatalytic reaction, OH radicals are generated and they have an excellent oxidation capability for wastewater treatment. To evaluate the OH radicals generated according to crystallographic structure of TiO₂ nanotubes photocatalyst, a probe compound, 4-Chlorobenzoic acid was monitored to evaluate OH radical. Ultraviolet light was applied for photocatalytic reaction of TiO₂. The 4-Chlorobenzoic acid solution was prepared at laboratory. TiO₂ nanotube was grown on titanium plate by using anodization method. The annealing temperature for TiO₂ nanotube was varied from 400 to 900 ℃ and the crystal forms of the TiO₂ nanotube was analyzed. Depending on annealing temperature, TiO₂ nanotubes have shown different crystal forms; 100% anatase (0 % rutile), 18.4 % rutile (81.6 % anatase), 36.6 % rutile (63.4 % anatase) and 98.6% rutile (1.4% anatase). As the annealing temperature increases, the rutile ratio increases. OH radical generation from 18.4 % rutile TiO₂ nanotube plate was about 3.8 times higher than before annealing and 1.4 times higher than only 100 % anatase-TiO₂ nanotube. The efficiency of the 18.4% rutile TiO₂ nanotube was the best in comparison to TiO₂ nanotube with 18.4 %, 36.6 % and 98.6 % rutile. As a result, photocatalytic ability of 18.4 % rutile-TiO₂ nanotube plate was higher than 100 % anatase-TiO₂ nanotube plate.

• Journal of the Korean Ceramic Society
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• v.49 no.2
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• pp.135-141
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• 2012

To improve the visible-light induced photocatalytic application performances of $TiO_2$, in this study, the $NiS_2$ modied $TiO_2$ composites were prepared by two methods: hydrothermal method and sol-gel method. The composites were denoted as hs-$NiS_2$/$TiO_2$, and sg-$NiS_2$/$TiO_2$ and characterized by XRD, UV-vis absorbance spectra, SEM, TEM, EDX, and BET analysis. The photocatalytic activities under visible light were investigated by the degradation of methyl orange (MO). The photodegradation rate of methyl orange under visible light with $NiS_2$/$TiO_2$ composites was markedly higher than that of pure $TiO_2$, and the effect of hs-$NiS_2$/$TiO_2$ composites was better than that of sg-$NiS_2$/$TiO_2$. The results indicate that the hydrothermal process could partly inhibit the agglomeration of $NiS_2$/$TiO_2$. Thus, the dispersion of nanoparticles was improved, and that the promoting effect of $NiS_2$ could extend the light absorption spectrum toward the visible region.

• Journal of the Korean Ceramic Society
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• v.38 no.7
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• pp.621-627
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• 2001

알루미나 졸에 평균 25nm의 TiO$_2$(Degussa P25) 광 촉매 분말을 분산하여 광촉매 코팅제를 제조하였다. 점도 약 24 cps를 가지 4.4 wt%의 알루미나 졸로부터 약 300nm 두께의 코팅막이 제조되었으며, 졸 점도의 증가에 비례하여 코팅막의 두께도 증가하였다. TiO$_2$광 촉매의 코팅용 바인더로 이용한 알루미나 졸의 결정형은 25~30$0^{\circ}C$에서 pseudo boehmite (AlOOH)이었으며, 50$0^{\circ}C$ 이상에서는 ${\gamma}$-Al$_2$O$_3$으로 전환되었다. AlOOH/TiO$_2$코팅막은 oleic acid와 humic acid에 대한 기상 및 수상 조건에서의 광 촉매 실험에서 우수한 유기물의 광분해 효능을 나타내었다. 아울러 EGI(Electro-Galvanized Iron)에 코팅된 AlOOH/TiO$_2$코팅막은 내식성 및 내지문성의 효과도 부수적으로 나타내었다.

• Analytical Science and Technology
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• v.9 no.1
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• pp.62-71
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• 1996

The enhancement of the solar energy conversion efficiency into the electrical energy by the dye sensitization with a photoelectrochemical cell was studied. The magnitude of the rose bengal sensitized photocurrent containing the supersensitizer, thiourea was five times greater than that in the absence of thiourea. It was observed, however, that the long time span of irradiation causes the decrease in the photocurrent. Spectroscopic analysis of the dye solution showed that the dye molecule was photobleached and the insoluble aggregate which settles down in the solution, was formed as a result of the possible photocatalytic reaction and the disappearance of dye from the solution was the cause of the decreased photocurrent in the sensitization run.

• Bulletin of the Korean Chemical Society
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• v.34 no.12
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• pp.3586-3590
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• 2013

We present here an efficient and simple method for preparation of highly active heterogeneous ZnO photocatalyst (graphene oxide-zinc oxide: GO-ZnO), specifically by deposition of ZnO nanoparticles onto thiolated GOs. The resultant GO-ZnO sample was characterized by TEM, XRD, Auger, XPS, and Raman measurements, revealing that the size-similar and quasi-spherical ZnO nanoparticles were anchored to the thiolated GO surfaces. The average particle diameter was about 2.5 nm. In the photodegradation of methylene blue (MB) under ultraviolet (UV) light, GO-ZnO exhibited remarkably enhanced photocatalytic efficiency compared with thiolated GO and pure ZnO particles. This strong photocatalytic performance of GO-ZnO can be attributed to the suppression of electron recombination and the enhancement of mass transportation. The results showed that thiolated GO is the preferable supporting material.

• Journal of Environmental Science International
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• v.13 no.1
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• pp.41-45
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• 2004

In this study, The decomposition of gas-phase Benzene and Toluene, Xylene in air streams by direct UV Photolysis, UV/TiO$_2$ and UV/TiO$_2$/A.C process was studied. The experiments were carried out under various UV light intensities and initial concentrations of B.T.X to investigate and compare the removal efficiency of the pollutant. B.T.X was determined by GC-FID of gas samples taken from the a glass sampling bulb which was located at reactor inlet and outlet by gas-tight syringe. From this study, the results indicate that UV/TiO$_2$/A.C system (photooxidation-photocatalytic oxidation-adsorption process) is ideal for treatment of B.T.X from the small workplace. Although the results needs more verifications, the methodology seems to be reasonable and can be applied for various workplace (laundry, gas station et al.).

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1116-1117
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• 2006

Lanthanide tantalite $LnTaO_4$ (Ln= La, Nd, Sm, Dy, Er and Tm) was synthesized by a solid state reaction between mixed powders of $Ln_2O_3$ and $Ta_2O_5$. The single-phase $LnTaO_4$ was prepared by sintering at temperatures of 1423-1673 K in air. The SEM observation showed that the particles were provided with the growth steps and the depeloped facets. The photocatalytic activity for water splitting of $LnTaO_4$ prepared was measured under UV light irradiation. The activity obtained was higher than that previously reported. These results suggested the crystallinity of $LnTaO_4$ photocatalysts correlates closely with the efficiency of water splitting.

• Bulletin of the Korean Chemical Society
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• v.30 no.2
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• pp.402-404
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• 2009

The band structures and the densities of states at the Fermi energy for rutile, anatase and brookite phases are investigated along with the structure-photocatlaytic relationship by using DFT method. Bands are less dispersive in anatase phase than in rutile phase, and they are almost flat in brookite phase. As a result, the DOS value near the Fermi energy for brookite is highest among three types of $TiO_{2}$, which means that the numbers of electrons near the Fermi energy are largest in brookite. The calculation shows that brookite phase may exhibit highest photocatalytic efficiency among three types of $TiO_{2}$.

• Bulletin of the Korean Chemical Society
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• v.30 no.11
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• pp.2613-2616
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• 2009

FeOOH/$TiO_2$, a heterojunction structure between FeOOH and $TiO_2$, was prepared by covering the surface of the $\sim$100-nm-sized FeOOH particles with Degussa P25 by applying maleic acid as an organic linker. Under visible light irradiation (${\lambda}{\geq}$ 420 nm), FeOOH/$TiO_2$ showed a notable photocatalytic activity in removal of gaseous 2-propanol and evolution of $CO_2$. It was found that FeOOH reveals a profound absorption in the spectral range of 400 - 550 nm, and its valence band (VB) level is located relatively lower than that of $TiO_2$. The considerable photocatalytic efficiency of the FeOOH/$TiO_2$ under visible light irradiation was therefore deduced to be caused by the hole transfer between the VB of FeOOH and $TiO_2$.