Fabrication of AlN Thin Film by Reactive RF Magnetron Sputtering and Sensing Characteristics of Oil Pressure (반응성 RF 마그네트론 스퍼터링에 의한 AlN 박막 제조 및 유압 감지 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.27 no.12
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- pp.815-819
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- 2014