• Transactions on Electrical and Electronic Materials
• /
• 제10권5호
• /
• pp.147-151
• /
• 2009

For integrated passive device (IPD) applications, we have successfully developed and characterized metalinsulator-metal (MIM) capacitors with 2000 $\AA$ plasma-enhanced chemical vapor deposition (PECVD) silicon nitride which are deposited with the $SiH_4/NH_3$ gas mixing rate, working pressure, and RF power of PECVD at $250^{\circ}C$. Five PECVD process parameters are designed to lower the refractive index and lower the deposition rate of $Si_3N_4$ films for the high breakdown electric field. For the PECVD process condition of gas mixing rate (0.957), working pressure (0.9 Torr), and RF power (60 W), the atomic force microscopy (AFM) root mean square (RMS) value of about 2000 $\AA$ $Si_3N_4$ on the bottom metal is lowest at 0.862 nm and the breakdown electric field is highest at about 8.0 MV/cm with a capacitance density of 326.5 pF/$mm^2$. A pretreatment of metal electrodes is proposed, which can reduce the peeling of nitride in the harsh test environment of heat, pressure, and humidity.

• 마이크로전자및패키징학회지
• /
• 제21권4호
• /
• pp.63-68
• /
• 2014

For a nanoscale Cu/low-k wafer, inter-layer dielectric (ILD) and metal layers peelings, cracks, chipping, and delamination are the most common dicing defects by traditional diamond blade saw process. Sidewall void in sawing street is one of the key factors to bring about cracks and chipping. The aim of this research is to evaluate laser grooving & mechanical sawing parameters to eliminate sidewall void and avoid top-side chipping as well as peeling. An ultra-fast pico-second (ps) laser is applied to groove/singulate the 28-nanometer node wafer with Cu/low-k dielectric. A series of comprehensive parametric study on the recipes of input laser power, repetition rate, grooving speed, defocus amount and street index has been conducted to improve the quality of dicing process. The effects of the laser kerf geometry, grooving edge quality and defects are evaluated by using scanning electron microscopy (SEM) and focused ion beam (FIB). Experimental results have shown that the laser grooving technique is capable to improve the quality and yield issues on Cu/low-k wafer dicing process.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
• /
• pp.1640-1644
• /
• 2006

The first issue that should be overcome in copper process is its poor adhesive strength between pure copper film and glass substrate. In this study, defining the adhesive strength of pure copper film on various substrates and clarifying the key deposition parameters are presented for the investigation of copper process. First, using different kinds of surface plasma treatments were studied and the results showed that the adhesive strength was not improved even though the roughness of glass substrate surface was increased. Second, adding an adhesive layer between glass substrate and pure copper film was used to enhance the adhesion. Based on the data in the present paper, adopting copper alloy film as an adhesive layer can have capability preventing peeling problem in copper process. Besides, Cu/Cu alloy structure could be etched with the same etchant with better taper angle than the one with single layer of Cu. Unlike Cu/Mo structure, there is no residual problem for Cu/Cu alloy structure during etching process. Finally, this structure was examined in electrical test without significant difference in comparison with the conventional metal process.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
• /
• pp.222-223
• /
• 2008

Recently, piezoelectric transformer is applied to wide fields. Multi layer piezoelectric transformer has the advantage of high step up ratio, high electromechanical coupling coefficient(Kp) and high mechanical quality factor(Qm), however it shows the peeling-phenomenon of electrode, and high price due to high sintering temperature. Therefore this study focus on the method for fabrication of high power rosen type piezoelectric transformers. The composition of $0.01Pb(Ni_{1/3}Nb_{2/3)O_3$ - 0.08Pb$(Mn_{1/3}Nb_{2/3})O_3$-0.91Pb$(Zr_{0.505}Ti_{0.495})O_3$(abbreviated as PNN-PMN-PZT) ceramics is employed for this study.

• 한국융합학회논문지
• /
• 제11권1호
• /
• pp.175-180
• /
• 2020

본 연구에서는 미세패턴 성형이 가능하도록 개발된 초음파 미세패턴 제조시스템을 이용하여 RFID TAG 안테나 형상의 미세패턴 성형기술을 개발하였다. 미세패턴 제조시스템에 종진동 모드의 초음파 공구 혼을 설치하여 절연시트 표면에 RFID TAG 안테나 형상의 미세패턴 안테나 형상을 초음파 압입 성형공정 기술을 개발하였다. 초음파 성형기술은 60kHz 공구 혼을 공진설계 기법을 적용하여 제작하였고, 미세패턴 제조시스템을 이용하여 200㎛ 이하의 절연 시트지에 두께가 25㎛의 코일 와이어를 초음파 압입 성형을 할 수 있다. 초음파 압입 성형 시 코일 와이어의 단선, 박리 및 꼬임 현상 없이 최소선폭 150㎛인 안테나 형상을 성형할 수 있었다.

• 한국기계가공학회지
• /
• 제15권6호
• /
• pp.9-15
• /
• 2016

Due to material-specific vulnerabilities, the surfaces of the liquid crystal glasses used in mobile phones can crack easily, with even the smallest cracks undergoing propagation. To protect the glass surfaces, films are attached to the surfaces during the mobile phone production process. However, after machining the liquid crystal, removal of the film on the liquid crystal surface using chemical and mechanical methods is required. In this research, a peeling apparatus was developed for removing the films attached to liquid crystal surfaces during the production process. Mechanical attachment and design automation through experimentation and finite element modelling were performed to confirm the validity of the design.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.1166-1169
• /
• 2003

The issue with the drainpipe now a day is that they are laid underground Causing us to perform additional work to repair, such as digging up the ground and peeling off the insulator that surrounds the pipe. And such series works are difficult that concession appears from government and municipal office. However, if we can save time and money. Performance of piping robot that we are studied in existing session through fixing unit and improvement of cutting byte shorten and wished to heighten work efficiency. This is why we aye trying to develop a unit that can cut up the projecting parts which connects with the interior part of the drainpipes.

• International Journal of CAD/CAM
• /
• 제6권1호
• /
• pp.105-115
• /
• 2006

Thickness is a commonly used parameter in product design and manufacture. Its intuitive definition as the smallest dimension of a cross-section or the minimum distance between two opposite surfaces is ambiguous for intricate solids, and there is very little reported work in automatic computation of thickness. We present three generic definitions of thickness: interior thickness of points inside an object, exterior thickness for points on the object surface, and radiographic thickness along a view direction. Methods for computing and displaying the respective thickness values are also presented. The internal thickness distribution is obtained by peeling or successive skin removal, eventually revealing the object skeleton (similar to medial axis transformation). Another method involves radiographic scanning along a viewing direction, with minimum, maximum and total thickness options, displayed on the surface of the object. The algorithms have been implemented using an efficient voxel based representation that can handle up to one billion voxels (1000 per axis), coupled with a near-real time display scheme that uses a look-up table based on voxel neighborhood configurations. Three different types of intricate objects: industrial (press cylinder casting), sculpture (Ganesha idol), and medical (pelvic bone) were used for successfully testing the algorithms. The results are found to be useful for early evaluation of manufacturability and other lifecycle considerations.

• 건축역사연구
• /
• 제21권6호
• /
• pp.35-44
• /
• 2012

This paper aimed at investigating into the origin and meaning of the Japanese architect Terunobu Fujimori's 'piercing column', and drew a conclusion as follows. First, the piercing column that made its first appearance in his architect debut work Jinchokan Moriya Historical Museum (1991) was conceived unexpectedly from pencil lines on a sketch that went through over the building's roof. And the tree-like natural treatment of the column's surface was influenced by Takamasa Yoshizaka's description of a Mongolian mud-house. Second, most of piercing columns in his later works have nothing to do with a structural role as in Jinchokan, but were designed for a visual effect and as a symbolic gesture. Again, they allude to a tree in nature through a roughly peeling treatment of the surface. Third, considering his ideas in History of Humankind and Architecture (2005), his column could be related to a universal origin of architecture and a symbol of the sun-god faith, and in particular to independent columns of Japanese Shito shrines, such as 'Onbashira' in Suwa and 'Iwanebashira' in Izumo. That is to say, the Fujimori column is a medium that implies the animistic nature-faith of Japan. Nevertheless, Fujimori's naturalism hints at a disquieting quality through an intentional artificiality and a provocative conflict between structure and finish of a building, which might be one aspect of the modern condition, 'uncanny'.

• Bulletin of the Korean Chemical Society
• /
• 제32권12호
• /
• pp.4221-4226
• /
• 2011

Honeycomb-patterned polyvinypyrrolidone (PVP) thin films coated with nanometer-sized silver particles were prepared using honeycomb-patterned polystyrene (PS) template films fabricated by casting a polystyrene solution under humid condition. Silver was first metallized on the patterned PS films via silver nitrate ($AgNO_3$) reduction using tetrathiafulvalene (TTF) and a small amount of PVP as the reductant and dispersing agent, respectively. The effects of $AgNO_3$, TTF, and PVP solution concentrations during the reduction process in acetonitrile were determined to obtain a uniform silver-coated honeycomb-patterned PS film. Second, the silver-metallized patterned porous PS films were filled with high PVP concentration solutions via the spincoating process. Silver-coated patterned PVP films were obtained by peeling off the PVP layer from the template PS film after drying. The results show that the honeycomb-patterned PVP films uniformly coated with silver particles are conveniently obtained using the silver-coated patterned PS template, although the direct fabrication of these films using water droplets under humid conditions was not feasible because of the water solubility of PVP.