• Journal of the Institute of Convergence Signal Processing
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• v.7 no.3
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• pp.122-129
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• 2006

We propose the Fizeau-type phase shifting interferometer(FPSI) system for the performance test of high-order aspheric lenses. The proposed system is divided into two parts : optical part and signal processing part. Those two parts are operated by a program for hardware control. We also developed an analysis program adopting the phase shifting algorithm to analyze the obtained interferograms. We can confirm that the proposed system is efficient and adequate by direct comparison with the standard criterion in Mark IV interferometric system of Zygo. The peak-to-valley and RMS values of surface errors which are used to characterize high-order aspheric lenses are 0.845 wave and 0.1871 wave, respectively. The measurement errors between the proposed system and Mark IV are less than ${\lambda}/100$ and the repeatability is also calculated at less than ${\lambda}/100$.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.405-409
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• 2003

We explored a new rough grinding technique on optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and range of diamond resin bond wheel. The grinding parameters such as workpiece rotation speed depth of cut and feed rate were altered while grinding the workpiece surfaces of 20m in diameter. Surface roughness is measured by Form Talysurf series2. Our target is to define grinding conditions producing the surface roughness better than 0.02${\mu}{\textrm}{m}$ Ra and the form accuracy of around 0.2${\mu}{\textrm}{m}$ PV.

• Korean Journal of Optics and Photonics
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• v.27 no.3
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• pp.106-113
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• 2016

In this paper, we deal with the wavefront compensation capability of a silicon carbide (SiC) deformable mirror (DM) with 37 actuators for adaptive optics. The wavefront compensation capability of the SiC DM is predicted by computer simulation and examined by actual experiments with a closed-loop adaptive optics system consistsing of a light source, a phase plate, a SiC DM, a high speed Shack-Hartmann sensor, and a control computer. Distortion of wavefront is caused by the phase plate in the closed-loop adaptive optics system. The distorted wavefront has a peak-to-valley (PV) wavefront error of $0.3{\mu}m{\sim}0.9{\mu}m$ and root-mean-square (RMS) error of $0.06{\mu}m{\sim}0.25{\mu}m$. The high-speed Shack-Hartmann sensor measures the wavefront error of the distortion caused by the phase plate, and the SiC DM compensates for the distorted wavefront. The compensated wavefront has residual errors lower than $0.1{\mu}m$ PV and $0.03{\mu}m$ RMS. Consequently, we conclude that we can compensate for the distorted wavefront using the SiC DM in the closed-loop adaptive optics system with an operating frequency speed of 500 Hz.

• Current Optics and Photonics
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• v.7 no.6
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• pp.692-700
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• 2023

We present a method for improving the accuracy of the modal wavefront reconstruction in the radial shearing interferometers (RSIs). Our approach involves expanding the reduced radial terms of Zernike polynomials to high-order, which enables more precise reconstruction of the wavefront aberrations with high-spatial frequency. We expanded the reduced polynomials up to infinite order with symbolic variables of the radius, shearing amount, and transformation matrix elements. For the simulation of the modal wavefront reconstruction, we generated a target wavefront subsequently, magnified and measured wavefronts were generated. To validate the effectiveness of the high-order Zernike polynomials, we applied both low- and high-order polynomials to the wavefront reconstruction process. Consequently, the peak-to-valley (PV) and RMS errors notably decreased with values of 0.011λ and 0.001λ, respectively, as the order of the radial Zernike polynomial increased.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.1
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• pp.13-17
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• 2005

We explored a new rough grinding technique on optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and a range of diamond resin bond wheel. The grinding parameters such as workpiece rotation speed, depth of cut and feed rate were altered while grinding the workpiece surfaces of 20mm in diameter. Surface roughness was measured by Form Talysurf series2. Our target is to define grinding conditions producing the surface roughness smaller than $0.2{\mu}m$ Ra.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.1
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• pp.290-296
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• 2019

Head-up displays for vehicles play an important role in displaying various information about the safety and convenience of driving on the windshield of the vehicle. In this study, ultra-precision machining was performed and evaluated as a method for machining a large-area aspheric free-form mirror that is applicable to augmented reality technology. Precision diamond cutting is highly accurate and suitable for the production of advanced parts with excellent surface integrity, low surface roughness, and low residual stress. By using an aspheric free-form mold, it is possible to improve the optical transfer function, reduce the distortion path, and realize a special image field curvature. To make such a mold, the diamond cutting method was used, and the result was evaluated using an aspherical shape-measuring machine. As a result, it was possible to the mold with shape accuracy (PV) below $1{\mu}m$ and surface roughness (Ra) below $0.02{\mu}m$.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• Journal of the Optical Society of Korea
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• v.20 no.2
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• pp.314-320
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• 2016

The glass thermal forming process provides a high volume, low cost approach to producing aspherical reflectors for x-ray optics. Thin glass sheets are shaped into mirror segments by replicating the mold shape at high temperature. Heating parameters in the glass thermal slumping process are crucial to improve surface quality of the formed glass. In this research, the heating process of a thermal slumping glass sheet on a concave parabolic mold was simulated with the finite-element method (FEM) to investigate the effects of heating rate and soaking temperature. Based on the optimized heating conditions, glass samples 0.5 mm thick were formed in a furnace with a steel concave parabolic mold. The figure errors of the formed glass were measured and discussed in detail. It was found that the formed glass was not fully slumped at the edges, and should be trimmed to achieve better surface deviation. The root-mean-square (RMS) deviation and peak-valley (PV) deviation between formed glass and mold along the axial direction were 2.3 μm and 4.7 μm respectively.

• Journal of the Korea Convergence Society
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• v.7 no.5
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• pp.175-180
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• 2016

The demand for accurate freeform apsheric surface is increasing to satisfy the optical performance. In this paper, we develop the algorithm for opto-mechatronics convergence, that reconstruct the surface 3D profiles from the curvarure data along two orthogonal directions. A synthetic freeform surface with 8.4 m diameter was simulated for the testing. The simulation results show that the reconstruction error is 0.065 nm PV(Peak-to-valley) and 0.013 nm RMS(Root mean square) residual difference. Finally the sensitivity to noise is diagnosed for probe position error, the simulation results proving that the suggested method is robust to position error.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.3
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• pp.253-260
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• 2012

In nowadays, the infrared optics is frequently employed to various fields such as military, aerospace, industry and medical. To develop the infrared optics, special glasses which can transmit infrared wave are required. Ge(Germanium), Si(silicon), and fluoride glasses are typically used for material of the infrared optics. Compared with Ge and Si glasses, fluoride glasses have high transmittance in infrared wavelength range. Additionally, UV(ultraviolet) and visible light can be transmitted through fluoride glasses. There characteristics of fluoride glasses makes it possible to evaluate optical performance with generally used visible testing equipment. In this paper, we used design of experiment to find ultra precision machining characteristic of Ge and fluoride glasses and optimized machining process to obtain required form accuracy of PV(Peak to Valley) $0.2\;{\mu}m$.