Journal of the Korea Convergence Society (한국융합학회논문지)

Korea Convergence Society (한국융합학회)
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A algorithm development on optical freeform surface reconstruction

광학식 자유곡면 형상복원 알고리즘 개발

  • 김병창 (경남대학교 기계공학부)
  • Received : 2016.09.12
  • Accepted : 2016.10.20
  • Published : 2016.10.31
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Abstract

The demand for accurate freeform apsheric surface is increasing to satisfy the optical performance. In this paper, we develop the algorithm for opto-mechatronics convergence, that reconstruct the surface 3D profiles from the curvarure data along two orthogonal directions. A synthetic freeform surface with 8.4 m diameter was simulated for the testing. The simulation results show that the reconstruction error is 0.065 nm PV(Peak-to-valley) and 0.013 nm RMS(Root mean square) residual difference. Finally the sensitivity to noise is diagnosed for probe position error, the simulation results proving that the suggested method is robust to position error.

광기전공학 기술이 융합된 광학계의 발달은 광학계를 구성하는 부품의 표면이 비구면 또는 자유곡면으로 진화하고 있다. 본 논문에서는 광학식 자유곡면의 국부영역으로부터 직교하는 2방향의 곡률을 정의하여 전체 형상을 복원하는 알고리즘을 제안하였다. 8.4 m 자유곡면 형상을 가진 반사거울에 구현된 알고리즘을 적용한 결과 형상 복원 최대오차 0.065 nm, 평균제곱근 오차 0.013 nm로 복원됨을 확인하였다. 프루브의 위치오차 발생에 대한 노이즈 민감도를 해석한 결과, 2 mm 오차에 대해서도 형상복원 최대오차 30 nm, 제곱평균제곱근 오차 8.7 nm로 위치 오차에 매우 둔감한 알고리즘임을 확인하였다.

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References

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