• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 추계학술대회 논문집
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• pp.179-183
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• 2001

Vibration isolation of mechanical systems, in general is achieved through either passive or active vibration control system. Although passive vibration isolators offer simple and reliable means to protect mechanical system from vibration environment, passive vibration isolator has inherent performance limitation. Whereas, active vibration isolator provide significantly superior vibration-isolation performance. Recently, many studied and applications are carried out in this field. In this study, vibration-isolation characteristics of active vibration control system using electromagnetic force actuator are investigated. Some control algorithms. Optimal Feedforward are used for active vibration isolation. Form the experimental results of each control algorithms, active vibration isolation characteristics are investigated.

• 반도체디스플레이기술학회지
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• 제5권4호
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• pp.41-45
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• 대한기계학회논문집
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• 제18권5호
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• pp.1169-1181
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• 1994

Vibration isolation of mechanical systems, in general, is achieved through passive or active vibration isolators. Passive vibration isolator has an inherenrt performance limitation. Whereas, active vibration isolator provides significantly superior vibration-isolation performance at the cost of energy sources and sensors. Recently, in many cases, such as suspension system, precision machinery ... etc, active isolation system outweighs its limitation. Therefore, many studies, researches, and applications are carried out in this field. In this study, vibration-isolation characteristics of an active vibration control system using electromagnetic force actuator are investigated. Several control algorithms including optimal, feedforward are used for active vibration isolation. From the experimental results of each algorithm, effective control algorithms for this active vibration-isolation system are proposed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.176-179
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• 2005

To control the vibration transmitted to the precision instruments from ground has always been of great interest among the researchers. This paper proposes a single axis vibration isolation system which can be used as a module far a table top six axis isolator for highly precise measurement and actuation system. The combined active-passive isolation principle is used for vertical vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in series which consists of very stiff piezo actuator. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator. The active stage is isolated from the payload disturbance through the Passive stage and thus modularity in control is achieved. This made the control algorithm much easier as it does not need to be tuned to specific payload.

• 한국소음진동공학회논문집
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• 제22권9호
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• pp.817-824
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• 2012

정밀 시스템에 전달되는 진동은 시스템의 성능 저하 및 오작동을 초래할 수 있기 때문에 저감되어야 한다. 진동을 저감시키는 가장 일반적인 방법은 진동이 전달되는 경로에 수동 진동 절연 장치를 도입함으로 전달되는 진동을 절연시키는 방법이다. 탄성소자와 점성 감쇠기로 구성된 일반적인 수동 진동 절연 장치는 공진에서의 전달률을 낮추기 위해서 고주파수 대역에서 진동 절연 성능을 희생해야 하는 단점을 지니고 있다. 이 논문에서는 공진에서 낮은 전달률과 고주파수 대역에서 높은 진동 절연 성능을 동시에 가진 수동 진동 절연 장치들의 특성을 비교 분석하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2012년도 춘계학술대회 논문집
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• pp.232-237
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• 2012

정밀 시스템에 전달되는 진동은 시스템의 성능 저하 및 오작동을 초래할 수 있기 때문에 저감되어야 한다. 진동을 저감시키는 가장 일반적인 방법은 진동이 전달되는 경로에 수동 진동절연 장치를 도입함으로 전달되는 진동을 절연시키는 방법이다. 탄성소자와 점성 감쇠기로 구성된 일반적인 수동 진동 절연 장치는 공진에서의 전달율을 낮추기 위해서 고주파수 대역에서 진동 절연 성능을 희생해야 하는 단점을 지니고 있다. 본 논문에서는 공진에서 낮은 전달율과 고주파수 대역에서 높은 진동 절연 성능을 동시에 가진 수동 진동 절연 장치들의 특성을 비교 분석하였다.

• 한국소음진동공학회논문집
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• 제17권7호
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• pp.565-571
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• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.831-836
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• 한국항공우주학회지
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• 제35권6호
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• pp.533-538
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• 2007

위성 탑재체의 지향성능을 향상시키기 위하여 반수동 진동제어법을 제안하고, 시뮬레이션에 의해 진동절연 효과를 검증하였다. 본 논문에서 제안한 반수동 진동제어법은 고주파수 영역에서의 저댐핑 수동제어와, 구조물의 공진을 포함하는 저주파수 영역에서의 고댐핑 수동제어가 갖는 진동절연 효과를 동시에 만족시키기 위해 고안되었다. 시뮬레이션 결과는 반수동 진동제어법이 상기의 효과를 구현하는데 있어 효과적임을 나타낸다.

• 소음진동
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• 제2권4호
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• pp.281-292
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• 1992

Two types of vibration problems are encountered in industrial field: active isolation and passive isolation. In a passive type of vibration isolation, a foundation of a delicated machinery such as TEM, SEM, inspection- probe test, photolithograph, etc. is designed to have a vibration amplitude lower than an acceptable limit. In an active type, the isolation is focused on the vibration reduction caused by the machine itself(pump, motor, press, compressor, etc.). The foundation for such a machine should be so designed as to reduce the transmitted vibration below the permissible level prescribed. At any case, a transmissibility and stability must to be considered. Since an active isolation type is aimed for a vibration source, it is useful to isolate the transmitted vibrations energy from a major vibration source at the specific location. In this paper, a designed methodology of double anti-vibration system has been examined in order to have low transmissibility and reliable stability. Also experiment of scale model behavior has been conducted. Finally, the experiment output of the transfer function is compared to the analytical data.