• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.10a
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• pp.179-183
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• 2001

Vibration isolation of mechanical systems, in general is achieved through either passive or active vibration control system. Although passive vibration isolators offer simple and reliable means to protect mechanical system from vibration environment, passive vibration isolator has inherent performance limitation. Whereas, active vibration isolator provide significantly superior vibration-isolation performance. Recently, many studied and applications are carried out in this field. In this study, vibration-isolation characteristics of active vibration control system using electromagnetic force actuator are investigated. Some control algorithms. Optimal Feedforward are used for active vibration isolation. Form the experimental results of each control algorithms, active vibration isolation characteristics are investigated.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.41-45
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.5
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• pp.1169-1181
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• 1994

Vibration isolation of mechanical systems, in general, is achieved through passive or active vibration isolators. Passive vibration isolator has an inherenrt performance limitation. Whereas, active vibration isolator provides significantly superior vibration-isolation performance at the cost of energy sources and sensors. Recently, in many cases, such as suspension system, precision machinery ... etc, active isolation system outweighs its limitation. Therefore, many studies, researches, and applications are carried out in this field. In this study, vibration-isolation characteristics of an active vibration control system using electromagnetic force actuator are investigated. Several control algorithms including optimal, feedforward are used for active vibration isolation. From the experimental results of each algorithm, effective control algorithms for this active vibration-isolation system are proposed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.176-179
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• 2005

To control the vibration transmitted to the precision instruments from ground has always been of great interest among the researchers. This paper proposes a single axis vibration isolation system which can be used as a module far a table top six axis isolator for highly precise measurement and actuation system. The combined active-passive isolation principle is used for vertical vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in series which consists of very stiff piezo actuator. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator. The active stage is isolated from the payload disturbance through the Passive stage and thus modularity in control is achieved. This made the control algorithm much easier as it does not need to be tuned to specific payload.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.22 no.9
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• pp.817-824
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• 2012

Transmission of unwanted vibration to sensitive systems can cause various problems including performance degradation and system malfunction. The most common approach to limit the transmission of harmful vibration disturbances to the sensitive system is adapting passive vibration isolator. The classical passive vibration isolator comprising a viscous damper and spring element in parallel, however, exhibits conflicting performance characteristics in that low amplification at the resonance, which is desirable, can only be achieved at the sacrifice of vibration isolation performance in high frequency region, which is undesirable. In this paper, vibration isolation characteristics of various passive isolator schemes in literature to circumvent this conflict are introduced and compared.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.232-237
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• 2012

Transmission of unwanted vibration to sensitive systems can cause various problems including performance degradation and system malfunction. The most common approach to limit the transmission of harmful vibration disturbances to the sensitive system is adapting passive vibration isolator. The classical passive vibration isolator comprising a viscous damper and spring element in parallel, however, exhibits conflicting performance characteristics in that low amplification at the resonance, which is desirable, can only be achieved at the sacrifice of vibration isolation performance in high frequency region, which is undesirable. In this paper, vibration isolation characteristics of various passive isolator schemes in literature to circumvent this conflict are introduced and compared.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.7 s.124
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• pp.565-571
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• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.831-836
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.35 no.6
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• pp.533-538
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• 2007

A semi-passive vibration isolation control method for enhancing pointing performance of on-board payload has been derived, and its effectiveness has been evaluated through numerical simulation. The semi-passive control law proposed in this study was derived so as to obtain the same performance as a high passive damping at low frequencies and obtain the same performance as a passive low damping at high frequencies. In the numerical simulation, the intended vibration isolation performance of the semi-passive control law has been obtained.

• Journal of KSNVE
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• v.2 no.4
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• pp.281-292
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• 1992

Two types of vibration problems are encountered in industrial field: active isolation and passive isolation. In a passive type of vibration isolation, a foundation of a delicated machinery such as TEM, SEM, inspection- probe test, photolithograph, etc. is designed to have a vibration amplitude lower than an acceptable limit. In an active type, the isolation is focused on the vibration reduction caused by the machine itself(pump, motor, press, compressor, etc.). The foundation for such a machine should be so designed as to reduce the transmitted vibration below the permissible level prescribed. At any case, a transmissibility and stability must to be considered. Since an active isolation type is aimed for a vibration source, it is useful to isolate the transmitted vibrations energy from a major vibration source at the specific location. In this paper, a designed methodology of double anti-vibration system has been examined in order to have low transmissibility and reliable stability. Also experiment of scale model behavior has been conducted. Finally, the experiment output of the transfer function is compared to the analytical data.