• 연구논문집
• /
• s.33
• /
• pp.81-88
• /
• 2003

A metal jet printing system based on ink jet printing technique is one of the effective equipments for manufacturing elements of display devices, electrical devices, information processing systems, and so on. In order to develop an actuator of the metal jet printing system, bimorph type PZT actuator(length 25.2mm, width 7.2mm, thickness 0.5mm, shim thickness 0.2mm) and its controller(voltage range $\pm24v$, built-in fast recovery diode) were suggested and investigated. Performance tests and characteristic analysis, such as displacement, force, hysteresis and frequency, were carried out. The results show that the suggested actuator and controller are suitable for the metal jet printing system.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.250-253
• /
• 2004

This study deals with the microvalve, which is composed of the multilayer bender type PZT actuator, actuator controller and microvalve body. The object of this study is to develope the microvalve with multilayer bender type PZT actuator. In order to achieve this object, prototype PZT actuator and microvalve were suggested and manufactured. Also, the performance of this model was evaluated through the experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.10a
• /
• pp.106-106
• /
• 2003

• Proceedings of the KSME Conference
• /
• 2004.11a
• /
• pp.951-955
• /
• 2004

Piezoelectric(PZT) actuator can substitute for solenoid which is used in fluid control field because it has faster response times and no possibility of explosion. Besides, it is available in a high temperature and it has low energy consumption. In this study, pneumatic micro valve, bimorph type PZT actuator using the softner type PZT, carbon plate as a shim and its controller circuit were suggested and investigated. Performance tests and characteristics analysis, such as displacement, force, hysteresis and frequency properties, were carried out. The displacement of the actuator measured at the end point was 63 ${\mu}m$., force of the actuator was 0.052 N and maximum operating frequency was 15Hz. Also, characteristics of the micro valve with PZT actuator were evaluated in a testing system. The results show that the suggested PZT actuator is suitable for micro valve.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2007.05a
• /
• pp.1131-1136
• /
• 2007

This paper presents an active vibration control of a 1-DOF system using hybrid mount which consists of elastic rubber and PZT(piezostack) actuator and elastic rubber and electromagnetic actuator, respectively After identifying stiffness, damping properties of the elastic rubber, PZT actuator and electromagnetic element, a mathematical model of the hybrid mount is established. The mount model is then incorporated into the 1-DOF system and the governing equation of motion is obtained in a state space. A sliding mode controller is designed in order to actively attenuate the vibration of the system. Control responses such as acceleration and transmitted force of the 1-DOF system are experimentally evaluated and presented in time and frequency domains.

• Proceedings of the KSME Conference
• /
• 2007.05a
• /
• pp.1463-1468
• /
• 2007

This paper presents the possibility of the electric energy harvesting using piezoelectric actuator which is operated by geared motor. The geared motor consisting of oval shape cam and speed controller was operated in the range of 40${\sim}$172rpm. The PZT actuator of $36L{\times}13W{\times}0.6H$ was used for energy harvesting and the results of the theoretical model were verified by comparing it with the measured response of a experimental setup. Experimental study for obtaining the optimal operating conditions, such as displacement variation of the PZT actuator and motor speed variation, was achieved. A power of 0.02mW at the geared motor speed of 172rpm and the PZT actuator maximum displacement of $500{\mu}m$ was measured. In this study, it was confirmed that the wind power can be used for MEMS based sensor operating and windmill health monitoring one.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.17 no.7 s.124
• /
• pp.617-623
• /
• 2007

This paper presents an active vibration control of a dynamic system using hybrid mount which consists of elastic rubber-piezostack actuator and elastic rubber-electromagnetic actuator, respectively. After identifying stiffness, damping properties of the elastic rubber, PZT actuator and electromagnetic element, a mathematical model of the hybrid mount is established. The mount model is then incorporated into the dynamic system and the governing equation of motion is obtained in a state space. A sliding mode controller is designed in order to actively attenuate the vibration of the system. Control responses such as acceleration and transmitted force of the dynamic system are experimentally evaluated and presented in time and frequency domains.

• Proceedings of the KSME Conference
• /
• 2007.05a
• /
• pp.979-984
• /
• 2007

This paper presents a new control mechanism for the proportional pressure control which is accomplished by electro-pneumatic regulator using two PZT actuators. The electro-pneumatic regulator of this study is 2-stage type and consists of two piezoelectric actuators, a controller and a main poppet valve. The piezoelectric actuators are multilayer bender type and are controlled by digital signal. Proportional pressure control technique is very important because that can derive improvement of product quality and driving ability in the pneumatic system. Solenoid actuator method for pressure control is widely used but this actuator has a high power consumption characteristics. So new actuator is required for the energy saving. In this study, PZT actuator for the pressure control was fabricated and experimented instead of the conventional type solenoid actuator. Experiments for the new control mechanism of the elector-pneumatic regulator were operated under the input condition of 0.4[MPa] and it was confirmed that this mechanism has a good control characteristics to the response sensitivity and hysteresis.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2003.05a
• /
• pp.1004-1008
• /
• 2003

Near-filed optical storage using cantilever aperture tip is a promising way fer next generation optical data storage. To enhance the speed of reading and writing data, gap between tip and media should be controlled fast and precisely within near field region. In this paper, several PZT actuators are analyzed far constructing dual servo control algorithm: coarse actuators(stact. PZT, bimorph PZI) for media surface inclination and One actuator(film PZT) for media surface roughness. Dynamic analysis of stack PZT, bimorph PZT, and film PZT are performed through the frequency response. Based on the frequency response and mathematical model, fast analog controller is designed.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.18 no.2
• /
• pp.228-233
• /
• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.