• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.5
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• pp.458-465
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• 2009

In general, ultrasonic guided wave techniques that used for an evaluation of the internal defect have been applied without considering energy loss. It can be found out that the significant attenuation is observed in the signal of structure with defect by the scattering and absorption. Even in the signal acquired from defect-free structure, this attenuation can be also significant. Therefore, it is very essential to determine the Lamb wave propagation characteristics depending on modes because the dispersibility of Lamb wave can be easily influenced by the attenuation effect with frequency and thickness. For this reason, changing the propagation distance, attenuation coefficient of each Lamb wave mode needs to be investigated by the contact pitch-catch method with PZT(piezoelectric) sensors. In this paper, the experimental attenuation coefficient is measured by choosing the following three different variables; mode, thickness and plate materials. As a result, experimental attenuation coefficient is obtained as the function of variables.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.1
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• pp.245-248
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• 2012

In this paper, the optimized growing conditions of PZT thin films on low temperature co-fired ceramics (LTCC) substrates are studied. The LTCC technology is an emerging one in the fields of mesoscale (from 10 um to several hundred um) sensor and actuator against silicon based technology due to low cost, high yield, easy manufacturing of 3 dimensional structure, etc. The LTCC substrates with thickness of 400 um are fabricated by laminating 100 um green sheets using commercial power (NEG, MLS 22C). The Pt/Ti bottom electrodes are deposited on the LTCC substrates, then the growing conditions of PZT thin films using rf magnetron sputtering method are studied. The growing conditions are tested under various rf power and gas ratio of oxygen to argon. And the crystallization and ingredient of PZT films are analyzed by X-ray diffraction method (XRD) and energy dispersive spectroscopy (EDS). The optimized growing conditions of PZT thin films are rf power of 125W, Ar/O2 gas ratio of 15:5.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.1
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• pp.1-5
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• 2010

Acoustic emission(AE) has emerged as a powerful nondestructive tool to detect or monitor preexisting defects and leaks in the vessel structures. A Bragg grating based acoustic emission sensor system is developed. Various type of fiber Bragg grating sensor including the variable length of sensing part was fabricated and prototype sensor system was tested by using PZT pulser and pencil lead break sources. Two types of sensor attachment were used. First, the fiber Bragg grating sensor was attached fully to the surface using bonding agent. Second one is that one part of fiber was attached to the surface partly by bonding and the other part of fiber will be act as a cantilever. That is, the resonant frequency of the fiber Bragg grating sensor will depend on the length of sensing part. The final goal of the sensor system is to provide on-line monitoring of cracks or leaks in reactor vessel head penetration of nuclear power plants.

• Composites Research
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• v.28 no.4
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• pp.148-154
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• 2015

In order to detect damage in early stages and properly maintaining structures, the structural health monitoring technology is employed. In most cases, active-sensing SHM needs many piezoelectric (PZT) sensors and actuators. Thus, if there is a defect on PZT used for active-sensing SHM, the structural status could be misclassified. This study, for reliable SHM performance, investigated to detect defects of sensors by using the admittance-based sensor diagnostics. This study also introduced an algorithm that can diagnose sensor defects based only on data measured from the sensors in case that information about the changes in adhesive and environmental investigation, this study confirms that the proposed algorithm could be efficiently applied to real-world structures in which a significant temperature variation could take place.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.8
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• pp.27-33
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• 2001

The performance of the ordinary Fiber Bragg Grating(FBG) sensor strain measurement system, which uses Fabry-Perot filter for scanning wavelength, has limitation for application because of hysteresis characteristics of PZT element in the filter, slow scan rate of the filter and the high cost of system. We proposed and experimented a multiple FBG sensor system using light emitting diode(LED) as a light source and adapting Code Division Multiplexing(CDM) method to separating out individual sensor signal. Output signals for a applied static and dynamic strain and crosstalk levels between sensor signals were measured. The price of the system is very loss and the response speed is very fast. Crosstalk levels between sensor signals below - 30 dB were demonstrated.

• Journal of Sensor Science and Technology
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• v.4 no.2
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• pp.22-28
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• 1995

A Michelson interferometric AC current sensor has been fabricated by using a single mode optical fiber and a cylindrical PZT tube of which a radial dimension varies with applied voltage. The signal processing scheme used in this work, measures the magnitude of AC current regardless of the frequency of the current. An AC current is measured by counting the number of interference fringe during half cycle of the AC current. The number of interference fringes varies linearly with the magnitude of the current and the error range is within 5% at the temperature range from $-20^{\circ}C$ to $80^{\circ}C$.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.139-139
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• 2003

많은 압전 후막은 여러 감지소자, 통신 및 사무자동화 기기, 전기 및 전자부품, 의료장비 및 국방산업에 까지 널리 응용되어 왔다. 그 중에서도 압전특성이 뛰어난 PZT 후막은 마이크로 펌프, 밸브, 헤드, 모터, 트랜스듀서 뿐 아니라 최근 바이오칩용 센서와 액추에이터로서 널리 연구되고 있다. 또한 마이크로 센서와 액추에이터 의 제작 및 구동을 위한 MEMS 기술의 도입으로 실리콘 베이스의 소자 개발이 집중되고 있다. 스크린 프린팅 방법은수 마이크론에서 수십 마이크론 후막의 실현이 용이하고 비교적 경제적이며 소자신뢰도가 높고 대량생산에 유리하여 활발한 연구가 진행 중이다. 그러나 후막은 벌크에 비해 기공률이 높고, 또 소자응용에 있어서 고온소결 시 MEMS공정을 위한 실리콘 베이스 기판과의 확산 및 반응에 의 한 계면 및 활물질 성능의 저하가 문제가 되고 있다. 따라서 본 연구에서는 스크린 프린팅과 더불어 졸 코팅 방법의 도입으로 후막의 성형 및 소결 밀도를 높임과 동시에 여러 확산 방지 막의 증착으로 capacitor 형 PZT 후막의 물성 및 전기 적 특성을 향상시키고자 하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.455-458
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• 2002

In recent years, precision positioning stage is demanded fur some industrial fields such as semi conductor lithography, ultra precision machining and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of it such as 3-axis positioning, characteristic of motion and resolution is verified.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05b
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• pp.173-176
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• 2004

The piezoelectric ceramics for AE sensor piezoelectric devices are desirable to possess higher resonance vibrations. The compositions of $0.9Pb(Zr_xTi_{1-x})O_3-0.1Pb(Mn_{1/3}Nb_{1/3}Sb_{1/3})O_3$ (PZT-PMNS) in this work are selected for obtaining especially large electromechanical coupling factor, high mechanical quality factor and high Curie temperature. This ceramic has higher piezoelectric activity and higher electromechanical coupling factor, but the ceramic has lower Curie temperature. The piezoelectric and dielectric characteristics of PZT-PMNS ternary system are investigated as functions of $Ti^{2+}$, $Zi^{2+}$ mol rate. As the results, MPB(morphotropic phase boundary) in this piezoelectric ceramic is x=0.522. Resonance vibrations of PZT ceramics are investigated as ball-bearing drop test. For the use of AE sensor that driving with pre-amplifier, filter circuit after packed this ceramic and an elastic body.

• Journal of the Microelectronics and Packaging Society
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• v.22 no.4
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• pp.83-89
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• 2015

In this paper, we propose a fabrication technique for enhanced electrical properties of piezoelectric thick films with excellent patterning property using sol-infiltration and a direct-patterning process. To achieve the needs of high-density and direct-patterning at a low sintering temperature (< $850^{\circ}C$), a photosensitive lead zirconate titanate (PZT) solution was infiltrated into a screen-printed thick film. The direct-patterned PZT films were clearly formed on a locally screen-printed thick film, using a photomask and UV light. Because UV light is scattered in the screen-printed thick film of a porous powder-based structure, there are needs to optimize the photosensitive PZT sol infiltration process for obtaining the enhanced properties of PZT thick film. By optimizing the concentration of the photosensitive PZT sol, UV irradiation time, and solvent developing time, the hybrid films prepared with 0.35 M of PZT sol, 4 min of UV irradiation and 15 sec solvent developing time, showed a very dense with a large grain size at a low sintering temperature of $800^{\circ}C$. It also illustrated enhanced electrical properties (remnant polarization, $P_r$, and coercive field, $E_c$). The $P_r$ value was over four times higher than those of the screen-printed films. These films integrated on silicon wafer substrate could give a potential of applications in micro-sensors and -actuators.