• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.14-19
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• 2002

In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and SiO2 by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and $NH_3$ as precursors. The TaN films were deposited on $250^{\circ}$C by both method. The growth rates of TaN films were $0.8{\AA}$/cycle for PAALD and $0.75{\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w - $1.8 : 0.12 \mu\textrm{m}$ but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was $11g/\textrm{cm}^3$ and one for thermal ALD TaN was $8.3g/\textrm{cm}^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200nm)/TaN(l0nm)/$SiO_2(85nm)$/Si structure was shown at temperature above $700^{\circ}$C by XRD, Cu etch pit analysis.

• Design & Manufacturing
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• 제11권3호
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• pp.8-12
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• 2017

In general, metallic bio-materials is more widely used in solid tissue like bone or tooth than flexible tissue such as skin or muscle. Especially, Cobalt Chrome Molybdenum(Co-Cr-Mo), which is used in tooth surgery, has a great corrosion resistance. Because this bio-material is non-toxic in human body, and has a bio-compatibility that the vital reaction is not occurred with tissue in body. However the chemical reaction is occurred by fatal matter that deteriorate the property of material surface in conventional polishing, and it can affect to fatal disease in human body or decrease the material properties such as hardness, yield strength or bio-compatibility. This surface in poor condition can cause development of corrosion or bacteria. In this study, MR fluid polishing is used to minimize the scratch, pit or surface flaws generated in conventional polishing. Surface roughness is measured according to the polishing condition to obtain fine surface condition.

• 대한의용생체공학회:의공학회지
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• 제27권1호
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• pp.1-5
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• 2006

In this paper, we propose a subject-independent regression model to estimate systolic blood pressures (SBP) conveniently and continuously. There have been several researches on estimating SBP with pulse transit time (PTT) and they showed promising results. However, previous studies used only PTT as the estimation parameter, and their models were generated with just one person's PTT data which is not applicable to estimating other person's SBP. Therefore, we collected several additional biometric parameters with 202 healthy subjects. After statistical analysis of measured biometric parameters with SBP, we chose final estimating parameters including PTT to generate a multiple linear regression model for estimating SBP. Comparing the results of our study with approvable standards of automated sphygmomanometers developed by Association for the Advancement of Medical Instrumentation and approved by American National Standards Institute (ANSI/AAMI) indicates that our proposed method for continuously blood pressures monitoring gives an acceptable error.

• Geomechanics and Engineering
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• 제9권6호
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• pp.689-707
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• 2015

Progressive increase in population causing land scarcity, which is forcing construction industry to build multistory buildings having underground basements. Normally, basements are constructed for parking facility. This research work evaluates important factors which have caused the collapse of pile-anchor system at under construction five star hotel. 21 m deep excavation is carried out, to have five basements, after installation of 600 mm diameter cast in-situ contiguous concrete piles at plot periphery. To retain piles and backfill, soil anchors are installed as pit excavation is proceeded. Before collapse, anchors are designed by federal highway administration procedure and four anchor rows are installed with three strands per anchor in first row and four in remaining. However, after collapse, system is modeled and analyzed in plaxis using mohr-coulomb method. It is investigated that in-appropriate evaluation of soil properties, additional surcharge loads, lesser number of strands per anchor, shorter grouted body length and shorter pile embedment depth caused large deformations to occur which governed the collapse of east side pile wall. To resume work, old anchors are assumed to be standing at one factor of safety and then system is analyzed using finite element approach. Finally, it is concluded to use four strands per anchor in first new row and five strands in remaining three with increase in grouted and un-grouted body lengths.

• Clinical Endoscopy
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• 제51권6호
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• pp.527-533
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• 2018

There have been many advances in endoscopic imaging technologies. Magnifying endoscopy with narrow-band imaging is an innovative optical technology that enables the precise discrimination of structural changes on the mucosal surface. Several studies have demonstrated its usefulness and superiority for tumor detection and differential diagnosis in the stomach as compared with conventional endoscopy. Furthermore, magnifying endoscopy with narrow-band imaging has the potential to predict the invasion depth and tumor margins during gastric endoscopic submucosal dissection. Classifications of the findings of magnifying endoscopy with narrow-band imaging based on microvascular and pit patterns have been proposed and have shown excellent correlations with invasion depth confirmed by microscopy. In terms of tumor margin prediction, magnifying endoscopy with narrow-band imaging offers superior delineation of gastric tumor margins compared with traditional chromoendoscopy with indigo carmine. The limitations of narrow-band imaging, such as the need for considerable training, long procedure time, and lack of studies about its usefulness in undifferentiated cancer, should be resolved to confirm its value as a complementary method to endoscopic submucosal dissection. However, the role of magnifying endoscopy with narrow-band imaging is expected to increase steadily with the increasing use of endoscopic submucosal dissection for the treatment of gastric tumors.

• Corrosion Science and Technology
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• 제18권4호
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• pp.148-153
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• 2019

Pure nickel with a thickness of 1 mm was plated on type 304 stainless steels and low alloy steels (JIS G3131 SPHC) by electrolytic plating method in a circulating plating bath. Plating performance, mechanical properties, and surface characteristics were evaluated in terms of pretreatment process, anode material, pH, current density, and flow rate of the plating solution. Addition of hydrochloric acid during pre-treatment process improved the adhesion performance of plating. To improve plating efficiency, it is desirable to use S-nickel rather than electrolytic nickel. The use of S-nickel was also confirmed to be desirable for maintaining the pH and concentration of the plated solution. The defect of the plating using S-nickel anode produced pit on the surface. However, it is believed that proper control can be obtained by increasing the flow rate. Internal stress and hardness values of electrolytic nickel plating according to current density need to be carried out with further studies.

• Steel and Composite Structures
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• 제38권1호
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• pp.79-86
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• 2021

Due to the complex geological conditions, a large number of high quality coal seams was buried in the western of China which cannot be mining in open-pit methods. The dynamic properties of that coal cannot be studied easily in real site for the complex working condition. The compound coal blocks made on the basis of the real situation were studied in the laboratory. The physical and mechanical properties of the compound coal blocks and the raw coal were contrasted by using the UCS tests. The results show that the compound coal blocks made by mixing coal powder, cement and water in proportion of 2.5:2:1 are the closest to that of standard raw coal. Then the propagation of strain waves and crushing effects on the coal were studied in the compound coal blocks by using the super dynamic strain test system and the numerical calculated method of ANSYS/LS-DYNA. The results show that the diameter of the crushing zone in the compound coal blocks was similar to that in the numerical results. The fractures distribution in laboratory tests also has a similar trend to the calculation results. The measured strain waves at the distance of 50 cm, 100 cm, and 150 cm from the center of the charge are mainly concerned at -1.0×104 με and have a similar trend as that in the numerical simulation.

• Geomechanics and Engineering
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• 제31권5호
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• pp.529-543
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• 2022

The lattice-spring-based synthetic rock mass model (LS-SRM) technique has been extensively employed in large open-pit mining and underground projects in the last decade. Since the LS-SRM requires a complex and time-consuming calibration process, a robust approach was developed using the Response Surface Methodology (RSM) to optimize the calibration procedure. For this purpose, numerical models were designed using the Box-Behnken Design technique, and numerical simulations were performed under uniaxial and triaxial stress states. The model input parameters represented the models' micro-mechanical (lattice) properties and the macro-scale properties, including uniaxial compressive strength (UCS), elastic modulus, cohesion, and friction angle constitute the output parameters of the model. The results from RSM models indicate that the lattice UCS and lattice friction angle are the most influential parameters on the macro-scale UCS of the specimen. Moreover, lattice UCS and elastic modulus mainly control macro-scale cohesion. Lattice friction angle (flat joint fiction angle) and lattice elastic modulus affect the macro-scale friction angle. Model validation was performed using physical laboratory experiment results, ranging from weak to hard rock. The results indicated that the RSM model could be employed to calibrate LS-SRM numerical models without a trial-and-error process.

• Geomechanics and Engineering
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• 제30권6호
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• pp.551-564
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• 2022

Fragmenting the rock mass is considered as the most important work in open-pit mines. Ground vibration is the most hazardous issue of blasting which can cause critical damage to the surrounding structures. This paper focuses on developing an explicit model to predict the ground vibration through an multi objective evolutionary polynomial regression (MOGA-EPR). To this end, a database including 79 sets of data related to a quarry site in Malaysia were used. In addition, a gene expression programming (GEP) model and several empirical equations were employed to predict ground vibration, and their performances were then compared with the MOGA-EPR model using the mean absolute error (MAE), root mean square error (RMSE), mean (𝜇), standard deviation of the mean (𝜎), coefficient of determination (R²) and a20-index. Comparing the results, it was found that the MOGA-EPR model predicted the ground vibration more precisely than the GEP model and the empirical equations, where the MOGA-EPR scored lower MAE and RMSE, 𝜇 and 𝜎 closer to the optimum value, and higher R² and a20-index. Accordingly, the proposed MOGA-EPR model can be introduced as a useful method to predict ground vibration and has the capacity to be generalized to predict other blasting effects.

• 한국결정성장학회지
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• 제26권1호
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• pp.1-7
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• 2016

RE : YAG 단결정은 레이저 발진 소재로 다양한 성장 변수를 제어하면서 Czochralski법으로 성장된다. 성장과정 동안 고액계면의 온도구배 및 회전속도에 의해 발생하는 결함들은 결정의 광학적 특성 저하로 작용하기 때문에 결함 분석을 통한 결정 품질의 향상을 필요로 한다. 격자결함 밀도 분석(EPD)을 통하여 성장된 RE : YAG 단결정의 표면 결함 존재를 확인하였고, 이를 통해 투과전자현미경(TEM) 분석영역을 선택하였다. 선택한 영역의 시편은 트라이포드 연마 방법으로 제작하였고, 200 kV 투과전자현미경과 300 kV 전계 방사형 투과전자현미경(FE-TEM)을 사용하여 buckling, rod shaped, 내부응력에 의한 bend contours, 편석 등의 결함들을 관찰하였다.